Nozzle Diameter: 03 (0.3mm), Vacuum Pressure: S (-85 kPa For ZU03 /-87 kPa for ZU04; -90 kPa:For ZU05/07)

Nozzle Diameter: 05 (0.5mm), Vacuum Pressure: S (-85 kPa For ZU03 /-87 kPa for ZU04; -90 kPa:For ZU05/07)

Nozzle Diameter: 04 (0.4mm), Vacuum Pressure: S (-85 kPa For ZU03 /-87 kPa for ZU04; -90 kPa:For ZU05/07)

Piping: 2 (IN:Top/OUT:Top), Fitting: 07 (IN: Ø6 Straight, OUT: Ø4 Straight), Accessory: None, Option: 6 (Non-relieving, Degreased)

Stations: 07 Stations, Port Size: N9 (w/ø5/16" One-touch Fitting), SI Unit: 0 (w/o SI Unit)

Stations: 07 Stations, Port Size: N7 (w/ø1/4" One-touch Fitting), SI Unit: 0 (w/o SI Unit)

Nozzle Diameter: 0.3mm, Vacuum Pressure: -85 kPa For ZU03 /-87 kPa for ZU04; -90 kPa:For ZU05/07, Port Size: -

Nozzle Diameter: 0.4mm, Vacuum Pressure: -85 kPa For ZU03 /-87 kPa for ZU04; -90 kPa:For ZU05/07, Port Size: -

Regulator Mounting: Direct Mount, IN/OUT Fitting Type: 07 [IN/ø6 (Straight) - OUT/ø4 (Straight)], Accessory: -, Options: -, Unit Representation: -

Manifold Mounting: A (Direct Mount), Centralized Supply (IN) Piping Position: 1 (Bottom), Regulator Block Stations: 3 Stations, IN/OUT Fitting Type: 07 [IN/ø6 (Straight) - OUT/ø4 (Straight)], Accessories: D (w/o Pressure Gauge/L Side), Options: 1 (0.35 MPa Setting), Unit Representation: Z (Display Unit for Product Name Plate and Pressure Gauge: PSI)

Manifold Mounting: B (DIN Rail Mount), Centralized Supply (IN) Piping Position: 1 (Bottom), Regulator Block Stations: 8 Stations, IN/OUT Fitting Type: 07 [IN/ø6 (Straight) - OUT/ø4 (Straight)], Accessories: A (w/Pressure Gauge/L Side), Options: 1 (0.35 MPa Setting), Unit Representation: Z (Display Unit for Product Name Plate and Pressure Gauge: PSI)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 07 (1/4), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: F (Body: PFA, Actuator Endplate: PVDF, Diaphragm: PTFE-LVC40,50), Option: 1 (Flow Rate Adjustment)

Body Size: 2 (1/8, 1/4), Type: 2 (Elbow), Control Type: 1 (Meter-in), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 07 (ø1/4), Sealant: S (with Sealant), Push lock: A (Push-lock)

Body Size: 2 (1/8, 1/4), Type: 2 (Elbow), Control Type: 1 (Meter-in), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 07 (ø1/4), Sealant: without Sealant, Push lock: A (Push-lock)

Body Size: 2 (1/8, 1/4), Type: 2 (Elbow), Control Type: 1 (Meter-in), Control Range: FSM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: N (NPT), Port Size: 02 (1/4), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 07 (ø1/4), Sealant: S (with Sealant), Push lock: A (Push-lock)

Body Size: 2 (1/8, 1/4), Type: 2 (Elbow), Control Type: 1 (Meter-in), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: N (NPT), Port Size: 02 (1/4), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 07 (ø1/4), Sealant: S (with Sealant), Push lock: A (Push-lock)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Model: 1FS, Thread: R (or None), Port Size: U10/32 (10-32UNF), Width Across Flats: 9 mm (or None: Sizes 2/3/4), Applicable Tubing: 07 (ø1/4"), Seal: without Sealant

Body Class: 3 (Orifice Dia. ø8), Valve Type: 0 (N.C.), Applicable Tubing Size: 07 (1/4"), Port B (OUT) Different Dia. Size: Ports A & B Same Size, Pilot Port Thread Type: 2 (M5X0.8), Pilot Port Position: P4 (Position 4), Material: Standard, Option: 2 (With By-Pass)

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 06 (One-touch Fitting ø6), VAC: 01 (Screw-in Rc 1/8), EXH: 06 (One-touch Fitting ø6), Accessories: NS (w/o Standard Bracket, w/Silencer)

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 06 (One-touch Fitting ø6), VAC: 01 (Screw-in Rc 1/8), EXH: 06 (One-touch Fitting ø6), Accessories: N (w/o Bracket, w/o Silencer)