5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)330Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type0.74

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)330Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type0.74

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)330Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type0.74

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)330Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type0.74

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.88

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.88

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)330Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type0.74

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

Cooling Capacity: Cooling Capacity: 1700/1900W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: G w/PT-G Conversion Fitting Set, Option: -

Type: Thermo-Chiller, Cooling Method: Air-Cooling, Cooling Capacity: 1,700/1,900 W (50/60 Hz), Piping thread type: Rc, Optional specifications: None

Type: -, Cooling Method: -, Cooling Capacity: 1,700/1,900 W (50/60 Hz), Piping thread type: NPT (PT-NPT conversion fitting set included), Optional specifications: None

Type: Thermo-Chiller, Cooling Method: Water Cooling, Cooling Capacity: 1,700/1,900 W (50/60 Hz), Piping thread type: Rc, Optional specifications: None

Type: -, Cooling Method: -, Cooling Capacity: 1,700/1,900 W (50/60 Hz), Piping thread type: NPT (PT-NPT conversion fitting set included), Optional specifications: None

Cooling Capacity: 018 (Cooling Capacity: 1700/1900W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc