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OUTLET THREAD SIZE VENTILATION AIR OUTLET [AC200V,AC230V] VENTILATION VENTILATION TERMINAL BLOCK (O.D.10) DRAIN TUBE F (820) J H K P L N M 413 [AC200V,AC230V] [AC100V] POWER CORD POWER SUPPLY ENTRY(17) unitmm Model Thread Size A B C D E F G H J K L M N P Q IDU8E Rc3/4 270 485 859 31 902 365 1302 230 42 14 3002 80 3001 328 15 IDU11E Rc3/4 909 IDU15E1 Rc1 300 620 960 79 54 425 93 258 43 330 66

Refer to the straight inlet piping length and accuracy graph (page 66). Avoid sudden changes in the piping size on the IN side of the product. Do not release the OUT side piping port of the product directly to the atmosphere without the piping connected. If the product is used with the piping port released to atmosphere, the accuracy may vary.

.: 4, 6 Stations n L1 L2 20 338 329 17 290 281 18 306 297 19 322 313 16 274 265 13 226 217 14 242 233 15 258 249 12 210 201 9 162 153 10 178 169 11 194 185 8 146 137 5 98 89 6 114 105 7 130 121 4 82 73 2 50 41 3 66 57 L plug connector (L) DIN terminal (D) M plug connector (M) 300 (Lead wire length) (Lead wire length) 300 Applicable cable O.D.: 3.5 to 7 : With light/surge voltage suppressor

(mm) (mm) Grommet Conduit DIN terminal Conduit terminal Electrical entry (AC/Class B coil) Bracket mounting Port size P Model Model a 42 46 56 b 66 73 86 d 57 74 81 e 34 51 58 f 39 45.5 49.5 N 67.5 74 88 Q 37 37 40 N 62.5 69 83 Q 48.5 48.5 51.5 N 63.5 70 84 Q 65.5 65.5 68.5 R 53.5 53.5 56.5 N 62.5 69 83 Q R 69.5 69.5 72.5 Normally open Rc Normally closed VXD2142 VXD2152 VXD2262 Normally closed

center (A) 4 (B) 2 4 1 (P) 5 (R1) 3 (R2) 3-position pressure center (A) 4 (B) 2 5 3 (R2) 1 (P) 5 (R1) 38 Series VQC1000 Dimensions (mm) Power supply with M12 connector (5.25) L1 L2 (Rail mounting hole pitch: 12.5) L4 5.5 L7 28 L6 8 26 47 Communication connector 1.5 P = 10.5 1.5 Indicator light 85 (12) Marker groove Manual override Power connector B A B A B A B A B A A A 93.5 106 8 90 71 66

Code : Thread Form METRIC Code : Thread Form Code : Thread Form 27 : 3/4-10 60 : M3 x 0.35 88 : M14 x 1.5 piston rod diameter) 28 : 3/4-16 61 : M3 x 0.5 89 : M20 x 1.5 01 : 2-56 29 : 7/8-9 62 : M4 x 0.5 90 : M12 x 1.25 02 : 2-64 30 : 7/8-14 63 : M4 x 0.7 91 : M42 x 1.5 03 : 4-40 31 : 1-8 64 : M5 x 0.5 92 : M24 x 3.0 04 : 4-48 32 : 1-12 65 : M5 x 0.8 93 : M30 x 3.5 05 : 5-40 33 : 1 1/8-7 66

Model LEY25A Stroke [mm] Note 1) 30, 50, 100, 150, 200 250, 300, 350, 400 LEF Work load [kg] Note 2) Horizontal (3000 [mm/s2]) 7 15 30 Vertical Note 14) (3000 [mm/s2]) 2 5 11 LEJ Pushing force [N] Note 3) Note 4) 18 to 35 37 to 72 66 to 130 Speed [mm/s] 2 to 400 1 to 200 1 to 100 Actuator specifications LEL Max. acceleration/deceleration [mm/s2] 3000 Pushing speed [mm/s] Note 5) 35 or less

(37) AS32l1FSl-U03-08 8 13.2 22.7 33 28 14.2 AS32l1FSl-U03-10 10 15.9 26.7 37 15.6 39 (40) AS32l1FSl-U03-12 12 18.5 29.7 40 26.8 17 41 (42) AS42l1FSl-U04-10 10 1/2 24 (23.8) 3/8 19 16.6 55.4 54 50.2 48.8 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 60 (59) AS42l1FSl-U04-12 12 18.5 30.8 43.7 (43.6) 35.1 17 62 (61) AS42l1FSl-U04-16 16 23.8 34.8 47.7 (47.6) 32.7 20.6 66

(psi) Nominal ~upport bracket nominal ~ymbo l symbol ~nd~cJjemallc diagram " Rod f1ang~: Head flange: --i '< "C II> 92 113 103 Fooi: L 44 G .F. " [I" , , III 1 L,F 73 79 70 86 :.T w~ 102 58 66 72 44 45 47 38 en 3 0 0 ~ "'i f" 27 73 34 33 G 22 102 27 26 (') 'cS. ,j" C. r '\ ~ T .

./2017 5th printing 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation All Rights Reserved -66-

Flow specification of the specified order (flow unit: gal) Model PF3W504 PF3W520 PF3W540 PF3W511 PF3W521 Rated flow range 0.13 to 1.06 0.53 to 4.23 1.3 to 10.6 2.6 to 26.4 13 to 66 gal/min gal/min gal/min gal/min gal/min 5 to 73 1.8 to 29.5 0.9 to 11.8 0.45 to 4.75 0.09 to 1.18 gal/min gal/min gal/min gal/min gal/min (Flow under (Flow under (Flow under (Flow under (Flow under Display flow

P (cm) Mounting Applicable max. stroke according to buckling strength (cm) Operating pressure (MPa) Support bracket nominal symbol and schematic diagram Nominal symbol 125 140 160 Foot: L Rod flange: Head flange: 0.3 103 92 113 F G L, F 0.5 79 70 86 W W W 0.7 66 58 72 0.3 45 38 47 G 0.5 33 27 34 0.7 26 22 27 Center trunnion: 0.3 96 83 106 T Clevis: C, D C, D 0.5 71 61 76 W W 0.7 59 50 62

Model Motor type Guide type Ground ball screw Rolled ball screw Slide screw 12 10 20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66

Battery (Cell) : LEC-MR-J3BAT Lithium content : 0.65(g) App. 5 Symbol for the new EU Battery Directive Symbol for the new EU Battery Directive (2006/66/EC) that is plastered to general-purpose AC servo battery is explained here. Note. This symbol mark is for EU countries only. This symbol mark is according to the directive 2006/66/EC Article 20 Information for end-users and Annex II.

When only a switch is shipped independently, BBA2 screws are attached. 6-16-66 67 Technical Data 2: How to Mount and Move the Auto Switch Mounting Bracket Rail Mounting Style Solid state switchD-P5DWL CJ1 How to Mount and Move the Auto Switch How to Mount and Move the Auto Switch CJP Switch mounting bracket fixing screw Hexagon socket head cap bolt M3 x 0.5 x 14l

-66- (2) Trigger Trigger is a condition which decides the display timing of the graph. If trigger conditions are not satisfied, waveform will not be displayed. Click of [Data] to set the condition. (In general, set the Motor speed.) (3) Level / Condition / Position are displayed. Click of Level / Condition to set the condition.

Fine adjustment of display value 35 F10 Sub display setting 36 F11 Display resolution setting 42 F14 Zero cut-off setting 43 F80 Power saving mode 44 F81 Security code 45 F90 Setting of all functions 47 F96 Number of pressurizing error 49 F98 Output check 50 F99 Reset to default settings 52 Other Settings 53 Maintenance 58 Forgotten the security code 58 Troubleshooting 59 Specifications 66

Approx. 400 g Approx. 520 g Approx. 680 g 340 g *1: Refer to page 66 [Applicable fluids list]. *2: 0L/min is displayed when the flow is less than zero-cut flow. *3: When fluids with high temperature are used, the available pressure range will be reduced.

Weight g ZB1/2-K1 (Single unit without sensor) 46 ZB3-K1 (One station for manifold without sensor) 40 Pressure Sensor, Vacuum pressure switch Model of pressure sensor and vacuum pressure switch Weight g ZB1-PS-A (Weight excluding the cable) 5 ZB1-ZS-A 14 (Weight excluding the lead wire assembly with connector) Manifold Base Stations 1 2 3 4 5 6 7 8 9 10 11 12 Weight g 16 22 28 34 41 47 53 60 66

Bore size X Y LD LH LC LT LX LY LZ M Mounting bolt CG-L032SUS CG-L040SUS CG-L050SUS CG-L063SUS CG-L080SUS CG-L100SUS 32 40 50 63 80 100 0.06 0.08 0.17 0.23 0.36 0.69 16 16.5 21.5 21.5 28 30 6 6.5 11.5 11.5 17 15 7.2 7.2 10 12 12 14 25 30 40 45 55 70 45 51 55 55 60 60 3 3 4 4 4 6 44 54 66 82 100 120 44 53.5 69 81 99.5 125 60 75 90 110 130 160 3.5 4 5.5 7 7 8 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10