HRX-OM-Q026

HRX-OM-Q026-V Operation Manual Installation Operation Original Instructions Thermo Chiller HRSH Series HRSH100-A-20HRSH100-A-40HRSH100-A-20-S HRSH150-A-20HRSH150-A-40HRSH150-A-20-S HRSH200-A-20HRSH200-A-40HRSH200-A-20-S HRSH250-A-20HRSH250-A-40HRSH250-A-20-S HRSH300-A-20HRSH300-A-40HRSH100-W-20HRSH100-W-40HRSH100-W-20-S HRSH150-W-20HRSH150-W-40HRSH150-W-20-S HRSH200-W-20HRSH200-W-40HRSH200

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

A A F F A F MX L L L L = 100 mm 8 L = 100 mm 8 MTS MXP8-10 MXP8-10 MXP8-20 MXP8-20 MXP8-10 MXP8-20 8 L = 100 mm 0.03 0.04 MY 0.06 Table displacement (mm) Table displacement (mm) Table displacement (mm) MXP8-10 MXP8-10 MXP8-20 MXP8-20 MXP8-10 MXP8-20 0.05 MXP8-10 MXP8-10 MXP8-20 MXP8-20 MXP8-10 MXP8-20 0.03 CY 0.02 0.04 0.02 0.03 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

For information on the replacement parts and specified grease, refer to the replacement parts on page 10-11-10 to 11. RS H A RZQ Scraper Option MI W S Caution CEP1 1. Please observe the specified torque limits when mounting a scraper. A tightening torque above the specified limits can cause a damage, while tightening torque below the specified limits can cause a dislocation or drop off.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

For information on the replacement parts and specified grease, refer to the replacement parts on page 10-11-10 to 11. RS H A RZQ Scraper Option MI W S Caution CEP1 1. Please observe the specified torque limits when mounting a scraper. A tightening torque above the specified limits can cause a damage, while tightening torque below the specified limits can cause a dislocation or drop off.

VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

Thermo-con/Rack Mount Type

Overcurrent protector 10 A 14 A Current consumption 5 A (100 V) to 2.5 A (240 V) 9 A (100 V) to 4 A (240 V) 10 A (100 V) to 4 A (240 V) 8 A (200 V) Power consumption 440 W*1 850 W*1 900 W*2 1500 W*2 Alarm Refer to Alarm.

Compact Cylinder with Lock Series CLQ

Bore size (mm) B A A B 90.5 29.5 39.5 80.5 90.5 10 to 50 75, 100 39.5 40 Rod end nut 38.5 Rear flange type: CLQG40 54 40 4-5.5 A + Stroke 8 7 B + Stroke 34 72 62 Rear flange type (mm) Stroke range Without auto switch With auto switch Bore size (mm) A B A B Rod end nut 28.5 88.5 29.5 39.5 78.5 88.5 10 to 50 75, 100 39.5 40 Double clevis type: CLQD40 4-M5 x 0.8 Cap bolt 10 hole H10 Shaft d9

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

flange type: MQQTG 10, 16, 20 25, 30, 40 2-FD 4-FD (mm) Bore size (mm) Stroke range (mm) A L M FV FV 10 10 to 40 45 8 L FT B + Stroke FX FZ FX FZ 16 10 to 60 52 10 A + Stroke 20 10 to 60 55.5 10 25 10 to 50,75,100 62 12 30 10 to 50,75,100 68.5 12 40 10 to 50,75,100 70 12 (Dimensions other than A and L are the same as the front flange type.) 6 MQQ Series Dimensions Lateral load resisting

Angular Style Air Gripper Series MHC2/MHCA2/MHCM2

A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Mass calculation m1 = a x b x c x Relative density Z1 Inertial moment around Z1 axis Z1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) A Inertial moment around Z axis A = Z1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm) Mass

Fieldbus system Analog unit

: -10 to 10 V, -5 to 5 V, -20 to 20 mA AD value Input signal range (a to b) Voltage [V] Current [mA] Hexadecimal number Hexadecimal number (Twos complement format) Decimal number (Signed binary format) -10 to 10 V -5 to 5 V -20 to 20 mA 7FFF 7FFF 32767 10.5 5.25 21 79E8 79E8 31208 10 5 20 3CF4 3CF4 15604 5 2.5 10 0 0 0 0 0 0 BCF4 C30C -15604 -5 -2.5 -10 F9E8 8618 -31208 -10 -5 -20 F 8000

AZ1000

0.07 A 0 0.00 0.88 (22.4) 0 20 40 60 80 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) Connections inch A (mm) FV4 MV4 FV6 MV6 TW6 3.70 (94.0) 4.70 (119.4) 2.96 (75.2) Hastelloy is a registered trademark of Haynes International.

MNB

A B B A A B A B A 32.5 25 24.5 35 8.5 32 32 4.5 9.5 12 8 5.5 0 1.5 2 13 36.5 27.5 27.5 38.5 8.5 40 40 4.5 9.5 12 8 5.5 0 1.5 2 13 41 34 34.5 43.5 9 50 50 5 10 14 10 7.5 0 3.5 2.5 15 46 39 39.5 48.5 9 63 63 5 10 14 10 7.5 0 3.5 2.5 15 52.5 46.5 46.5 55 13 80 80 9 14 15.5 11.5 9 2.5 5 6.5 16.5 59.5 55 55 62 13 100 100 9 14 15.5 11.5 9 2.5 5 6.5 16.5 12 Series MDNB Auto Switch Internal Circuits

High Purity Chemical Valve

2 8 A Stacking type 10 3/8" 10 3/8" Manifold stations 10 3/8" 10 3/8" 02 2 stations 3 3 12 1/2" 12 1/2" 05 5 stations 12 1/2" LQ2 integral fitting 12 1/2" 4 4 19, 3/4" 19, 3/4" How to Order Valve LVH 2 0 07 A S Body class Symbol 2 3 4 Body class 2 3 4 Orifice dia.

HRX-OM-X010

C HRZ008-L1-F 16 14 [HRZ008-L1-F] Cooling capacitykW 12 10 8 6 4 2 0 -20 -10 0 10 20 30 40 Circulating fluid setting temp.deg.

Fieldbus System

SEC3: Max. 1.0 A SEC2: Max. 2.0 A SEC4: Max. 1.0 A SPN1: Max. 2.0 A SPN3: Max. 1.0 A SPN2: Max. 2.0 A SPN4: Max. 1.0 A SEN1: Max. 2.0 A SEN3: Max. 1.0 A SEN2: Max. 2.0 A SEN4: Max. 1.0 A Supplied voltage IP67 14 to 12F (10 to 50C) 35 to 85%RH (No condensation) 500 VAC for 1 minute between terminals and housing 10 Mor more (500 VDC measured via megohmmeter) between terminals and housing CE

Refrigerated Air Dryer

, IDF6E-10 IDF8E-10, IDF11E-10 Type 100 V 10 A IDU3E-10, IDU4E-10 IDU6E-10 30 mA IDF4E-20, IDF6E-20 IDF8E-20, IDF11E-20 Type 200 V 5 A IDU3E-20, IDU4E-20 IDU6E-20 S Option symbol IDF1E-10 to 11E-10, IDU3E-10 to IDU6E-10 With power cord connection The option allows the connection of a power cord to a terminal block.

Series IDG

When very clean air is required, install a separator as mentioned above on the downstream side, or instead of a regulator, use the order made specification (refer to page 35) fitted with a micro mist separator regulator (series AWD). 3.

SMC Pneumatic Clean Series

Series 10-/11-/12-/13Clean Series Available for clean environment. Particle generation in a clean room can be prevented.

MNB

Bore size (mm) A B A + B + 90 B DA DB DL DU DC DX DE DO DR DT DS DH Z DDH10(Hole) 32 40 50 63 80 100 6.6 54 42 32 22 44 14 62 9 15 7 33 224 10 +0.058 0 10 32, 40 25 45 160 MB-B03 6.6 63 42 32 22 44 14 62 9 15 7 33 235 10 +0.058 0 10 9 75 53 43 30 60 20 81 10.5 18 8 45 271 11.5 +0.070 0 14 50, 63 40 60 190 MB-B05 9 90 53 43 30 60 20 81 10.5 18 8 45 285 +0.070 0 11.5 14 +0.084 0 11 102 73 64

VQ4000

A Unused A Unused A Unused A Unused A Unused A B A B A B A B A B A A A B A B A B A B A A VQC 10 11 13 12 15 14 11 10 12 13 14 15 SQ 9 8 7 6 5 4 3 2 1 0 3 2 1 0 4 5 9 8 7 6 Type SC OMRON Corporation SYSBUS Wire System Type SD SHARP Corporation Satellite I/O Link System VQ0 VQ4 Name of terminal block (LED) Note ADDRESS NO. STATION NO.