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As a result, it will not be possible to verify it with the vacuum switch. In such a case, it is necessary to use an ejector that is suited to the nozzle and to select a vacuum switch with a favorable hysteresis and precision. 3.

PFMC 7 7 A*8 8 501 5~500L/min 2 102 10~1000L/min 202 20~2000L/min *7 Rc N NPT R F G*1 1ISO228 501 102 202 04 1/2 *7 06 3/4 OUT1 OU2 *5 A NPN NPN M SI*6 B PNP PNP 5 C NPN (1~5V) SI D NPN (4~20mA) 6:L/min:L E*2 PNP (1~5V) F*2 PNP (4~20mA) 1 G*2 NPN *3 M8(3m)*4 H*2 PNP *3 2 3 N M8 *4 / ZS-40-A M8 3 m ZS-42-A PFMC7501/7102 (M352 ) ZS-42-B PFMC7202 (M352 ) -10No.PF-OMS0001CN-A M8 1

4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage

4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage

Calculate the moment of inertia for A and B separately as shown in the figures on the right. A part B part Procedure Calculation Calculation example 1. Check the operating conditions, dimensions of attachment, etc. Operating model: MHY2-16D Opening time: 0.15 s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b c B part e f d 2.

Operating model: MHY2-16D Opening time: 0.15 s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com c B part e f d 2.

HA AT Series AME, AMF ID 250 CA A AME AMF AMG AFF Body size AM 150 250 350 450 550 650 850 Misc. 14-20-59 Series AFF-CA, AM-CA Dimensions Series AFF, AM, AMD, AMH, AMG Size: AFF2B to 37B, AM150 to 650 (B) (B) (B) (C) (A) (A) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Analog Output Flow/Analog output Output A B C Voltage output 1 V 1.1 V 5 V Current output 4 mA 4.4 mA 20 mA C Model Rated flow [L/min] Minimum Maximum LFE1 0.5 20 LFE2 2.5 100 LFE3 5 200 B A Outside the range 0 Min.

P-1 = A (A B) / 4 H-1 = (A B) / 2 A = Maximum pressure value B = Minimum pressure value For low differential pressure For low pressure For compound pressure PSE533 PSE543 PSE563 For positive pressure For vacuum Pressure range C Display calibration function This function eliminates slight differences in the output values and allows uniformity in the numbers displayed.

16 (24) 16 (24) 17 (25) 19.5 (28.5) 24 (36) 24 (36) 32.5 (46.5) 32.5 (46.5) B 20.5 (28. 5) 20.5 (28.5) 21.5 (29.5) 24 (33) 28.5 (40.5) 28.5 (40.5) B 17.5 (25.5) 17.5 (25.5) 18.5 (26.5) 21 (30) 25.5 (37.5) 25.5 (37.5) 34 (48) 34 (48) B 18 (26) 18 (26) 19 (27) 21.5 (30.5) 26 (38) 26 (38) A HS A A A B 19.5 (27.5) 19.5 (27.5) 20.5 (28.5) 23 (32) 27.5 (39.5) 27.5 (39.5) A HS A HS B 15 (22.5) 15

Proper Auto Switch Mounting Position (Detection at stroke end) C D Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A B Series MY2C Series MY2H Series MY2HT (mm) D-M9, D-M9V (mm) D-M9, D-M9V (mm) D-M9, D-M9V A A A B B B Bore size 16 25 40 Operating range Bore size

Position of rotation axis: Parallel to side b and passes a center of gravity. 1=m 12 a 2 1=m 4 r 2 oWith a load at the lever end rThin rectangle board (Parallelogram) Position of rotation axis: Perpendicular to the board and passes through center line. 2 1 2 2 a +K 1=m1 +m2 3 a Ex.)

single knuckle joint, which may be used as a guide.

Temperature Data A or B = Series IDUS: Data A Series IDFS: Data B Air pressure Data C = 2 Calculate corrected air flow by using A or B and C. Corrected air flow = (Air flow) (Data A x Data C) Corrected air flow = (Air flow) (Data B x Data C) 3 Select a model having an air flow capacity that is higher than the corrected air flow.

4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage

LEC-CG2b) M12 4pin b) M12 4pin 2. LEC-CGD 2. LEC-CGD 4.LEC-CGR c) M12 4pin c) M12 4pin 1. LEC-CG1b) M12 4pin b) M12 4pin a) RJ45 8P 1. LEC-CG11.

Two mounting styles Table traveling accuracy C D Bottom mount Top mount Model Traveling accuracy C side against A side D side against B side LG1H 0.1 or less 0.1 or less A B Variations Mounting orientation Lead screw type Motor type Guide type Motor/Screw connection Series Standard motor [Tamagawa Seiki Co., Ltd.]

250 L/min ) [cm] -38No.PF-OMN0009CN-F PF3W504S PF3W520S [] [] P: P: PF3W540S [] P: -39No.PF-OMN0009CN-F () (PF3W504/520/540) A B C 1 V 1.5 V 5 V 4 mA 6 mA 20 mA (PF3W511) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W521-12/14) A B C 1 V 1.8 V 5 V 4 mA 7.2 mA 20 mA (PF3W521-U30) A B C 1 V 1.48 V 5 V 4 mA 5.92 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521

Operating equipment: MHC2-6D A part a b c d e f = 20 (mm) = 3 (mm) = 4 (mm) = 4 (mm) = 5 (mm) = 6 (mm) b c a e B part f d z f1 x.Calculate the inertial moment of the attachment. Assuming the attachment material is aluminium alloy (relative density=2.7), r1= 16.4 (mm).

Operating equipment: MHC2-6D A part a b c d e f = 20 (mm) = 3 (mm) = 4 (mm) = 4 (mm) = 5 (mm) = 6 (mm) b c a Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com e B part f d z f1 x.Calculate the inertial moment of the attachment.