21- AF-A 10- Series Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size Option a Mounting Nil Without mounting option B Note 3) With bracket + r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

Air Operated Type Integral Fitting Type (Hyper Fittings) Series LVC How to Order Valves (Single Type) LVC LVA LVC 2 0 06 S LVH Option Body class Nil None LVD 1 With flow rate adjustment Body class Orifice dia. Symbol 2 With bypass ø4 2 2 Valve type LQ2

Symbol Symbol Nil 2 3 4 6 5 Application Ports A & B same size N PPS PFA Ammonium hydroxide compatible Metric sizes 03 04 06 08 10 12 19 25 3 4 6 8 10 12 19 25 Pilot port thread type Refer to the applicable tubing table to the left. Different diameter tubings can be selected within the same body class.

Integral Fitting Type (Hyper Fittings) Series LVD How to Order LVC LVA LVD 1 0 03 S LVH Body class Option LVD Orifice dia. Body class Nil None Symbol 1 Valve type 1 1 ø2 With flow rate adjustment LVQ 2 2 2 ø4 With bypass 0 N.C. 3 3 With flow rate adjus

M5 x 0.8 Nil 2 Port B (OUT) different dia. size Inch sizes Symbol Nil Application Ports A & B same size 03 05 07 11 13 19 1/8 3/16 1/4 3/8 1/2 3/4 Different diameter tubings can be selected within the same body class.

Clean Regulator SRH Series

Port size SRP SRH3000 URJF 1/4 SRH4000 URJF 3/8 Piping port size Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 With metal gasket seal fitting With metal gasket seal fitting Symbol 01 02 03 04 A2 A3 X210 EPDM seals SRF With relief port fittings (Applicable tube O.D.: 4) X211 X216 ITV Machined relief port M5 thread Knob operation product with reduced torque X233 IC X234 Aluminum body ITVH Note) The pressure

ZP

(mm) 02 04 2 4 Nil -X19 With lock ring Without lock ring (10 or larger) 1 2 10 to 16 20 to 32 ZX 06 6 3 40, 50 ZR 08 8 Material 10 10 ZM N S NBR Silicon rubber 13 13 16 16 Pad type U Urethane rubber 20 20 ZH F Fluoro rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 ZU GS Conductive silicon rubber (2 to 16) 40 40 D Deep 20 or large are manufactured upon receipt of order

Size: 100 (M5 Standard), Control Range: FSM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Tube Size: 04 (ø4)

Size: 100 (M5 Standard), Control Range: FC (50 to 150 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Tube Size: 04 (ø4), Push lock: A (Push-lock)

Size: 100 (M5 Standard), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Tube Size: 04 (ø4), Push lock: A (Push-lock)

Size: 100 (M5 Standard), Control Range: FSC (50 to 150 mm/s), Indicator Window Direction: 1 (180°), Tube Size: 04 (ø4)

Size: 100 (M5 Standard), Control Range: FSM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Tube Size: 04 (ø4), Push lock: A (Push-lock)

.: 04 (ø4), Port Size/Applicable Tube: M5 Thread (M5X0.8)

.: 04 (ø4), Port Size/Applicable Tube: M5 Thread (M5X0.8)

.: 04 (ø4), Port Size/Applicable Tube: M5 Thread (M5X0.8)

.: 04 (ø4), Port Size/Applicable Tube: M5 Thread (M5X0.8)

.: 04 (ø4), Port Size/Applicable Tube: M5 Thread (M5X0.8)

Model: S (Hexagon Socket Head Male Connector), Tube Size: 04 (Ø4), Port Size/Applicable Tube: M5 (M5X0.8)

Applicable Tubing Size: 04 (ø4), Pilot Port Configuration: 2 (M5 x 0.8)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 04 (ø4), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 1 (Flow Rate Adjustment)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 04 (ø4), Port B OUT: 06 (Rcø6), Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 1 (Flow Rate Adjustment)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 04 (ø4), Port B OUT: 06 (Rcø6), Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 1 (Flow Rate Adjustment), Specification: None, Z: Z (Pilot Port Thread 1/8)