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Bracket (Model: ZS-28-B) Perform zero adjustment again after removing any charge from the sensor. Zero adjust Error M3x5 L 4. Press the button to finish the setting. Then [P_2] is displayed. Set as above. Mounting with panel mount adapter Fix the panel mount adapter to the product with the mounting screws (nominal size: 3 x 8 L, 2 pcs.) supplied.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

to 12 Nm 12/9 13 43.5 33 30.5 10 18.5 17 6 to 9 Nm 10/8 11 42.5 33 30 9 18.5 17 6 to 9 Nm 1075 11 42.5 33 30 9 18.5 14 4 to 9 Nm 8/6 9 40 32 27.5 8 16 12 3 to 8 Nm 6/4 7 38.5 32 27.5 8 16 15 VCC Series Special Tools Tool for Attaching/Detaching Valve VCC-G-A Knurled 8 4 x 1.8 21 For attaching/ detaching valve 25 104 M16 x 1.5 VCC-G-B VCC-G-A VCC-G-B (for socket wrench) Knurled 4 x 1.8 21 28

HEC_W-E

Tightening torque: HEC006--22 to 24 Nm HEC012--28 to 30 Nm Drain -12 to 14 Nm 3) A plug is mounted on DRAIN for recirculating fluid. When the piping for drain is connected, remove this plug beforehand. Be sure to arrange the piping on the drain to exhaust the constant temperature recirculating fluid in the unit at the maintenance.

XL-OMY0002

40 50 63 80 100 160 H4100 XLA25-60S-1 XLA25-60S-1 XLA25-60S-2 XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 (2 ) (3 H5120 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 2 3 4 XLD-80H5 2 XLA25-60S-2 8 XL-OMY0002 4. 4-1 XLD-25 XLD-40 XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 25 40 50 63 80 100 160 [] 5605150 -6 Pa abs 110 14 45 80 160 200 300 800 L/S 1 0.53 28

XLDV Series

(The conductance is shown as a guide only.) 32 Initial pumping conductance 30 28 L/s () P=0.1MPa XLD-100 XLD-160 XLDV-100 XLDV-160 26 Initial pumping valve conductance l/s (Viscous flow) Shows flow rate 24 22 20 XLDV-63 XLDV-80 XLD-63 XLD-80 18 16 14 XLD-50 XLDV-50 12 10 XLDV-40 XLD-40 8 when P=0.1MPa 6 4 XLD-25 XLDV-25 2 0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0

XMC/XYC Series

XMC Exterior dimensions C D L1 L2 Fn Fc C (Fc) (KF Flange) (CF Flange) J H B A G A Unit:mm Model A B C D Fn Fc G H J P.C.D L1 L2 XMC-16 40 110 38 1 30 34 17 40 26 P.C.D 27 6x4.4 XMC-25 50 120 48 1 40 26 39 28 XMC-40 65 171 66 2 55 70 41 63 36 P.C.D. 58.7 6x6.6 C D L1 L2 Fn Fd Fc C (Fc) (KF Flange) (K Flange) (CF Flange) H J K B A G A Unit:mm Model A B C D Fn Fc Fd G H J K P.C.D L1 L2 XMC-

Pressure Sensor for General Fluids

(at 25 oC) Model PSE57-02 PSE57-02-28 Fluid Applicable Gas or liquid that will not attack or corrode the materials of parts in contact with fluid Power supply voltage 12 to 24 VDC10% with 10% voltage ripple or less Electrical spec.

CG1x-OM0006N

P101. 2 CG5 N A (mm) E max (J) E max (J) 2 E=(m/2)v 20 0.28 0.42 25 0.41 0.65 E J m: (Kg) v m/s 32 0.66 0.91 40 1.2 1.8 50 2.0 3.4 EE max (J) 63 3.4 4.9 80 5.9 11.8 100 9.9 16.7 (2) 2-7. 14 28. 3 13 2 3CDG5 (M4 1~1.2Nm 3 3.

Cylinder with lock

5.5 5.5 7 7.5 6.5 5.5 D-F5/ J59 D-F5W/ J59W D-F5BA/ F5NT D-F59F 3.5 4 4 4.5 4.5 4.5 D-G39/ K39 9 9 9 10 10 11 D-P3DWA 3 4.5 4.5 5 5 5.5 D-P4DW 4 4 4 4.5 4 4.5 D-A9/ A9V 7 7.5 8.5 9.5 9.5 10.5 D-Z7/ Z80 7.5 8.5 7.5 9.5 9.5 10.5 D-A5/ A6 9 9 10 11 11 11 D-A59W 13 13 13 14 14 15 D-A3/ A44 9 9 10 11 11 11 * Values which include hysteresis are for guideline purposes only, they are not a 27 - 28

Cylinder with lock

The figure shows the mounting example for the D-M9(V)/ M9W(V)/ M9A(V)/ A9(V) They are not a guarantee (assuming approximately 30% dispersion) and may change substantially depending on the ambient environment. 25 - Auto switch proper mounting position (detection at stroke end) and its mounting height 26 - 27 - 28 - 29 - 30 - 3-4. Wiring method and examples of auto switches 31 - 4.

Rotary Table

Specifications 19 Weight 19 Effective torque 20 Internal construction and parts 20 MSQ1 to 7 21 Basic circuit 21 Circuit structure 21 Recommended models 22 Mounting 22 Load restrictions 22 Unit used as flange mount 23 Direction and Angle of Rotation 24 Rotating range examples 25 Piping 25 Air supply 26 Setting of rotation time 26 Moment of inertia 27 Calculation formulae for moment of inertia 28

Low-Speed Rotary Actuator

Weight 20 Effective torque 20 Rotation range 21 Internal construction and parts 21 Size 10, 15 22 Size 20, 30, 40 23 Basic circuit 23 Circuit structure 24 Mounting 24 Load restrictions 24 Operation of axis fitting referring 25 Unit used as flange mount 25 Rotating range examples 25 Air supply 26 Setting of rotation time 26 Moment of inertia 27 Calculation formulae for moment of inertia 28

MHS

1060 mm 0.01 c.p.m. 120 60 21 37 63 111 177 280 502 1 N 23 42 71 123 195 306 537 mm 4 4 6 8 8 12 16 g 58 96 134 265 345 515 952 1) 1625 L=20mm 3263 L=30mm 0.5MPa MHS3 16D MHS320D MHS325D MHS332D MHS340D MHS350D MHS363D MHS380D MHS3100D MHS3125D MHS3mm 16 20 25 32 40 50 63 80 100 125 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 30 14 25 42 74 118 187 335 500 750 1270 (1) N 16 28

Air Gripper for collaborative robots.

Auto switch Auto Switch Specifications D-M9-5(With indicator light) Auto switch model D-M9P-5 Wiring 3-wire Output PNP type Applicable load IC circuit,Relay,PLC Power supply voltage 5 , 12 , 24 VDC (4.5 to 28 V) Current consumption 10 mA or less Load voltage 28 VDC or less Load current 40 mA or less Internal voltage drop 0.8 V or less at 10 mA (2 V or less at 40 mA) Current leakage 100 A

Air Gripper Unit for Collaborative Robots

Auto switch Auto Switch Specifications D-M9N-5(With indicator light) Auto switch model D-M9N-5 Electrical entry direction In-line Wiring 3-wire Output NPN type Applicable load IC circuit,Relay,PLC Power supply voltage 5 , 12 , 24 VDC (4.5 to 28 V) Current consumption 10 mA or less Load voltage 28 VDC or less Load current 40 mA or less Internal voltage drop 0.8 V or less at 10 mA (2 V or less

Air Gripper Unit for Collaborative Robots

Auto Switch Auto Switch Specifications D-M9-5(With indicator light) Auto switch model D-M9N-5 D-M9P-5 Electrical entry direction In-line Wiring type 3-wire Output type NPN PNP IC circuit, Relay, PLC IC circuit,Relay,PLC Power supply voltage 5 , 12 , 24 VDC (4.5 to 28 V) Current consumption 10 mA or less Load voltage 28 VDC or less Load current 40 mA or less Internal voltage drop 0.8 V or

DOC1023125

Accessories Table spacerParallel motor only Model Part name QTY EQFS25(L/R) Table spacer 1 EQFS32(L/R) EQFS40(L/R) Optional parts (sold separately) Power supply cable Parallel I/O cable Communication cable USB cable Setup software Refer to 9 Optional parts (sold separately) for details of optional parts. 28 - Installation and Initial Setting .

LEKF-OMZ0035

LEKFS series slider type / Common precautions . 24 5.1 Design / selection . 24 5.2 Handling . 24 5.3 Mounting . 25 5.4 Precaution on maintenance . 26 3.5 How to detach and attach the dust seal band . 27 5.7 Replacement of belt . 28 6.Troubleshooting . 29 6.1 Alarms . 29 -1- LEKFS Series / Electric Actuator Safety Instructions These safety instructions are intended to prevent hazardous situations

DOC1023126

Accessories . 28 Installation and Initial Setting .29 . Flow from installation to initial setting. 29 . Check the contents of the package . 30 . Preparation of necessary supplies . 31 . Installation of electric actuators . 32 . Wiring and Connection . 33 .. Connection to input power supply . 33 .. Connection to PC . 38 .. Connection to PLC . 38 . Power ON alarm (error) . 40 .

Electric Actuator Slide table ／ High Precision Type High performance Battery-less absolute encoder

Vertical 2] 5000 deceleration[mm/s Position repeatability [mm] 0.01 note4) 0.1 or less Lost motion [mm] Screw Lead [mm] 10 5 2.5 12 6 16 8 Impact / Vibration note5) 50/20 2] resistance [m/s Actuation type Ball screw (In-Line) Ball screw + Belt (Parallel) Guide type Linear guide(circulating type) Operating temperature [] 540 Operating humidity [%RH] 90 or less(no condensation) Motor size 28