SMC Corporation of America
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(Page 20, 21, 35) Positioning cushion mechanism The uniquely designed piston shape enables reduction of the height and length as well as practical arrangement of the common piping passages, cushion mechanism and positioning mechanism. This has achieved drastic miniaturization and weight reduction.

9, @0 20 Piston seal NBR RSQ20B-PS RSQ20D-PS RSQ20T-PS Roller type RSQ32B-PS RSQ32D-PS RSQ32T-PS Roller A 21 Resin RSQ40B-PS RSQ40D-PS RSQ40T-PS Spring pin 22 Carbon tool steel RSQ50B-PS RSQ50D-PS RSQ50T-PS Seal kit includes !8, !9, @0. Order the seal kit, based on each bore size. Since the seal kit does not include a grease pack, order it separately.

Replacement parts/Grease pack part no: P523010-21 (10 g) 321 Series CRQ2X Construction With auto switch Size 20/30/40 With auto switch Size 10/15 !0 !3 !3 !0 !4 !7 !1 !9 !2 @1 @3 e u o t @2 !8 @0 @0 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 @3 w i !5 y q r q w r y !5 !

adjuster at extension end Stroke adjuster at retraction end (With stroke adjuster at extension end) 18 N x M3 x 0.5 thread depth 4 (Insert) 3 5.5 4 x M2.5 x 0.45 thread depth 3.5 4 0.5 (With stroke adjuster at extension end) 2.5 (With stroke adjuster at retraction end) 12 32 31 18 24 9.5 3H9 ( ) depth 2.5 +0.025 0 F 10 N 1 x F 2 x M3 x 0.5 thread depth 5 2 27 3H9 ( ) depth 2.5 +0.025 0 21

Made to Order Specifications (For details, refer to page 10-21-1.)

J VF3000 100 84 66 30 112 40 224 55.5 56.5 62 M14 x 2 35 M14 x 2 M14 x 2 41 44 80 190 108 221 170 15 200 21 25 Note 1) It is possible to manufacture the intermediate strokes other than the standard strokes by means of installing a spacer.

For MGQM20-21 st, MGQM20-30 st is provided with a 5 mm + 4 mm 9 mm width spacer. 2. For MGQM50-40 st, MGQM50-50 st is provided with a 10 mm width spacer.

21 Series CY3R Proper Auto Switch Mounting Position (Detection at stroke end) Opereting Range (Reference dimension) Bore size (mm) Auto switch model 15 20 25 32 40 D-A9 8 6 D-M9/D-F9W 5 4 D-Z7/Z80 9 9 11 A B D-Y59/Y7P D-Y7W 6 6 6 Switches cannot be mounted in some cases.

-2 iAddValue (hex) 03F2 iPar_CRC i03FD PST_Device_ID 104 No.EX##-OMY0006CN 21.E SI / Checklist / EX245-FPS1 HW/SW 01/1.1.1 2021 1 29 No.

-11No.PF-OMN0009CN-F PVC PF3W5 U 48 () 3 A : 11 21 10~100 L/min 30~250 L/min U PVC 2 11 21 R (PVC) 11 21 40 11 21 25 25A 30 30A 250L/min G : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] L/min L/min(gal/min) JIS K6742 1 2 1~5 V 4~20 mA (PF3W3) 1~5(1) 1 N M8(3m) -12No.PF-OMN0009CN-F N M8 M8 R / ZS-40-K PF3W504/520 4 3X8 ZS-40-L PF3W540 4 3X8 ZS-40-M PF3W511

JXC-OMT0030CN GWProfibus / LEC-GPR1 1 . 4 2 . 6 21 . 6 22 . 6 23 . 7 24 () . 8 1 . 8 2 . 8 3LEC . 8 4 . 8 5 . 8 6 . 9 7 . 9 3 . 10 31 . 10 32 . 12 33 . 13 1LECGPR1 . 13 2DIN LECGPR1D . 13 34 . 14 1 . 14 2 . 14 4 . 15 41 ADDRESS,B RATE . 15 42 CN2SW . 16 43 LEC . 17 44 SIEMENS PLC S7 . 19 5 . 21 51 CN4: . 21 52 CN3: . 21 53 CN1:CONT . 21 54 CN2:PC/TB . 22 1 - 6CN . 23 61 . 23

6 47 33.5 45 M6 x 1 6 15 16 4 40 27 14 30 52 38 16 12 35 13 14 27 8 51 38.5 52.5 M6 x 1 6 21 16 4 50 32 18 35 65 46.5 20 13 40 14 15.5 27.5 11 58 45 59 M8 x 1.25 7 21 16 5 63 32 18 35 75 56.5 20 13 45 14 16.5 28.5 11 58 50 64 M8 x 1.25 7 21 16 5 80 37 22 40 95 72 25 16 45 20 19 37 13 72 62 76.5 M10 x 1.5 10 30 16 5 100 37 26 40 114 89 30 16 55 20 19 37 16 72 71.5 86 M10 x 1.5 10 30 16 5

56.7 21 9.5 12 20.9 AS4001F-11-3 76.9 3/8" 27 21 17.9 34.9 3.5 69.2 60.9 21 10.3 24.5 AS4001F-13-3 21.7 1/2" 83.1 36.3 11.6 70.6 62.3 22 15-9-74

This may lead to damage and malfunction. 21 Series LEPY/LEPS Specific Product Precautions 3 Be sure to read before handling. Refer to back cover for Safety Instructions and the Operation Manual for Electric Actuator Precautions.

Model T (M) Weight (g) H T 2 x Applicable tubing (mm) 4 6 8 10 12 KQGE04-00 KQGE06-00 KQGE08-00 KQGE10-00 KQGE12-00 M12X1 14 37 13 18 21 5.6 M14X1 17 38 15 18.5 29 10.4 M16X1 19 42.8 17 20.9 40 26.1 M M M20X1 24 47 21 23 71 41.5 L M22X1 27 50.6 23 24.8 95 58.3 Note) Figures shown when using FEP tubing 3 Applicable tubing: Inch size/Connection thread: UNF, NPT Union Elbow Male Connector Union

Nil S n Rc NPT Nil TN TF 21 22 Relief type Vacuum suction type G Cylinder stroke (mm) Rubber bumper only Model Cushion Auto switch mounting Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Port size Lubrication Model Rubber Air 10-/21-CM220 10-/21-CM225 10-/21-CM232 10-/21-CM240 11-/22-CM220 11-/22-CM225 11-/22-CM232 11-/22-CM240 Relief type Vacuum suction type 1/8 25,

Model Cushion Bore size (mm) 6 10 16 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CDU6 10-/21-CDU10 10-/21-CDU16 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 10-/21-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting Single rod M5 x 0.8 6 10 16 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 5, 10, 15, 20, 25, 30

Nil S n Rc NPT Nil TN TF 21 22 Relief type Vacuum suction type G Cylinder stroke (mm) Rubber bumper only Model Cushion Auto switch mounting Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Port size Lubrication Model Rubber Air 10-/21-CM220 10-/21-CM225 10-/21-CM232 10-/21-CM240 11-/22-CM220 11-/22-CM225 11-/22-CM232 11-/22-CM240 Relief type Vacuum suction type 1/8 25,