VQ

(Value in the initial stage.) 1 (P) 3 (R) Normally closed VQZ VZ (A) 2 VS 1 (P) 3 (R) Normally open Option Specifications Latching AC Large flow capacity Type Item Normally open 1 2 VQ120-l VQ110L-l VQ110l (A) 2 VQ110U-l Model 0.7MPa 0.6MPa 0.5MPa Max. operating pressure 3 2 0.14mm2 (Cv ) 1 2 0.68mm2 (Cv ) 0.20mm 2 (Cv ) 2 1 Effective area 0.008 0.038 0.011 1 (P) 3 (R) 0.20mm2 (Cv ) 2 3 0.68mm2

The PFM is available in four maximum flow rate options 10, 25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon or carbon dioxide. 2-color display flow switch., Sensor and monitor separation, which allows remote monitors centralization., Integrated flow adjustment valve as an option, reducing piping and saving space (unique feature in the market)., Operation indication

ASR

9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

2 w y r !0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 Stainless steel 304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

Electric Slide Table / High Precision Type 《 AC servo motor 》

Specification 1.1 LECS series driver 1.1.1 How to order L E S Y H 16 D S2 A 50 S 2 A1 (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (3)Motor type (2)Motor mouting position (1) Size Symbol type Output D In-line 16 25 Size Compatible driver [W] R Right side parallel AC servo motor LECSA-S1 LECSA-S3 S2 100 16 L Left side parallel S3 200 25 (Incremental encoder) LECSB2-T5 LECSC2-T5 LECSS2-T5 T6 100

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

tubing 6/4 P2 (Pressure gauge port size) R F J M D J U Bracket (Option) T N S Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z F J K AA BB H J M N P1 P2 A B Note 1) C D 10-/21-AR20K-B 2 Note 2) 1/8, 1/4 20.5 30 1/8 11 34 40 43.9 44 67.4 5.4 65.5 26.5 15.4 28.5 55 M28 x 1 2.3 28.5 24.7 28.5 14 6 10-/21-AR25K-B

VCB

Note 1) The same bracket is used for VCB3 and VCB4 (port size 1/2). 17-2-26 7 Series VCB Direct Operated 2 Port Solenoid Valve For Heated Water Dimensions Grommet : G Conduit: C Q 300 F D 280 D Q F VC C G1/2 C R R VDW VQ E E B A H 2-P Port size VX2 2-P A B H 2-M Thread depth N VX Port size 2-M Thread depth N Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

C95Series

, ~ 24V .ZV 2-wire Diagnosis indication 3m . . L (Example: A5JL) Sm" . ... Z (E.l2 color Indication) ~ 3wire NPN IC ~ W&(.. rMIsWl1 'YIM (2 <:OIor 1nOIet.\IorI) With timer 5V, 12V _n 4-wire ~ (NPN) ~"I)I:M/tcdOt~on) ~ Latch type cbQnos~ output (2 color IncllcaJIoo) Mounting bracket part number !f;o II.': 1110. , .100 1 , ' ";. ~"'_CV!_ ~.r-U 1141) lf1~'~I'tI" ##!

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

3 r q e !2 !1 t i With auto switch (Built-in magnet) 20, 25 12, 16 t y e !2 !0 q r !3 !1 w t !1 !2 !0 o q r !3 w y e Component Parts No.

RZQ

If a moment or torque directly acts on the cylinder, it will lead to reduced service life or damage to machinery. 10-10-8 9 3 Position Cylinder Series RZQ Construction u i @2 r !0 y q w !9 e @1 @4 !3 RE A B @0 REC !2 CX @3 !

CJP

Mounting nut (Refer to page 6-2-13.)

CJP

Mounting nut (Refer to page 6-2-13.)

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

R.

FQ1

Micromesh element 1 20 0.7 2 3 40 SUS316 L EM5, 6 0 to 250 74 30 105 (Absolute) 2 4 HEPO II element Precision cleaning R 0 to 80 0.5 30 PP EJ 6 13 1 Series FQ1 Quick Change Filter Specifications Model FQ1011 FQ1012 FQ1010 1 (L125) 1 (L250) 2 (L250 x 2) No. of built-in elements (L: Element length in mm) Operating pressure Maximum 1MPa Operating temperature Maximum 80C (Not exceeding boiling

KT10

Gauge port 2) (Inlete, Outletr) Porting Configuration Pressure gauge Code r psig/bar unit MPa unit r e 0 6 10 20 40 60 Q No pressure gauge w q w q 600 psig/bar 3) 4.1 MPa 7 MPa 14 MPa 28 MPa 41 MPa 70 MPa qIN wOUT eGauge port (Inlet) rGauge port (Outlet) Connections (Inletq, Outletw) 1000 psig/bar 3) Ports Code 2000 psig/bar 3) Connections 4P V 4PN 4000 psig/bar 3) e 4P 4PN 4 4B NPT 1/4 inch

Rated Control Flow Range: 11 (1 to 100 L/min), Port Size: N7 (1/4 inch), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side)

Rated Control Flow Range: 50 (0.5 to 50 L/min), Port Size: N1 (1/8 NPT), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side)

Rated Control Flow Range: 11 (1 to 100 L/min), Port Size: N2 (1/4 NPT), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side)

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 06 (3/4), Output Specification: 2 (OUT1: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: R (Bracket)

Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: N1 (1/8 NPT), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side)