Stations: 5 Stations, A, B Port: Side/Bottom, Bottom Plugged 3/4, SI Unit: DeviceNet, P, R Port Size: 1, P, R Port Location: Both Sides, Thread: NPTF

Stations: 9 Stations, A, B Port: Side/Bottom, Bottom Plugged 3/4, SI Unit: DeviceNet, P, R Port Size: 1, P, R Port Location: Both Sides, Thread: NPTF

Model: Flow Valve, Size: 3/8 Standard, Port Size: 3/8, Applicable Tubing O.D.: ø6mm, Option: Fixed set pressure type (0.2 MPa), Lock Nut: -

Body Option: Standard, Thread: NPT, Style: Roller Plunger, Suffix: Roller Material Hard Steel, Accessory: Foot Bracket

Body Option: Standard, Thread: Rc(PT), Style: Roller Plunger, Suffix: Roller Material Hard Steel, Accessory: Foot Bracket

Body Size: 1/8 Standard, Port Size: R1/8, Applicable Tubing O.D.: ø6mm

Main Body Shape: Pipe Type, Additional Function: Silencers, Ultimate Vacuum(kPa): -48, Air Consumption Flow Rate(l/min): 13, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø6, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø6, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating

Main Body Shape: Pipe Type, Additional Function: Silencers, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 13, Vacuum Port Connecting Port Shape: Rc1/8, Vacuum Port One-Touch Fitting Size: -, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø6, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating Temperature

Main Body Shape: Pipe Type, Additional Function: Silencers, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 13, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø6, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø6, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating

Main Body Shape: Pipe Type, Additional Function: Silencers, Ultimate Vacuum(kPa): -48, Air Consumption Flow Rate(l/min): 27, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø6, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø6, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating

Main Body Shape: Pipe Type, Additional Function: Silencers, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 27, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø6, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø6, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating

Type: Throttle Valves, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Operating Pressure Range(MPa): null～1.0, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male

Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: Rc3/4, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure

EXxx-OML0010CN

a) (52) b) 28 c) (52) c) (16) e) (16) f) (/) g) () h) () i) j) k) l) m) -19No.EX-OML0010CN-C 4.

PFMB.eng

Outline of settings Piping J Indicator LED Never mount the product upside down. The straight piping length shall be 8 cm or longer. Otherwise, if a straight section of piping is not installed, the accuracy varies by approximately 2%F.S. Avoid sudden changes in the piping size on the IN side of the product.

PF-OMM0004_C

PF3W720S 112 54 63.6(Max.68.6) 74.2 34 62.5 18 13.6 2.7 10 19 6 PF3W740S 142 71 75.25(Max.81) 94.5 44 79 28 16.8 2.7 10 28 7 S T PF3W704S 56.5 22 PF3W720S 60.5 22 PF3W740S 78 30 -84No.PF-OMM0004-D PF3W704/720/740(+) A AA D K S PF3W704S--T 115 50 81.2 69.5 67.5 PF3W720S--T 123 54 85.2 73.5 71.5 PF3W740S--T 153 71 105.5 90 89 -85No.PF-OMM0004-D PF3W711-U25/PF3W721-U30(PVC ) A B D E F J

PF-OMN0009_C

1 V 1.5 V 5 V 4 mA 6 mA 20 mA (PF3W511) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W521-12/14) A B C 1 V 1.8 V 5 V 4 mA 7.2 mA 20 mA (PF3W521-U30) A B C 1 V 1.48 V 5 V 4 mA 5.92 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 () A B C D 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0009CN-F PF3W504/520/540/511 2X A AA B DD E F G H J

IZS30_eng

(Strong electric field/ strong magnetic field/ surge.) j. The place where electricity is discharged. The situation which causes electric discharge on the 150 150 200 200 (mm) Wiring and piping Environment product. k. The place where strong high frequency is generated. l. The place where lightning disaster is expected. m.

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

CE

c. 6. 1. 7. a.060 b.2585%RH c. d. e. 8. ,, f. g.( 9. ) h. i. j. k. l. 2. 1. 2. 1. 3 2. 1. 3. 4. 1. 12:0.071.0MPa 2063:0.051.0MPa :060 5. 2. 1. 5m 1. 2. 2. 3. F.G. 4. 1. 1. 2. 12 10N [102kgfcm] 1. 2032 20N [204kgfcm] () 40,50,63 30N [306kgfcm] 2. 3. 2. 1.52 1. 2. 1. 1()ISO VG32 3. 4. 5. 6. 1. 2.14.5mT CE1 3. 4. (DC1224V) [] 1. 2. 3. 4. 2.