High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Metric sizes Inch sizes Body class 3 1/8 3/16 4 1/4 8 3/8 10 12 19 1/2 3/4 6 1 2 3 4 5 v v v V V V V v v V V v v V V V v v V v V v Note) Refer to page 505 for information on changing tubing sizes. Specific Product Precautions Be sure to read before handling.

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

state switch Relay, PLC 24 V 12 V Grommet Yes Water resistant (2-color indication) IC circuit 5 V, 12 V 12 V Auto switches marked with a symbol are produced upon receipt of order.

Flow Sensor Series PFMV

(mm) Type Port size Model 4 M5 x 0.8 M-5AN-4 Barb fitting for nylon tube 6 M-5AN-6 Internal Construction Component Parts q w e r t y e w q Material No.

RSH

RSH80 RSH80 RSH80 200 200 RSH63 RSH63 RSH63 RSH50 RSH50 RSH50 0.9 Operating pressure : P (MPa) 100 100 0.8 0.7 0 0 10 20 30 40 10 20 30 40 Load speed : u (m/min) m=0.1 0.6 Load speed : u (m/min) m=0 0.5 0.4 Graphe Graphr Bore size 20, 32/ m =0 Bore size 20, 32/ m =0.1 0.3 0.2 0.1 80 80 1000 2000 3000 4000 5000 0 32 Lateral load: W (N) 70 70 60 60 50 50 Weight : W (kg) Weight : W (kg) 32 40

Digital Flow Monitor

4 mA 4.16 mA 20 mA E F G Voltage output (0 to 10 V) 1 0 V 0.10 V 10 V 1: The analogue output current from the connected equipment should be 20 A or less when selecting 0 to 10 V.

MXQ

5 V,12 V 12 V Relay, PLC Grommet 24 V IC circuit 5 V,12 V Diagnostic indication (2-color indication) 12 V 3-wire (NPN equivalent) A96V A96 5 V IC circuit Grommet Relay, PLC A93V A90V A93 A90 IC circuit 100 V 24 V 12 V 2-wire 100 V or less Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches

The ZSE2 series is a compact, pressure switch (for vacuum pressure) and can be integrated with ZX or ZR vacuum systems. The ZSE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, VACUUM SWITCH, ZSE30, ZSE30A, N63, 90.00000 lb

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

rail 2-M2 x 0.4 depth 3 8 5.7 3.5 L 6-M4 x 0.7 depth 4.5 20 20 2-M3 x 0.5 depth 3.5 (mm) G H J K L M Q QL S V W Z Model 10 40 68 22 24 29 40 18 15 59 55 76 11-/22-MXP12-15 30 60 98 40 42 49 60 23 25 89 75 106 11-/22-MXP12-25 103 Precision air slide table MXP/MXPJ6 11221122Dimensions: MXP16 3 Z V K Metal stopper C 6.5 C Max. 4 25 5 Without stroke adjuster G M 11 Max. 4 C 2-M5 x 0.8 depth 8

Compact Guide Cylinder Series MGQ

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Since there are other applicable auto switches than listed, refer to page 351 for details. For details about auto switches with pre-wired connector, refer to pages 1784 and 1785.

Return Filter FH100 Series

Element Relief valve P M 0 1 Paper Micromesh With relief valve None Hydraulic fluid 0 1 2 N W V Petroleum Water-glycol, Emulsion Phosphoric ester Note) N, W and V refer to the hydraulic fluid symbol indicated at the end of the element part number. Replacement Element Part No.

ISO Standards C85 Series ø 8, ø 10, ø 12, ø 16, ø 20, ø 25 Air Cylinder: Standard Double Acting, Single Rod C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Single Acting, Spring Return/Extend Single Acting, Spring Return/Extend Single Acting, Spr

Air cushion V*1 *1 The symbol is Nil for no magnet. *1 Except 8 Applicable mounting bracket Cushion Nil None L Single foot M Double foot G Flange U Trunnion N Clevis Action Head cover type Mounting bracket L M G U N Nil Rubber bumper (Standard) C Air cushion Built-in magnet N V V V V V E V V V V F V V V Y V V V Nil None D Built-in magnet Rubber bumper Rod boot (20, 25 only) Nil Without

Cylinder with Lock Series MNB

C Rc(PT)P Rear cylinder port Width across flats Rc(PT)P Front cylinder port Width across flats B1 MM W GR GR E D C GL1 GL W T 16 Effective thread length MB 4-J 16 GF 4-J V Q VA H1 N K F GE BN A H S + Stroke ZZ + Stroke With rod boot e 9 l 13 h f ZZ + Stroke (mm) Effective thread length (mm) Width across flats Stroke range (mm) Bore size (mm) D F B A B1 H1 BP GL B2 BN GC GL1 C GA GB GD Ee11

Actuator Position Sensor

SetPoint1 bit(16) 16 bit 3 Y 3 1 R/W 0x4000 BDC3 2 R/W SetPoint2 bit(0) 16 bit 3 Y 3 (16384) Logic bit(24) 8 bit 0 Y 4 1 R/W 0x4001 2 R/W Mode bit(16) 8 bit 0 Y 5 BDC3 (16385) 3 R/W Hysteresis bit(0) 16 bit 10 Y 1 to 400 SetPoint1 bit(16) 16 bit 3 Y 3 1 R/W 0x4002 BDC4 2 R/W SetPoint2 bit(0) 16 bit 3 Y 3 (16386) Logic bit(24) 8 bit 0 Y 4 1 R/W 0x4003 2 R/W Mode bit(16) 8 bit 0 Y 5 BDC4 (

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

Load voltage Electrical entry Lead wire length (m) Flexible lead wire (-61) Auto switch model Applicable load Pre-wire connector In-line Perpendicular 0.5 (Nil) 3 (L) 5 (Z) DC AC Type Special function Electrical entry Indicator light Wiring (Output) 3-wire (NPN) 3-wire (PNP) 24 V 12 V Solid state switch M9NV M9N 5 V IC circuit M9PV M9P Relay, PLC Standard Grommet Yes 2-wire M9BV M9B

rep-filter-e

(c) V-band tightening Fig. (c) V band tightening Industrial Filters 467 Series FGA Replacement Procedure of Element 1 1. Instruction Drawing for Disassembly & Reassembly of Filter u AIR VENT y i q 9-1 r 9-3 t 9-2 e w Stopper IN !2 !0 !

Industrial Filters Replacement Procedure

(c) V-band tightening Fig. (c) V band tightening Industrial Filters 467 Series FGA Replacement Procedure of Element 1 1. Instruction Drawing for Disassembly & Reassembly of Filter u AIR VENT y i q 9-1 r 9-3 t 9-2 e w Stopper IN !2 !0 !

The ZSE2 series is a compact, pressure switch (for vacuum pressure) and can be integrated with ZX or ZR vacuum systems. The ZSE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, VACUUM SWITCH, ZSE30, ZSE30A, N63, 90.00000 lb

LEKF-OMZ0035

Cable type Cable length[m] Grease application (Seal band part) Nil Without cable Nil Without cable Nil With 3 3 S Standard cable N Without (Roller specification) 5 5 R Robotic cable A 10 (Flexible cable) C 20 Driver type I/O cable length Compatible Power supply Nil Without cable drivers voltage [V] H Without cable Connector only Nil Without driver 1 1.5 [m] M2 LECYM2-V 200 to 230 U2 LECYU2

CJ2Y Series ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Load voltage Auto switch model Lead wire length (m) Pre-wired connector Applicable load DC AC Band mounting Rail mounting 0.5 (Nil) 1 (M) 3 (L) 5 (Z) None (N) Perpendicular In-line Perpendicular In-line Indicator light Wiring (Output) Type Special function Electrical entry M9NV M9N M9NV M9N V V V v v IC circuit 3-wire (NPN) 5 V,12 V 3-wire (PNP) M9PV M9P M9PV M9P V V V v v Grommet Solid

Magnetically Coupled Rodless Cylinder

Dimensions L A LA Attached from top W C PA MM Note 1) M F HB HA Note 2) Attached from bottom: MD R Body B (mm) Note 1) Note 2) B C F HA HB L LA MM MD M PA R W A Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 16 35 6.5 5.5 16.5 23 57 25 M4 x 0.7 M3 4 25 6 36 18 36 6.5 5.5 17 23.5 66 30 M4 x 0.7 M3 4 27 6 37 20 46 8.0 5.5 21 28.5 70 30 M5 x 0.8 M4 5 36 7 47 22.5 60 9.5 6.0 27.5 36 80 35 M6 x 1.0