ZP3

w w e q q ZP3-T-A-B ZP3-T-A-(02/04) w t r q Component Parts No.

AC Servo Motor Driver (CC-Link Type ）

Driver Servo amplifier For transistor EMG, etc. 5.6k Approx. 5mA Switch TR DICOM VCES 1.0V ICEO 100 A 24VDC 10% 150mA (2) Digital output interface DO-1 A lamp, relay or photocoupler can be driven. Install a diode (D) for an inductive load, or install an inrush current suppressing resistor (R) for a lamp load.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

•

_8_ (mm) , A , 8 ' .. ---.t! R at type Flat with rib , I Mqde~ . > Il. 9, Y .C Rat type (mm) y . H :M6)$1 . ..Ii:M8'Xl . i ,8 0 MOOsl M E F I . , 1 .F!a, >C I E F I G. r '.e G lit"'" lb.

VFR

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

Vacuum Unit

Pressure switch for vacuum assembly (With 2 mounting screws) ZK2 ZS A E A G M r Wiring t Other specifications Construction !

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

r p g n i t a r e p o . x a M ) 7 . 0 ( 0 0 1 g i s p * e g n a r g n i t a r e p o l a i t n e r e f f i d e r u s s e r P ) a P M ( ) 6 . 0 ~ 1 . 0 ( 0 9 ~ 5 1 e g n a r . p m e t g n i t a r e p O F 0 4 1 ~ 0 4 t n a c i r b u l d e d n e m m o c e R ) 2 3 G V O S I ( 1 # l i O e n i b r u T l w o B e t a n o b r a c y l o P T L A N k n a T d e e F o t u A 5 T L A N 1 * S 1 5 T L A

Digital Flow Switch (Integrated display type)

(Page 74) 8000 0x1F40 0 R PD conversion equation : a F32 N Refer to "Inclination and intercept".

Air Cylinder NCA1 Series

L R O D T H R E A D X A O P T I O N Thread Form Code M .

Direct Solenoid

Body AlBafiUy lrr|r|dr bodv *rd 12) bqd.n dns. 1sl $!ool A Sbr As,y. 1 Spdn9 A,ICI338 1 -!sqp!r arr$&5 q!!!o 1 Spec6r arr338.l 7 a,rl3s&s Sol. Ga3kt 4xT33314 9. 1 I 115'120 V 5ffi0 Hz 220/2{0 V glto Hz z v 50to Ha a@t{}9 am1-r0 aml{7 I Sol. Cap Arsy. (Rut$r acc68s ptug) I Sol. Cap A3sy. {RacBd nontock op6r.) c. Sol. Cep A3sy. (Rubbr ptug and ttghi) Sol. Cap Ar!y.

Magnetically Coupled Rodless Cylinder

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

modular-press-e

(except when the bowl material is metal) 221 Regulator / AR20K to AR60K Regulator with Backflow Function AR10 to AR60 Replacement Procedure is P.404 Construction AR10 AR20(K)/AR25(K) AR30(K)/AR40(K) AR50(K)/AR60(K) t e t t t IN OUT e e e IN OUT IN OUT r IN OUT r r r AR20K to AR60K (Regulator with Backflow Function) A-A y A 2 OUT 1 I N C SM A The numbers are the same as the "Construction"

Modular F.R.L. Pressure Control Equipment

(except when the bowl material is metal) 221 Regulator / AR20K to AR60K Regulator with Backflow Function AR10 to AR60 Replacement Procedure is P.404 Construction AR10 AR20(K)/AR25(K) AR30(K)/AR40(K) AR50(K)/AR60(K) t e t t t IN OUT e e e IN OUT IN OUT r IN OUT r r r AR20K to AR60K (Regulator with Backflow Function) A-A y A 2 OUT 1 I N C SM A The numbers are the same as the "Construction"

LJ1H

5 w e r t @0 !4 !3 !8 !6!7 i q A A !1 !2 u @1 Section AA Parts list Material Note No. Description No.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

P R 63.8 (DIN 65.1) 63 (DIN 64.3) R P R B B B B B 122 [126.4] 19 19 19 60 31.5 22 A A A A A 1/4 (P, R port) 13.8 (For DIN: 15.1) 4-4.5 (For mounting) (Pitch) P = 20 29 Manual override (Station n) (Station 1) (Light/surge voltage suppressor) + + + 73 [80] 57.6 A A 10.5 41 30.5 B B 6.5 (Pitch) P = 20 25 1/8 (A, B port) L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector

NCA1

L R O D T H R E A D X A O P T I O N Thread Form Code M .

MY1

Data MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

EX510

CN4) CN2, 3, 4 Internal circuit Common for driving a load () OUT5, 10, 15 Common for driving a load () OUT4, 9, 14 Common for driving a load () OUT3, 8, 13 Common for driving a load () OUT2, 7, 12 Common for driving a load () OUT1, 6, 11 q w e r t y u i o !

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

VFS

Tightening torque for terminal: 0.6 Nm Series VFS4000/5000 Model Terminal block marking A + A side A side A A side A side B + B VFS 100 VFS 200 VFS4 00 VFS5 00 4 5 4 5 B side B side 3 4 3 4 A side A side B side B side Applicable terminal: 1.25-3.5M, 1.25Y-3L, 1.25Y-3M There is no polarity.