Series: 5, Actuation: 4 (3 Position Exhaust Center), Piping: 20 (Body Ported), Port Size: N3 (One-touch Fitting for ø5/32"), Thread: T (NPTF)

Series: 5, Actuation: 3 (3 Position Closed Center), Piping: 20 (Body Ported), Port Size: N3 (One-touch Fitting for ø5/32"), Thread: T (NPTF)

Series: 5, Actuation: 2 Position Single, Piping: Body Ported, Port Size: One-touch Fitting for ø5/32", Thread: NPTF, Bracket: -

Series: 5, Actuation: 2 Position Double, Piping: Body Ported, Port Size: One-touch Fitting for ø5/32", Thread: NPTF, Bracket: -

Series: 5, Actuation: 3 Position Pressure Center, Piping: Body Ported, Port Size: One-touch Fitting for ø5/32", Thread: NPTF, Bracket: -

Series: 5, Actuation: 3 Position Exhaust Center, Piping: Body Ported, Port Size: One-touch Fitting for ø5/32", Thread: NPTF, Bracket: -

Series: 5, Actuation: 3 Position Closed Center, Piping: Body Ported, Port Size: One-touch Fitting for ø5/32", Thread: NPTF, Bracket: -

SI Unit

Parts and description . 18 2.3. Safe power supply (output). 19 2.4. Block diagram . 19 3. Installation . 20 3.1. Mounting . 20 3.2. Wiring . 21 4. Commissioning . 24 4.1. Configuration . 24 4.2. Diagnostics parameter . 24 4.3. Safe valve power module . 25 4.4. PROFIsafe parameter . 25 4.5.

PS-OMH0005CN

No.PS-OMH0005CN-D // PSE200 2 8 9 10 13 13 15 17 18 22 24 27 28 29 36 36 37 -1No.PS-OMH0005CN-D (ISO/IEC)(JIS) 1 2 *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating

Digital Flow Switch

The straight piping length shall be 8 cm or longer in order to maintain 3%F.S. of the specification. -66No.PF-OMP0002-H Dimensions (in mm) PFMB7501/7102/7202 Symbol Model A B D E F H K L N PFMB7501/7102 70 30 43.7 37.2 15 14 26 18 13.6 PFMB7202 90 35 49.2 42.7 17.5 24 31 28 16.8 Bracket dimensions Symbol Model S T U V W PFMB7501/7102 24 22 32 40 50 PFMB7202 30 30 42 48 58 -67No.PF-OMP0002

PFxx-OMP0001CN

OFF -48No.PF-OMP0001CN-F [F81] 55 <> [F81] [F81][Pin] [Pin][] [F81] -49No.PF-OMP0001CN-F [F90] <> [F90] [F90][ALL] [ALL][] [oFF] [on] "" 2 [F90] -50No.PF-OMP0001CN-F 1 [rEF] 2 [Uni] 3 [oU1] OUT1 4 [1ot] OUT1 5 [ ] OUT1 6 [ ] OUT1 7 [CoL] OUT1 8 [oU2] OUT2 9 [2ot] OUT2 NPN2PNP2 10 [ ] OUT2 11 [ ] OUT2 12 [rES] 13 [FLo] 14 [rEv] 15 [inP] 16 [FrE] 17 [SAv] 18

PFxx-OMO0007CN

OUT1 DC1224V DC1224V DC(-) DC(-) Max.80 mA 1.5 V 6815 V 1 k 69420 mA 12 V300 24 V600 Max.30 V80 mA 1 V 2815 V 1 k 29420 mA 12 V300 24 V600 -40No.PF-OMO0007CN PF2A7--28--X560 PF2A7--68--X560 PF2A7--29--X560 PF2A7--69--X560 (15 V) (420 mA) 12 V 300 24 V 600 1 k 5F.S. 1 s A B 1 V 5 V 4 mA 20 mA 1 NL/min 10 NL/min PF2A710 3.5 CFM10 -2 35.0 CFM10 -2 5 NL/min 50 NL/min PF2A750 18

4-channel Flow Monitor (Remote type monitor unit)

. -24No.PF-OMH0003-F Flow specification when [U_2] is selected by the unit selection function PF2A20 series Model PF2A20 Applicable sensor PF2A510 PF2A550 PF2A511 PF2A521 PF2A551 Rated flow range 3.5 to 35.5 18 to 176 3.5 to 35.5 7 to 71 18 to 176 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 Instantaneous Setting/display flow range 1.0 to 38.5 8 to 186 1.0 to 38.0 2 to 76 8 to

Digital Flow Switch (Remote type sensor unit)

18 Material of parts in contact with fluid and fluids compatibility checklist 19 Characteristics data 20 Dimensions 22 Made to Order 24 -1No.PF-OMG0006-F Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

LFE-OMY0008

No.LFE*-OMY0008 / / / / / / / / LFE# SMC SMC SMC SMC 2 11 13 14 16 18 19 21 24 26 26 F1 OUT1 28 F2 OUT2 36 F3 40 F10 41 F20 45 F22 46 F30 47 F32 48 F33 50 F34 51 F80 52 F81 53 F82 54 F90 55 F98 56 F99 57 58 60 61 64 66 67 70 71 1 No.LFE*-OMY0008 (ISO/IEC) (JIS) 1 2 1) ISO 4414:Pneumatic fluid power -General rules relating to systems.

IZ-OMU0031-CN

Doc.IZ*-OMU0031 / Series IZE11 2 7 8 10 10 11 14 15 18 18 F0 19 F1 OUT1 20 F2 OUT2 22 F3 22 F4 23 F5 24 F6 25 F98 26 F99 27 28 31 32 32 34 -1No.IZ*-OMU0031 1) (ISO/IEC)(JIS) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment

PAB-OM-O003

Outer dimensions. 18 2 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

L1 = n / 2 x 30 + 16 L2 = n / 2 x 30 + 32 n = Number of valves (cleaning valve + gate valve + other valves) n: Stations (mm) 2 n 4 6 8 10 12 14 16 18 20 22 24 26 28 30 32 34 36 38 40 L1 L2 76 106 136 166 196 226 256 286 316 346 376 406 436 466 496 526 556 586 616 46 92 122 152 182 212 242 272 302 332 362 392 422 452 482 512 542 572 602 632 62 13 VCC Series Dimensions SUS316L Stainless steel

M-E05-1-LQ1

p. 5-13 Male Run Tee LQ1R-M p. 5-4 Space Saving Union Tee Reducing LQ1T-S-R p. 5-14 Female Run Tee LQ1R-F p. 5-4 Tubing Extension Union Elbow LQ1E-T p. 5-15 Male Branch Tee LQ1B-M p. 5-5 Tubing Extension Union Tee LQ1T-T p. 5-16 Female Branch Tee LQ1B-F p. 5-5 Tubing Extension Union Elbow Reducing LQ1E-T-R p. 5-17 Union Elbow LQ1E p. 5-6 Tubing Extension Union Tee Reducing LQ1T-T-R p. 5-18

HRX-OM-Z015

ASCII) . 3-8 3.10.2 CRC(RTU) . 3-8 3.11 EXPLANATION OF FUNCTION CODES . 3-10 3.11.1 Function code04 Reading multiple registers .3-10 3.11.2 Function code16 Writing multiple registers .3-13 3.12 NEGATIVE RESPONSE . 3-14 3.13 REGISTER MAP . 3-16 3.13.1 Circulating fluid discharge temperature .3-17 3.13.2 Circulating fluid discharge pressure .3-17 3.13.3 Status flag .3-17 3.13.4 Alarm flag .3-18