Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-in, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: 1/8", Option: None, Lock Nut: J (Round)
Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-in, Thread: M3, M5, U10/32, Rc, Port Size: 10-32UNF, Tube Size: 1/8", Option: None, Lock Nut: J (Round)
Size: M3, M5 Basis, Style: Universal, Control Method: Meter-out, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: 1/4", Option: None, Lock Nut: J (Round)
Size: M3, M5 Basis, Style: Universal, Control Method: Meter-out, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: Ø3.2, Option: None, Lock Nut: J (Round)
Size: M3, M5 Basis, Style: Universal, Control Method: Meter-in, Thread: M3, M5, U10/32, Rc, Port Size: 10-32UNF, Tube Size: 1/8", Option: None, Lock Nut: J (Round)
Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-out, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: 1/4", Option: None, Lock Nut: J (Round)
Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-out, Thread: M3, M5, U10/32, Rc, Port Size: 10-32UNF, Tube Size: Ø3.2, Option: None, Lock Nut: J (Round)
Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-in, Thread: M3, M5, U10/32, Rc, Port Size: 10-32UNF, Tube Size: Ø3.2, Option: None, Lock Nut: J (Round)
Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-out, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: Ø6, Option: None, Lock Nut: J (Round)
Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-in, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: 1/4", Option: None, Lock Nut: J (Round)
Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-in, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: Ø3.2, Option: None, Lock Nut: J (Round)
Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-in, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: 5/32", Option: None, Lock Nut: J (Round)
Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-out, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: Ø4, Option: Nickel Plated, Lock Nut: -
Piping/weight specifications Product No. 02(L) N02(L) F02(L) C01(L) A2(L) B2(L) Port size R1/4 NPT1/4 G1/4 Rc1/8 URJ1/4 TSJ1/4 fluid contact Materials in part Pressure-sensing part Pressure sensor: SUS630, Fitting: SUS304 Body (Rear piping) 51 g 51 g 48 g 47 g 54 g 46 g Weight Body (Bottom piping) 77 g 78 g 74 g 65 g 81 g 72 g Lead wire with connector +39 g Leakage 1 x 10-5Pa m3/s 1 x 10
Step 7 Reassembly of bonnet assembly (No.2) 3 Bolt 1 2 4 Bonnet assembly Port 1(P) Bolt size, Tool, Tightening torque of bolt (Nm) valve Bolt size Hex Tightening torque size wrench XLFV-16 M3 3 0.7 -25 M5 4 1.5 -40 M6 5 2.5 -50 M8 6 6.1 Body -63 M10 8 15 -80 Turn ON the solenoid valve to supply air pressure of 0.4MPa (G) to the port 1(P).
A [Tightening torque] L[]ZC[]3[] M3 x 0.5 x 3 deep [0.315Nm] L[]ZC[]5[] M4 x 0.7 x 4 deep [0.75Nm] L[]ZC[]3[] 8 14 Across flat 13 L[]ZC[]5[] 10 22 Across flat 21 *Use locking tool when m ounting foot. L[]ZC[]5[] M10 x 1.25 [24.5Nm] L[]ZC[]3[] M6 x 1.0 [3.0Nm] Caution Model no.
Tighten the FG terminal (M3 round head combination screw) firmly with a tightening torque of 0.3 Nm. Tighten the connector fixing screws (M2.5 slotted head screws) firmly with a tightening torque of 0.2 to 0.3 Nm. A. Dual power supplies B.
(102) 64 45 4 x M5 x 0.8 thread depth 8.5 Body mounting reference plane Note 1) 50 38 3.5 3H9 (+0.025 0 ) depth 3 (1.4) L 52 A (Table traveling distance) Note 2) 75 10 (109) Stroke (112) 55 (2.2) (163) (3) 3 1.5 Encoder Z-phase detecting position Note 3) Encoder cable (7) Motor cable (7) M4 x 0.7 thread depth 8 (F.G. terminal) 38 38.5 48 24 6 6.5 12.5 Belt tension adjustment cap screw (M3
) depth 3 (102) 64 45 4 x M5 x 0.8 thread depth 8.5 Body mounting reference plane Note 1) 50 38 3.5 3H9 (+0.025 0 ) depth 3 (1.4) L 52 A (Table traveling distance) Note 2) 75 10 (109) Stroke (112) 55 (2.2) (163) (3) 3 1.5 Encoder Z-phase detecting position Note 3) Encoder cable (7) Motor cable (7) M4 x 0.7 thread depth 8 (F.G. terminal) 38 38.5 48 24 6 6.5 12.5 Tension adjustment bolt (M3
Panel mount adapter Remote type monitor unit/Display unit V Symbol Instantaneous flow rate Accumulated flow M L/min L G gal/min gal Mounting screw (M3 x 8L) Waterproof seal (Accessory) * Under the New Measurement Law, units other than SI (symbol M) cannot be used in Japan. * G: Made to order Reference: 1 [L/min] 0.2642 [gal/min] 1 [gal/min] 3.785 [L/min] (Accessory) Panel Option/Part No.