SYJA5000 Series

No.SYJ5000-OMJ0001-A 5 Port Air Operated Valve PRODUCT NAME SYJA5000 Series MODEL/ Series Contents Safety Instructions -2,3 Design -4 Selection -4 Mounting -4 Piping -5 Lubrication -5 Air Source -6 Operating Environment -6 Maintenance -6 Trouble shooting -7,8 -1S No.SYJ5000-OMJ0001-A Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment

Multistage Ejector (N)ZL Series

to 24VDC (ripple 10% or less ) 25mA or less 45mA or less 26, 27: 50mA or less 67: 60mA or less Current consumption Pressure indication 3 1/2 digits (character height 8mm) Self diagnostic function (Over current Note 1)), Over pressure, Data error, Presence of pressure at 0 clear Operating temperature range 0 to 50C (32 to 122F) (with no condensation) Noise resistance 500Vp-p, Pulse width: 1S

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

Vibration resistance 490 m/s2 in X, Y, Z directions 3 times each Impact resistance Noise resistance 1000 Vp-p, Pulse width 1s, Rise time 1ns Weight Note 3) 660 g Port size (Rc, NPT, G) 1/2, 3/4 3/8, 1/2 3/8 Note 1) The system accuracy when combined with PF2W2/3. Note 2) Output system can be selected during initial setting. Note 3) Without lead wire.

I

Response Frequency 100Hz (10ms) Operating Temperature Range 0~500C (air should not be frozen) / 32~120F Temperature 25+-10 0C +-0.3% F.S. or less Characteristic* 0-500C /32~120F +-0.5% F.S. or less Repetition Accuracy +-0.2% F.S. or less Noise Resistance 500Vp-p pulse width 1s standing 1ns Withstand Voltage Between whole wires and case 1000VAC 50/60Hz for one minute Insulation Resistance

Direct Solenoid

hd'd.3 p, (1)n at'r@. duodel l l (1) d.r 1s, (2) d.r9, {2) rbr 10, & 0 ) .rr 3 sc0001 6B &l4ilcpssy indLd6ep, (1) 6*.drcn-l@kir'9 opoErord6r r2, (r ) d6r r 5, {2) d6r 9, {2}d6t 10, & sc@02 6C &lsFrd ep *Ey indude. c.p, (1) ruhbr.c.* plugd.l 1 1, 11) hdr.iorrishtsl. dst 13 a 14, (1) (h 1s, {2) .bi 9, l2) d.t 10. & d ) de13 tld@tvos t"t sc 0@3.)o( a0 So|mij ep aEy. indld6 @p, (l ) Eesd M]oding

q"s

.) + tIV203o-31 1S-X26 .1 set (Elsctro-pneumalic regulator pad no-)Nole2) +P398020-13 . . . . . . . . . . . . . . . . . . . . 1 set (Blanking plate assembly parl no.) +|TV205O-212S-X26 . . ... .1 set (Electro-pneumalic regulator pad no-)Nole2) LThe x is the symbol for mounting.

High Vacuum Slit Valve

Application Remarks XGT311-50336A1-1 For XGT31-50336C XGT311-50336A1-1A For XGT31-50336-A C Bonnet ASSY XGT311-50336A1-1C For XGT31-50336-C C XGT311-50336A1-1F For XGT31-50336-F C Gate ASSY XGT300-2-1S Body O-ring (FKM) XGT300-9-10S AS568-273 FKM XGT300-9-9S For XGT31-50336-1 AS568-271 Gate O-ring Kalrez4079 XGT300-9-11S For XGT31-50336-2 AS568-271 Actuator O-ring (FKM) XGT300-9-7S AS568-

Air Cylinder CP Series Cylinder Positioner Assembly

Srole = 0.79 120mm) waool E CPA1 FN w/o Boot with gool' BORE a EB c o E K M tit N P FD FT FX FZ H zz d 1 n e zz 1 3 8 (35) 3 1 9 (811 2.76 (70) 2.05 (52) 0.79 (20) 1 5 7 (40) 117) MBxl 25 0.24 (7) 0 4 3 { r 1 ) Mr8x1.5 1 1 8 {30J 3.54 (90) 2.76 t70l 035 (9.0) l.12) (90) (50) 4.33 (110) 228 l5a) 6.26 o59) 2.24 (s) 2.05 (52) 0.59 (1s) 2.60 (66) s T o 167 '1.22 {40) o 6 7 tlr) M10x1.25 0.24

Dedicated Controller Series LC1 Uniaxial Type

T-nut mounting L: T-bracket mounting Adaptable actuators Compatible actuator models Symbol Motor capacity 50W 1H LJ1H101B LJ1H202A LJ1H202C LJ1H303D LJ1S101SC LJ1S202SC LJ1S303SE LJ1H101SC LJ1H202SC LJ1H303SC LJ1H102H-K LJ1H102B-K LJ1H202F-K LJ1H202A-K LJ1H303A-K Ball screw High rigidity direct acting guide Without brake 100W 2H 200W 50W 100W 200W 50W 100W 200W 100W 100W 100W 100W 200W 3H 1S

Parallel Seal Type Slit Valve

XGTP312-50336For XGTP313-50336-*** Description Orderable Part No Applicable Part No Note Body ASSY XGT300-1-1-3AS XGTP313-50336Common Spare Parts List Description Orderable Part No Applicable Part No Note XGTP31 -50336-1 or XGTP311-50336A1-1 XGTP31-50336-2 Bonnet ASSY XGTP311-50336A1-1A XGTP31 -50336A XGTP311-50336A1-1C XGTP31 -50336C XGTP311-50336A1-1F XGTP31 -50336F Gate ASSY XGTP300-2-1S

3 Way,3 Port Solenoid Valve NVZ Series

Nvv3zs-4lc-)-aF) 2-o1r irw3zs4rR-o2-o Applicau Yalng .NW3Z5-41-O2-e) NVzsl4-OOO NVZ5l4M-OOO .NW3Z5-4rR-O2-O NVz5:4R-OOO r{w3zs-41-o2-o ; -*o** E]2 stations :r{29.1 20 stations BLnk p|.le.3ty DXT201-15-1A lfthere are more lhan I siations, supply air and exhaust lrom bolh sides ol manitold, @ W,:f;::W#ffinaidvqhre' Blank PlateAss'g DXT20-1s-1A Apelic*b b..e . NW3Z'2GOI . NWSZ+2l-e)l .

VY511, VYU5

Square wave noise (Pulse width: 1s) produced by a noise simulator.

Process Pump

Also, one piece of amp "HPX-EG00-1S-L02" manufactured by Azbil Corporation is required for one sensor to detect the fluid leakage (two amps are required in total). 14 Revision 18-Aug-2020 Revision D Completely revised by format change.

Process Pump

Also, one piece of amp "HPX-EG00-1S-L02" manufactured by Azbil Corporation is required for one sensor to detect the fluid leakage (two amps are required in total). 13 Revision 18-Aug-2020 Revision D Completely revised by format change. Change the part number of amp for the sensor.

SYJA300 / SYJ3000 Series

No.SYJ300-OMO0002-A Air Operated Valve PRODUCT NAME SYJA300 / SYJ3000 Series MODEL/ Series Contents Safety Instructions -2,3 Precautions on Design -4 Selection -4 Mounting -4 Piping -5 Lubrication -5 Air Supply -5,6 Operating Environment -6 Maintenance -6 Trouble shooting -7,8 -1S No.SYJ300-OMO0002-A Safety Instructions Safety Instructions These safety instructions are intended to prevent

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Real-time switch output, Accumulated switch output) Output Note 3) specifications Accumulated pulse output No. of outputs Output protection NPN open collector or PNP open collector (same as switch output) 4 outputs (1 output per 1 sensor input) Short circuit protection Hysteresis Response time Note 4) Hysteresis mode: Variable (can be set from 0), Window comparator mode: Fixed (3-digits) 1s

HRX-OM-S004

Max. 2s 2s 1s 1s Min. 0.5s 0.5s 0.2s 0.2s 0.1s 0.1s 0.05s 0.05s 0.02s 0.02s 0.01s 0.01s 6000 100 125 200 300 400 500 700 1000 1500 2000 30004000 10 100 125 200 300 400 500 600700 1000 1500 2000 3000 4000 600 5000 7000 Current (% for breaker capacity) Current (% for breaker capacity) For HRS100-A/W-20-B For HRS150-A/W-20-B HRS100-A/W-40, HRS150-A/W-40 4h 2h 1h 30min 20min 14min 10min 6min

VFR6000 Series

No.VFR6000-OMA0001-B 5 Port Solenoid Valve PRODUCT NAME VFR6000 Series MODEL/ Series Contents Safety Instructions -2, 3 Precautions on Design -4, 5 Selection -4, 5 Mounting -5 Piping -6 Wiring -6 Lubrication -6 Air Supply -6, 7 Operating Environment -7 Maintenance -7 Specific Product Precautions -8, 9, 10 Trouble shooting -11 Remedy -12 -1S VFR6000-OMA0001-B Safety Instructions These safety

NVZseies

Nvv3zs-4lc-)-aF) 2-o1r irw3zs4rR-o2-o Applicau Yalng .NW3Z5-41-O2-e) NVzsl4-OOO NVZ5l4M-OOO .NW3Z5-4rR-O2-O NVz5:4R-OOO r{w3zs-41-o2-o ; -*o** E]2 stations :r{29.1 20 stations BLnk p|.le.3ty DXT201-15-1A lfthere are more lhan I siations, supply air and exhaust lrom bolh sides ol manitold, @ W,:f;::W#ffinaidvqhre' Blank PlateAss'g DXT20-1s-1A Apelic*b b..e . NW3Z'2GOI . NWSZ+2l-e)l .

3-Position Rotary Table

Avoid use for applications in which speed change is a problem during end-to-end operation since the product may stop for max. 0.1s during high-speed rotation (0.2s/90) and for max. 0.5s during low-speed rotation (1s/90). CRB1 MSU CRJ CRA1 CRQ2 Breathing hole Caution MSQ Valve1 MSZ MSZ 1. The breathing holes located at the intermediate stopping position repeatedly absorb and release air.