Particle generation measurement test classify the 13/22-MXQ as grade 3, 4 which is determined by the type of adjuster option that is selected.  After inspection, the 13/22-MXQ is blown with high purity air (clean bench/class M3.5) in a clean environment.  It is then sealed and shipped in an anti-static double bag.

Particle generation measurement test classify the 13/22-MXQ as grade 3, 4 which is determined by the type of adjuster option that is selected.  After inspection, the 13/22-MXQ is blown with high purity air (clean bench/class M3.5) in a clean environment.  It is then sealed and shipped in an anti-static double bag.

2 Phase Stepper Motor/Without Motor Brake Series LXP

Applicable driver Holding plate: MB1(1 pc.), Phillips countersunk head screw M3 x 6l (1 pc.) Phillips binding head screw: M3 x 4l (2 pcs.), Toothed lock washer M3 (2 pcs.) Binding band: T18S (1 pc.) CE marking accessories Note 1) Since vibration may increase with low speed operation, use 6mm/s or more for 6mm lead, and 12mm/s or more for 12mm lead as a guide for speed.

Ozone Resistant

1200-M3 1400-M3 1000-M5 120-M3 (U10, 32) 120-M5-F 220-01 220-01-F 220-02 220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-,

Speed Controller: Standard Type In-line Type AS Series

Nil Metric thread (M3, M5) Rc NPT G N F Bore size Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 1/8 1/4 3/8 1/2 AS1000 AS1000 AS2000 AS2000, 3000, 4000, 5000 AS3000, 4000, 5000 AS4000, 5000 650 A

MA2

AHC System Series MA2 How to Order AHC unit AHC unit MA 210 Y M3 N R3 Tool adapter Robot adapter Without robot adapter 8 10 11 14 15 20 Nil S1 R1 R2 R3 R4 R5 Auto hand changer Air gripper for AHC Applicable shaft diameter Transportable mass Transportable mass 3 kg 2 AHC unit Electric specifications Air connection size M3 M3 x 0.5 None N Air gripper for AHC Tool adapter <10/15> MA 210 A M3

V

5/32 3/8 0.04 0.12 NCRB1_W10-_S 0.55 0.20 0.35 0.02 0.20 25 0.95 1.14 0.59 0.31 0 -0.00015 (0.2) (0.26) M3 NCRB1_W10-_SE 0.33 0.37 -0.0012 -0.00045 5-40UNC 5-40UNC 0.14 10-32UNF M3 3/16 15/32 0.06 0.16 NCRB1_W15-_S 0.71 0.24 0.39 0.02 0.20 25 1.14 1.34 0.79 0.35 0 -0.00015 (0.2) (0.39) (0.24) M3 NCRB1_W15-_SE 0.43 0.39 -0.0016 -0.00045 8-32UNC 8-32UNC 0.18 10-32UNF 15/64 9/16 0.06 0.18 NCRB1

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Mounting with brackets Mount a bracket to the using two M3 x 5L mounting screws and install on piping. The switch can be installed horizontally depending on the installation location. PSE IS Mounting screw M3 x 5L Mounting screw M3 x 5L ISG ZSM The tightening torque for bracket mounting screw should be 0.98 Nm or less.

PFMV5

PF2A ZS-36-A1 ZS-36-A2 ZS-36-A3 ZS-36-A4 ZS-36-A5 2 L-type brackets, 2 mounting screws M3 x 15L For 1 station (for single unit) For 2 stations 2 L-type brackets, 2 mounting screws M3 x 25L PF2W For 3 stations 2 L-type brackets, 2 mounting screws M3 x 35L For 4 stations 2 L-type brackets, 2 mounting screws M3 x 45L PF2D For 5 stations 2 L-type brackets, 2 mounting screws M3 x 55L IF 951

AFF_17A

AMD Micro mist separator Nominal ltration rating: 0.01 m Oil mist density at outlet: 0.1 mg/m3 Body size Symbol Flow capacity 70D 7 m3/min (ANR) 80D 11 m3/min (ANR) 90D 14.5 m3/min (ANR) Option Symbol Symbol Description Max. operating pressure [MPa] Nil Auto drain 1.0 H Auto drain 1.6 J Drain guide 1.6 Main line lter 1 2 Thread type Port size L Options H and J cannot be selected simultaneously

IDX-OM-M050

M3 tightening torque: 0.63 to 1Nm. Do not touch equipment other than the terminal block during wiring. 3. Put back the front panel. [Remote control] Voltage is applied to the terminal block. Be sure to turn off the switch with lamp before wiring. 1) Disconnect the wires from no. 5 and 6 of the terminal block and mount the external switch.

IDX-OM-M051

M3 tightening torque: 0.63 to 1Nm. Do not touch equipment other than the terminal block during wiring. 3. Put back the front panel. [Remote operation] Voltage is applied to the terminal block. Be sure to turn off the switch with lamp before wiring. 1) Disconnect the wires from no. 5 and 6 of the terminal block and mount the external switch.

IDX-OM-U022

M3 6.5mm 1.25mm 2 M3 6.5mm 1.25mm 2 IDFA100F150F 1 6 1.3 IDX-OM-U022 2. 2.1 45 45 45 IDFA100F150F 2 1 2.1 IDX-OM-U022 2. 2.2 2.2.1 (1) (85%) () B C 245050 () 2000m ) (2) IDFA100F150F 2 2 2.2 IDX-OM-U022 2. 2.2.2 P.6-3 6.3 IDF-AB501 14 1 1 1 4 5 2 3 1 600mm 600mm 600mm 600mm 600mm 1 IDFA100F150F 2 3 2.2 IDX-OM-U022 2. 2.2.3 60 60 .

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

Av = Q (8) P Av : Flow coefficient [m2] Q : Flow rate [m3/s] P : Pressure difference [Pa] : Density of fluid [kg/m3] (3) Formula of flow rate It is described by the known unit. Also, the flow characteristics line shown in the Graph (2).

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

22.9 10.9 14 26.9 6 11.6 27 37.2 44.9 49.9 48.9 14.2 53.9 (Hexagon width across flats) AS231FE-01-08SK 18.5 28.2 12.9 16.2 30.9 8 15.2 29 41.7 ASF (Hexagon width across flats) AS231FE-02-04SK 16 21.9 10.9 16.2 30.6 4 10.4 36 40.1 AS231FE-02-06SK 17 25.2 18.4 34 6 12.8 37 42.6 14 R 1/4 14 41.2 46.2 47.2 52.2 18.5 AS231FE-02-08SK 12.9 18.5 28.2 18.3 35.2 8 15.2 39 45.6 AS231FE-02-10SK 21 31

TCU

Tube size (mm) Dimension of coil (mm) No. of tubes Max. operating length (m) L D Part No. 210 18 1 52 2 35 3 22 1 54 2 27 3 17 1 41 TCU0425B-1 TCU0425B-2 TCU0425B-3 TCU0604B-1 TCU0604B-2 TCU0604B-3 TCU0805B-1 1.5 4 2.5 280 28 265 1 2 5 tubes/ case 1.5 1 2 325 24 6 4 37 305 330 31 8 5 Dimensions are changeable due to material.

Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump Flow Rate: 1.08 CFM / 31 LPM , 1.08 CFM / 31 LPM, Max Pressure: 4 PSIG / 111 in H20 / 276 mbar , 4 PSIG / 111 in H20 / 276 mbar, Max Vacuum: 8 in HgV / -271 mbar , 8 in HgV / -271 mbar, Voltage (DC): 24, Item Dimensions: Length: 5 in / 127 mm Width: 4.6 in / 117 mm Height: 3.33 in / 85 mm

Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump Flow Rate: 1.08 CFM / 31 LPM , 1.08 CFM / 31 LPM, Max Pressure: 4 PSIG / 111 in H20 / 276 mbar , 4 PSIG / 111 in H20 / 276 mbar, Max Vacuum: 8 in HgV / -271 mbar , 8 in HgV / -271 mbar, Voltage (DC): 12, Item Dimensions: Length: 5 in / 127 mm Width: 4.6 in / 117 mm Height: 3.33 in / 85 mm

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQS ø 12, ø 16, ø 20, ø 25

Stroke range Stroke range Bore size Bore size Rod end male thread Long stroke 31 to 199 31 to 199 12, 16 12, 16 Rubber bumper Stroke range 51 to 199 51 to 199 20 20 Rubber bumper is standard equipment for long stroke type. 51 to 299 51 to 299 25 25 Part no.: CQSB25-47D-XB10 Makes 47 stroke tube. B dimension is 69.5 mm. Part no.: CQSB25-47D CQSB25-50D with 3 mm width spacer inside.

Non-rotating Double Power Cylinder Series MGZ

. @9, #4, #5, #6, #7, #8, #9, $0 Rod seal B 31 Piston seal Seal kits consist of items @9 and #4 to $0, and can be ordered by using the seal kit number corresponding to each bore size. Seal kit includes a grease pack (10 g). Order with the following part number when only the grease pack is needed.