3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

Solid State Vacuum Regulator

or less Current type Input impedance Approx. 6.5k Voltage type VAC OUT Tank Approx. 2.7k Preset input ITV2090 1 to 5VDC (load impedance: 1 k or more) Set pressure (Vacuum) Vacuum pump, Ejector Analog output 4 to 20mA (sink type) (load impedance: 250 or less) Output signal Note 3) (Monitor output) NPN open collector output: Max. 30V, 30mA Switch output PNP open collector output: Max. 30mA

I

B: Approx 110g Sensor Supply Voltage Same as Source Voltage Connection Voltage Input 1~5V (Input Impedance: 100k) Current Input 4~20mA (Input Impedance: 250) PSE10 O P T I O N Blank (Standard) X108 PSI Display M O U N T I N G A Panel mount B Wall/DIN rail mount O U T P U T T Y P E 0 NPN 1 PNP D I M E N S I O N S PSE 51* *Dimensions refer to ones measured after R(PT) has been screwed in.

Direct Operated Precision Regulator Modular Style Series ARP3000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ARX21-01 ARX21-02 0.35 0.35 IR 0.30 0.30 Outlet pressure (MPa) Outlet pressure (MPa) VEX 0.25 0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

IFW520 125 VAC 10 to 20 25 1.5 or less 5 5 1.5 0.7 4 4 2.5 1.3 IFW550 250 VAC 20 to 50 60 3 or less 5 5 1 0.5 4 4 1.5 0.8 Note) Hysteresis is the flow rate that is necessary for moving the microswitch from the operation position (ON signal) to the return position (OFF signal). 8 VDC 7 5 3 3 5 4 3 3 5 5 3 3 4 4 3 3 14 VDC 30 VDC 5 5 3 3 4 4 3 3 125 VDC 0.4 0.4 0.1 0.1 0.4 0.4 0.1 0.1 250 VDC

PF2A/PF2W

, CFM x 102 l/min, CFM x 101 Display unit Note 1, 2) Real-time flow rate Accumulated flow l, ft3 x 101 0 to 50C 5% F.S. or less Operating fluid temperature Linearity Repeatability Temperature characteristics Current consumption (No load) Weight Note 3) 1% F.S. or less 2% F.S. or less 3% F.S. or less (15 to 35C, based on 25C), 5% F.S. or less (0 to 50C, based on 25C) 290 g 150 mA or less 250

ZSE F/ISE

Yes 3 1/2 digit LED display (Sampling frequency: 5 times/sec) 2% F .S. 1 digit or less (Ambient temperature of 25 3C) Green LED (OUT1: Light up when ON), Red LED (OUT2: Light up when ON) No-voltage input (Solid state switch or reed switch), 5 ms or longer input IP65 Operating: 0 to 50C, Stored: 10 to 60C (No condensation or freezing) Operating and stored: 35 to 85% RH (No condensation) 250

VXA21/22

0.4 340 10 4.5 6 8 250 1.0 3 8 (10A) 340 0.4 10 10 1 2 (15A) 420 Note) Refer to Glossary on page 17-3-15 for details of max. operating pressure differential and max. system pressure.

V

250 262.5 (L4) 135.5 135.5 148 160.5 173 185.5 198 198 210.5 223 235.5 248 260.5 260.5 273 Stations are counted from the D side Courtesy of Steven Engineering, Inc. !

Vacuum System Peripherals:

impedance ZU Approx. 6.5 k Voltage type Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Approx. 2.7 k Preset input Right angle type cable connector Straight type cable connector ZL 1 to 5 VDC (Load impedance: 1 k or more) 4 to 20 mA (Sink type) (Load impedance: 250

VDW Series

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

0.23mm2 R 3 1 P : AC 80 72.5 54.5 M plug connector (M) 56 61 300 (Lead wire) Cover dia 1.5 Cross section 0.23mm2 Indicator light 89 77 78 R 3 1 P : AC Equation L1=16n+11 L2=16n+22 n: Station (Max. 20) Dimensions L n 2 43 54 75 85.5 20 331 342 362.5 373 15 251 262 287.5 298 16 267 278 300 310.5 17 283 294 325 335.5 18 299 310 337.5 348 19 315 326 350 360.5 12 203 214 237.5 248 13 219 230 250

VXA21/22

Normally closed (N.C.) (8A) 6 1.05 19 8 1.7 31 1.5 0.4 340 10 1.9 34 4.5 0.61 11 250 1.0 6 1.05 19 3 8 (10A) 8 1.7 31 340 0.4 10 2.4 43 (15A) 10 2.4 43 1 2 420 Note) Refer to p.4.0-14 the glossary for detail of max. operating pressure differential and max. system pressure.

ZPT/ZPX

to 250 X 50 EPR 20 to 150 X X X The above table covers only general characteristics of subject rubber materials.