101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

8)W = 61n + 101, .82673 lb, ModelApplicable valveManifold typeP(SUP)/R(EXH)Valve stations Note)A, B Porting specificationsPort sizeManifold base weight W (g) n: StationsP, EA, EB portA, B portSS5X5-41SX5 40Single base/B mountCommon SUP/Common EXH2 to 20 stationsBaseSideRc 1 4Rc 1 8C6 (One-touch fitting for ?6)C8 (One-touch fitting for ?8)W = 61n + 101

101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

Digital Pressure Switch ( compatible)

Pressure range Rated pressure Characters displayed on the sub display Vacuum pressure -101 kPa Compound pressure 100 kPa Positive pressure 1 MPa Table showing the output mode and output form when Md1 and Md2 are selected.

SI unit for DeviceNet TM

[January 2021] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. DeviceNetTM is a trademark of ODVA. 2010-2021 SMC Corporation All Rights Reserved No.EX-OMO0004-D

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Size End width L: 2.0 to 2.4 [mm] End thickness W: 0.5 to 0.6 [mm] W Magnified view of the end of the screwdriver L 584 a Programless Controller (With Stroke Study) LECP2 Series Dimensions Screw mounting (LECm2mm-m) 38 36.2 18.1 85 4.5 for body mounting 1.2 4.5 110 101 86 4.5 for body mounting DIN rail mounting (LECm2mmD-m) CN4 I/O connector 38 36.2 85 (11.5) SL CN3 encoder connector CN2

JA/JAH/JB/JS

(kg) A B C D E F G H Nominal size Pitch Standard: Heavy Load Type Hydraulic: Up to 7 MPa JAH40-16-150 JAH50-20-150 JAH63-24-150 JAH80-30-150 JAH100-39-150 JAH100-48-150 40 50 63 80 100 100 16 20 24 30 39 48 22 28 32 42 52 61 25 31 35 45 55 50 59.5 66 79 96 96 9.5 11.5 13 14 16 16 19 24 27 30 36 36 16 16 20 22 24 29 32 32 41 46 55 70 52.5 64 74 94.5 112 118 1.5 1.5 1.5 1.5 1.5 1.5 85.5 101

Floating Joint

R Weight (kg) B C D E F G H 40 50 63 80 100 100 JAH40-16-150 JAH50-20-150 JAH63-24-150 JAH80-30-150 JAH100-39-150 JAH100-48-150 16 20 24 30 39 48 22 28 32 42 52 61 25 31 35 45 55 50 59.5 66 79 96 96 9.5 11.5 13 14 16 16 19 24 27 30 36 36 16 16 20 22 24 28 32 32 41 46 55 70 52.5 64 74 94.5 112 118 11000 18000 28000 54000 71000 71000 0.58 1.08 1.5 2.7 4.8 5.4 1.5 1.5 1.5 1.5 1.5 1.5 85.5 101

Compact Guide Cylinder

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2016 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing UR printing UR 11030SZ Printed in Japan. D-G

Series AP3500

Vespel is a registered trademark of DuPont. 101 Air operated type (For low pressure) Diaphragm Valve for Ultra High Purity Series AP4500 Suitable for UHP gas supply line Body material: 316L SS secondary remelt Pneumatically actuated normally closed or normally open LOTO option available as an option (AP4540) Indicator switch available as an option (AP4550) How to Order (Inlet) (Outlet) AP

AZ1000

2.5 (63.5) 0.07 10 A 0.00 0 0 100 200 300 400 500 600 700 800 Flow rate (slpm, N2) 0.88 (22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) AZ1402TA Inlet pressure: 2 psig (14 kPa) 760 0 -8 700 Delivery pressure (mm Hg) -21 600 Delivery pessure (kPa) -35 500 -48 400 Connections inch A (mm) -61 300 FV4 MV4 FV6 MV6 TW6 FV8 MV8 TW8 4.30 (109.2) -75 200 5.22 (132.6) -88 100 4.00 (101.6) 0 -101

CHKD/CHKG

10 23 66 61 43 18 26.5 6 33 76 25 25 15.5 18 M12 x 1.25 6 12 26 71 63 45 18 30 6 36 81 32 32 22 25 M16 x 1.5 7 14 35 86 71 51 20 38 7 45 96 40 40 27 30 M20 x 1.5 7 19 40 95 75 55 20 45 7 50 105 50 50 32 35 M24 x 1.5 8 24 46 106 81 60 21 55 7 56 116 63 63 42 45 M30 x 1.5 9 30 58 125 90 67 23 66 7 68 135 80 80 57 60 M39 x 1.5 14 41 77 155 105 78 27 86 7 87 165 100 100 72 75 M48 x 1.5 21 50 101

•

Standard Strokes Accessories (Option) Description Series CK1A _ Series CKl B Bore (mm) Standard strokes (mm) 40 50, 75, 100, 125, 150 Single knuckle joint CKA4D-17-101 A CKB4D-17-102A 50 50,75, 100, 125, 150 Double knuckle joint(With pin and split pin) CKA40-18 -206A CKB40-1 8-207A 63 50, 75, 100, 125, 150 Li mit switch mount CKM040-48-1 5070A Cam CKM040-42-1 5070 For 75 stroke CKA40-40-

Rotary Actuator/Vane Type

Note 5) These figures show the CRB2 series. 101 CRBm2 Series Auto Switch Mounting Operating Range and Hysteresis Operating range: q m The range between the position where the auto switch turns ON as the magnet inside the auto switch unit moves and the position where the auto switch turns OFF as the magnet travels the same direction.

Process Valve

Note 1) Note 2) Note 3) Note 4) Note 5) VNB VNB Specifications (Vacuum pilot type) Fluid Vacuum SGC 101 kPa to Atmospheric pressure Pilot pressure range Operating pressure range Pilot Solenoid Valve Specifications 101 to 47.9 kPa SGH Port size 6A to 25A 32A to 50A VO307-1 VO307D DZ1-Q Symbol (Vacuum pilot type) Pilot solenoid valve Note1) SF4--23 SF4D DZ-23-Q VNC Valve type Type N.C.

New

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2012 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in XXX. D-DN

Stability of suction position,

flats 22 ZP3E ZP3E A 32 61 32 50 ZP2 33 24 ZP2V 4 4 25.11) 5 22.61) 7 30 (Rotating angle) 30 (Rotating angle) ZP 83 80 103 100 ZPT ZPR XT661 Dimensions Dimensions Model A B Weight [g]/Pad material N/U/CL S F ZP3E-TF80UMJB10 98.5 168.5 443 441 458 ZP3E-TF80UMJB30 123.5 193.5 472 470 487 ZP3E-TF80UMJB50 143.5 213.5 495 493 510 Model A B Weight [g]/Pad material N/U/CL S F ZP3E-TF100UMJB10 101

Rotary Cylinder Series MRQ Size: 32, 40 1

Long Stroke (101 to 200 mm) -X10 4 Refer to the table of number of the auto switches mounted below.

JA/JAH/JB/JS

(kg) A B C D E F G H Nominal size Pitch Standard: Heavy Load Type Hydraulic: Up to 7 MPa JAH40-16-150 JAH50-20-150 JAH63-24-150 JAH80-30-150 JAH100-39-150 JAH100-48-150 40 50 63 80 100 100 16 20 24 30 39 48 22 28 32 42 52 61 25 31 35 45 55 50 59.5 66 79 96 96 9.5 11.5 13 14 16 16 19 24 27 30 36 36 16 16 20 22 24 29 32 32 41 46 55 70 52.5 64 74 94.5 112 118 1.5 1.5 1.5 1.5 1.5 1.5 85.5 101