Pad Diameter: ø8, Pad Type: B (Bellows), Pad Material: S (Silicone Rubber), Buffer Specifications: J (Rotating), Stroke: 3mm, Vacuum Inlet: 04 (ø4 Tubing, One-touch Fitting)

Size: 4 (40), Valve Type: 1 (Normally Closed), Body Material: S (Stainless Steel), Seal Material: F (FKM), Port Size: 04 (Thread; 1/2), Thread Type: N (NPT), Rated Voltage: 3 [120 (110) VAC], Electrical Entry: CS (Conduit, w/Surge Voltage Suppressor), Oil-free Option: D (Oil-free)

Size: 3 (30), Valve Type: 1 (Normally Closed), Body Material: S (Stainless Steel), Seal Material: N (NBR), Port Size: 04 (Thread; 1/2), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: G (Grommet)

Body Size: 2 (1/8, 1/4), Type: 2 (Elbow), Control Type: 0 (Meter-out), Control Range: FSM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: 01 (1/8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 04 (ø4)

Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: ET (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature

Body Size: 2 (1/8, 1/4), Type: 2 (Elbow), Control Type: 0 (Meter-out), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: 01 (1/8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 04 (ø4), Sealant: without Sealant, Push lock: A (Push-lock)

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: 0 (w/o SI Unit), SI Unit Output Polarity: Positive Common, NPN or w/o SI Unit, Valve Stations: 04 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: A (DIN Rail Mounting, Name Plate, w/Station

Body Size: 40, Thread: N (NPT), Port: 04 (1/2), Option: CM (C + M), Attachment: SV (S + V), Semi-Standard 1: Standard, Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F)

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

Port size Body size Thread size Port thread Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

Size: 200 (1/8 Standard), Control Range: FSM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Tube Size: 04 (ø4), Push lock: A (Push-lock)

Size: 3 (30), Valve Type: 1 (Normally Closed), Body Material: S (Stainless Steel), Seal Material: E (EPDM), Port Size: 04 (Thread; 1/2), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN Terminal w/Light, w/Surge Voltage Suppressor), Oil-free Option: D (Oil-free)

Stations: 03 (3 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: Flow Adj.

Stations: 03 (3 Stations), Supply/Return Unit Layout: D (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: Flow Adj.

Size: 4 (40), Body Material: S (Stainless Steel), Seal Material: N (NBR), Port Size: 04 (1/2), Thread Type: N (NPT), Rated Voltage: B (24 VAC), Electrical Entry: WN (M12 Connector w/o Connector Cable, w/Surge Voltage Suppressor), Oil Free Option: None, Bracket: B (with Bracket)

Body Size: 4 (1/2), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: 2 (90°), Thread: R, Port Size: 04 (1/2), Width Across Flats: 9mm, Tubing: 13 (ø1/2"), Seal: S (w/Sealant)

Body Size: 4 (1/2), Type: 2 (Elbow), Control Type: 1 (Meter-in), Indicator Direction: 2 (90°), Thread: N (NPT), Port Size: 04 (1/2), Width Across Flats: 9mm, Tubing: 13 (ø1/2"), Seal: S (w/Sealant)

Body Size: 4 (1/2), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: None (0°), Thread: N (NPT), Port Size: 04 (1/2), Width Across Flats: 9mm, Tubing: 13 (ø1/2"), Seal: S (w/Sealant)

Body Size: 4 (1/2), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: None (0°), Thread: N (NPT), Port Size: 04 (1/2), Width Across Flats: 9mm, Tubing: 11 (ø3/8"), Seal: S (w/Sealant)

Body Size: 2 (1/8, 1/4), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: None (0°), Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats: 9mm, Tubing: 04 (ø4), Seal: S (w/Sealant)

Body Size: 2 (1/8, 1/4), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: None (0°), Thread: R, Port Size: 01 (1/8), Width Across Flats: 9mm, Tubing: 04 (ø4), Seal: S (w/Sealant)