VCW

107 1/4, 3/8 VCW41 30 50 94 41 13.5 17 36 25 23 M5 8 26 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 70 48 68 62 65.5 50.5 103 68 70 119 3/4 17-2-55 8 Series VCW Dimensions (N.O.)

VEX1

Proof pressure Max. operating pressure Set press. range Air operated Solenoid Ambient and fluid temperature Hysteresis Repeatability Sensitivity Mounting Lubrication Port 01 P A R mm2 02 01 02 03 04 04 06 10 10 12 14 20 02 Port size Rc(PT) 1 11 2 1 4 11 4 1 2 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 590 2 1 300 17 25 1.4 16 0.9 25 1.4 60 3.3 70 3.9 330 18 36 2.0 Cv 16 0.9 130 7.2 160 8.9 180 10

2/3 Port Valve

Select a model from the highest operating pressure difference and the characteristic figure of flow rate in p.4.1-70. Thread T F N Orifice size 1 2 3 4 Rc(PT) NPTF G(PF) NPT 1.5mm 2.2mm 3mm 4mm Refer to table q for configuration. Port size 01 02 03 1 8 1 4 3 8 Valve/Body 4 Common/single Refer to table q for configuration.

ZP

Thin Flat/Thin Flat with Ribs Deep A B Y Model Model A B C D E F Y G H G H I: M5 x 0.8 I: M6 x 1 ZPR10UT 10 11 1 ZPR10D 10 16 12 18 16 25 33.9 50 71 76 7 15 24 32.9 49 20 25 70 75 6 ZPR16D ZPR13UT 13 14 1.5 ZPR16UT 16 17 Applicable Tubing ZPR10CT 10 11 0.8 Applicable tubing O.D.

Brake mechanism added

16 ) Note 2) 95 + 40 (n 4) 2 100 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 15 + 40 n (n = 2, 4, 6, 8 ) Note 1) (n = 4, 8, 12, 16 ) Note 2) 2 (Different surfaces, Same surface) 1 65 70 75 10 60 D-M9AV (n 2) 2 60 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 65 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 70 + 30 (n 4) 2 75 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 10 + 30 n (n = 2, 4, 6, 8 )

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+ 45 (n 2) 25 + 45 70 25 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) D-C73C D-C80C D-H7C (n 2) 2 80 + 50 (n 2) 30 + 50 80 5 30 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) D-B5 D-B64 D-G5 D-K59 (n 2) 2 70 + 50 (n 2) 25 + 50 5 70 25 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 75 + 50 (n 2) 30 + 50 D-B59W 10 75 30 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) Note 3) When n is an odd number, an

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

30 75 125 150 10 20 30 125 75 100 20 50 10 40 13-/22-MXQ6(L) 13-/22-MXQ8(L) 13-/22-MXQ12(L) 13-/22-MXQ16(L) 13-/22-MXQ20(L) 13-/22-MXQ25(L) 6 4.5 5.5 5.5 13.5 5.5 13.5 1 1 1 9 9 7.5 5 12 32 8 31 8 16 3.5 3.5 7.5 11.5 26.5 27.5 11.5 6 40.5 14.5 40.5 14.5 21.5 24.5 21.5 20 10 10 17 17 36 36 16.5 26 16 16 16 22 29 47 47 7 51.5 20.5 33.5 51.5 20.5 26.5 30.5 20.5 39 29 19 29 27 35 67 70

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

After securing the cylinder, readjust the stroke with the adjustment bolt. 80 Load [N] 70 60 15 50 40 30 10 20 10 0 0 100 200 300 400 500 600 700 800 900 Distance between supports L [mm] Adjuster holder 6. There are limitations on the load mass and operating pressure in case the product is used in the vertical direction.

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0.65 (0.73) Rubber seal VQ530 5 1 12 0.33 3.4 13 0.37 3.7 60 63 63 0.58 (0.66) VQ5000 1/2 Exhaust center Metal seal VQ540 5 0 12 0.13 2.9 14 0.18 3.4 50 53 70 0.65 (0.73) 3-position Rubber seal VQ540 5 1 14 0.39 3.9 16 0.35 4.5 60 63 63 0.58 (0.66) Pressure center Metal seal VQ550 5 0 12 0.23 2.9 13 0.24 3.3 50 53 70 0.65 (0.73) Rubber seal VQ550 5 1 13 0.32 3.4 14 0.40 3.9 60 63 63 0.58

XLAQ/XLDQ

(Compound No. 1232-70, White) It has a low weight-reduction ratio and low particle generation within O2 plasma and NH3 gas environments. XVD XGT CYV EPDM (Ethylenepropylene rubber) Relatively lower priced and excellent in weatherability, chemical and heat resistance, but with no resistance at all to general mineral oil.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

•

ZPR20 , 57 61 , ZPR25 65 68 .O' ZPR100 10 12 15 24 3<.9 49 20 70 33.9 50 20 71 25 75 6 57 61 57 61 ZPR16D 16 18 16 25 25 76 7 Applicable tube 2PR32 mm . :Appli~I~1IJbe O.t;) i'P .

MY2

The spacing (l) of the side support must be no more than the values shown in the graph at right. 100 m 90 l 80 70 (650) Caution 60 Load weight m m qIf the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Make sure to level the cylinder tube when mounting the cylinder.

CXWM/CXWL

If they are placed far apart from each other, please consult with SMC. 20Shock Absorber Specifications RB0805-X552 RB0805 RB1006-X552 RB1006 RB1411-X552 RB1411 Shock absorber (1) Data CXWM20/25CXWM10/16CXWM32Applicable slide unit Maximum energy absorption (J) 0.98 3.92 14.7 Stroke absorption (mm) 5 6 11 Max. collision speed (m/sec) 0.05 to 5 Max. operating frequency (cycle/min) (2) 70 80

MLGC

70 4 104 40 7 7 32 38 Rc 1/8 Rc 1/8 62 60 13 125 M8 x 1.25 M12 x 1.75 depth 21 115 11 82.5 4 115 45 8 8 38 47 67 75 14 150 M8 x 1.25 WH W X Y U W T V Z Bore size (mm) 20 25 32 40 30 23 30 50 112 146 182 16 53 30 25 37 60 132 167 199 20 63 25 28.5 37 60 132 167 202 20 63 20 33 44 70 25 162 73 210 227 Without Rear Plate Stroke range (mm) Long Stroke Bore size (mm) 20 25 32 40 Bore size (mm

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

After securing the cylinder, readjust the stroke with the adjustment bolt. 80 Load [N] 70 60 15 50 40 30 10 20 10 0 0 100 200 300 400 500 600 700 800 900 Distance between supports L [mm] Adjuster holder 6. There are limitations on the load mass and operating pressure in case the product is used in the vertical direction.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

The spacing (l) of the side support must be no more than the values shown in the graph at right. 100 m 90 l 80 70 (650) Caution 60 Load weight m m If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Make sure to level the cylinder tube when mounting the cylinder.

Suction Guard (Produced upon receipt of order) FHG Series

70 70 85 85 85 105 105 9 9 9 9 9 9 9 9 62 62 62 65 65 65 65 65 3.5 3.5 3.5 6.2 6.2 6.1 11.9 11.9 Port size Weight (kg) E J P Q Port size Weight (kg) E 69 69 74 80 80 85 R 70 70 70 85 85 85 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 1/2 3/4 1 1 1/4 1 1/2 2 1/2 3/4 1 1 1/4 1 1/2 2 78 78 83 106 106 111 3.6 3.6 3.6

Peltier-type Chiller Thermo-con/ Compact Type

temperature [C] 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] For the high-pressure pump (Option), the heating capacity increases by approx. 10 W.

HRX-OM-O021

Table 3-1 Amount of radiation and required ventilation Required ventilation amount m3/min Differential temp. of 3 oC Heat Differential temp. of 6 oC Radiated between inside and Model between inside and outside kW outside of installation of installation area area HRS050-A-20 Approx.10 140 70 The water-refrigerated thermo-cooler discharges heat by using facility water.