Compact Type

4 30 16 18.5 56 80.5 10 Symbol Z Stroke 10.20 30.40.50 Bore size (mm) 75 100 15 20 25 32 25 35 45 55 30 40 60 60 30 40 60 60 40 50 70 70 13 Compact Type Dual-Rod Cylinder Series CXSJ Proper Auto Switch Mounting Position for Stroke End Detection CXSJ6, 10 Auto switch model Bore size Operating range B D (mm) 6 5 10 6 15 6 20 7.5 25 8 32 9 D-A9, A9V D-F9, D-F9W D-F9V, D-F9WV, D-M9 2.5 3 3 5

SQ1000/2000

Uni-wire H System compatible 16 1 to 8 stations 16 stations SUNX Corporation: S-LINK System (16 outputs) compatible SUNX Corporation: S-LINK System (8 outputs) compatible 8 1 to 4 stations 8 stations D side Device Net, OMRON Corporation: CompoBus/D compatible 16 1 to 8 stations 16 stations OMRON Corporation: CompoBus/S (16 outputs) compatible OMRON Corporation: CompoBus/S (8 outputs) compatible

Pin Cylinders Series CJP2/CJP

25 30 35 40 5 10 18 10.5 21 45 16 15 20 25 30 35 40 5 10 20 13 26 45 Note) Only adjust the setting position after confirming the auto switch is properly activated.

Membrane Air Dryer

Performance Chart Standard dew point20oC [Symbol: Nil], 15oC [Symbol: H] IDG3, 3H IDG1 Outlet air atmospheric pressure dew point (oC) Outlet air atmospheric pressure dew point (oC) P1 = 0.3 MPa P1 = 0.3 MPa 0 0 P1 = 0.5 MPa P1 = 0.5 MPa 10 10 P1 = 0.7 MPa P1 = 0.7 MPa 20 20 IDG3 IDG1 30 30 IDG3H 40 40 0 4 8 12 16 0 10 20 30 40 Outlet air flow rate (L/min [ANR]) Outlet air flow rate (L/min

Air Slide Table Series MXQ

F A F Lr 16 16 16 Lr = 120mm MXQ16-125 MXQ16-100 MXQ16-75 0.04 MXQ16-125 MXQ16-10 MXQ16-50 0.06 0.12 MXQ16-20 MXQ16-30 MXQ16-75 MXQ16-40 MXQ16-75 MXQ16-40 MXQ16-100 MXQ16-125 Table displacement mm Table displacement mm Table displacement mm 0.03 MXQ16-50 MXQ16-50 MXQ16-40 MXQ16-100 MXQ16-30 0.04 0.08 0.02 MXQ16-30 MXQ16-20 MXQ16-20 MXQ16-20 0.02 0.04 MXQ16-10 MXQ16-10 0.01 MXQ16-10 0 0 400

ML2B

46.5 55 DD 11 15 16.5 A 110 140 170 H 73 88 106 EE 14.5 16 22 K 46 58 68 FF 63.5 77.5 95 L 45.5 54 64 GG 22 27 35 M 30.9 32.4 41.4 HH 24 32 37 N 16 15 19 O 69 84 102 P 41 56 68 CC 16 19 23 BB 30 35 40 AA 106 133 164 B 220 280 340 C 206 264 322 D 42 51 59 E 138 168 204 F 93.5 107.5 130.5 II 16 19 23 I 76.5 91 110 Model ML2B25 ML2B32 ML2B40 MM 16 21.5 24.5 MA M5 x 0.8 M6 x 1 M8 x 1.25 NN 22

ML2B

46.5 55 DD 11 15 16.5 A 110 140 170 H 73 88 106 EE 14.5 16 22 K 46 58 68 FF 63.5 77.5 95 L 45.5 54 64 GG 22 27 35 M 30.9 32.4 41.4 HH 24 32 37 N 16 15 19 O 69 84 102 P 41 56 68 CC 16 19 23 BB 30 35 40 AA 106 133 164 B 220 280 340 C 206 264 322 D 42 51 59 E 138 168 204 F 93.5 107.5 130.5 II 16 19 23 I 76.5 91 110 Model ML2B25 ML2B32 ML2B40 MM 16 21.5 24.5 MA M5 x 0.8 M6 x 1 M8 x 1.25 NN 22

ML2B

46.5 55 DD 11 15 16.5 A 110 140 170 H 73 88 106 EE 14.5 16 22 K 46 58 68 FF 63.5 77.5 95 L 45.5 54 64 GG 22 27 35 M 30.9 32.4 41.4 HH 24 32 37 N 16 15 19 O 69 84 102 P 41 56 68 CC 16 19 23 BB 30 35 40 AA 106 133 164 B 220 280 340 C 206 264 322 D 42 51 59 E 138 168 204 F 93.5 107.5 130.5 II 16 19 23 I 76.5 91 110 Model ML2B25 ML2B32 ML2B40 MM 16 21.5 24.5 MA M5 x 0.8 M6 x 1 M8 x 1.25 NN 22

HRX-OM-R026

-A-40. 9-10 9.4.3 HRSH090-W-20-HRSH090-W-40. 9-11 Pump capacity . 9-12 9.4.4 HRSH090-A-20/40-HRSH090-W-20/40. 9-12 9.5 Types of hazard labels . 9-13 9.5.1 Locations of Hazard Labels . 9-14 9.6 Compliance standard . 9-15 9.7 Sample DoC. . 9-16 9.8 Daily Check Sheet . 9-17 Chapter 10 Product Warranty . 10-1 HRSH Series HRX-OM-R026 Contents HRSH Series HRX-OM-R026 Chapter 1 Safety Instructions

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber

VQ4000

Refer to pages 2-5-40 to 2-5-43 for control unit.

Auto Switch Guide

(Including band and screw) Applicable bore size (mm) Cylinder series 20 BA2 -020 80 100 25 BA2 -025 32 BA2 -032 40 BA2 -040 50 63 Applicable bore size (mm) CDM2, CDBM2 CDVM3/5, CDLM2 CDG1, MGG MGC CDLG1 CDV3, CNA CDVS, CDL1, CE2 RHC, MLGC, REC Cylinder series CDJ2 CDVJ3/5 CDLJ2 CDM2, CDBM2 CDVM3/5, CDLM2 CDG1, MGG CDLG1 MGC RHC, MLGC, REC RSDG 6 63 10 15 50 16 32 40 20 25 BJ2-006 BA -05

LEC-OM069xx

2.4.3 Setting Parameters.2-16 2.5 Monitor Displays.2-16 3.

Compact Hydraulic Cylinder

(mm) H I J K L C D E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 73.5 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 75.5 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 87 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 91 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22

MHL2

Wide Opening Air Gripper Series MHL2 Parallel Style/10, 16, 25, 20, 32, 40 How to Order D 16 MHL 2 1 Y59A S Wide opening Number of auto switches 2 1 n S 2 fingers 2 Numbers of fingers n Bore size 10mm 16mm 20mm 25mm 32mm 40mm 10 16 20 25 32 40 Auto switch Without auto switch (Built-in magnet) Auto switch specifications Action Load voltage Auto switch model no.

MGP

M 10 16. 16-1. 1 22 (mm) gfcm) (mm) 12 RTW-13 5 14 16 RTW-18 6 34 20 RTW-22 8 52 25 RTW-26 10 88 32 RTW-34 14 220 40 RTW-42 14 220 50 RTW-52 17 440 63 RTW-62 17 440 80 RTW-82 22 1,240 100 RTW-102 27 2,000 16-2. 1) 1 1 2) 2 2 11 3) 32 4) 3 3 16-3. 2JIS2 1 , 4 2 3 4 16-4. 1 5 5 6 6 12 () 32 () 32 7 7 () 8 2 1 13 17. 17-1.

Auto Switch Guide

(Including band and screw) Applicable bore size (mm) Cylinder series 20 BA2 -020 80 100 25 BA2 -025 32 BA2 -032 40 BA2 -040 50 63 Applicable bore size (mm) CDM2, CDBM2 CDVM3/5, CDLM2 CDG1, MGG MGC CDLG1 CDV3, CNA CDVS, CDL1, CE2 RHC, MLGC, REC Cylinder series CDJ2 CDVJ3/5 CDLJ2 CDM2, CDBM2 CDVM3/5, CDLM2 CDG1, MGG CDLG1 MGC RHC, MLGC, REC RSDG 6 63 10 15 50 16 32 40 20 25 BJ2-006 BA -05

Auto Switch Guide

(Including band and screw) Applicable bore size (mm) Cylinder series 20 BA2 -020 80 100 25 BA2 -025 32 BA2 -032 40 BA2 -040 50 63 Applicable bore size (mm) CDM2, CDBM2 CDVM3/5, CDLM2 CDG1, MGG MGC CDLG1 CDV3, CNA CDVS, CDL1, CE2 RHC, MLGC, REC Cylinder series CDJ2 CDVJ3/5 CDLJ2 CDM2, CDBM2 CDVM3/5, CDLM2 CDG1, MGG CDLG1 MGC RHC, MLGC, REC RSDG 6 63 10 15 50 16 32 40 20 25 BJ2-006 BA -05

SFOD-OMT0010

/15 70/16 70/16 (2.667) (3.333) (4.375) (4.375) Max. speed [mm/s] 80 100 100 100 Min. speed [mm/s] 5 5 5 5 (Independent and interpolation) Min. speed [mm/s] 7 8 8 8 (Speed tuning control) Model LEHS10 LEHS20 LEHS32 LEHS40 Lead symbol K Lead [mm] 255/76 235/56 235/40 235/40 (3.355) (4.196) (5.875) (5.875) Max. speed [mm/s] 70 80 100 120 Min. speed [mm/s] 5 5 5 5 (Independent and interpolation

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

O-ring 16 NBR For 90 (Top view from long shaft side) For 100 (Top view from long shaft side) A port B port A port B port (Long shaft side) Component Parts Parallel key for size 40 Note Description Material No.