Modular Type Filter Regulator Series AW

.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 1/4 10 One-touch fitting Width across flats 17 O S Accessory specification Standard specification Panel mount With auto drain With pressure gauge Bracket mounting size Port size Model C 48 73 86 92 93 A 25 40 53 70 75 D 25 52 59 75 75 B 108 160 201 239 242 E 28 40 57 73 73 P 30 44 46 54 56 K 0 5 3.5 1.5 1.2 M 25 30 41 50 50 N

Air Slide Table Series MXQ

(Unit: N) Cylinder bore size (mm) Rod size (mm) Piston area (mm) Operating direction Operating pressure (MPa) 0.2 0.3 0.4 0.5 0.6 0.7 11 17 23 29 34 40 OUT 57 6 3 8 13 17 21 25 29 42 OUT IN 20 30 40 51 61 71 101 8 4 15 23 30 38 45 53 75 OUT IN 45 68 90 113 136 158 226 12 6 34 51 68 85 102 119 IN 170 80 121 161 201 241 281 OUT 402 16 8 60 91 121 151 181 211 IN 302 OUT 628 126 188 251 314 377

Digital Flow Switches, Series PF2A, Series PF2W

DOWN Button ( Button) Use this button to decrease a set value. 5 Series PF2A For Air Digital Flow Switch Dimensions: Integrated Display Type for Air Internal circuits and wiring examples PF2A710, 750 to are terminal numbers. 60 82 98 17 58 67 6 1.6 Brown 1 Load OUT1 Main circuit Main circuit 4 Load Black FLOW SWITCH OUT2 UP 2 + 12 to 24VDC White 44 54 SET 3 OUT1 OUT2 Blue DOWN FOR AIR PF2A7

3 Position Cylinder Series RZQ

If a moment or torque directly acts on the cylinder, it will lead to reduced service life or damage to machinery. 7 3 Position Cylinder Series RZQ Construction 13 24 21 3 2 1 6 4 8 7 10 19 22 20 12 23 11 9 5 23 18 14 16 17 15 22 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 No. 13 14 15 16 17 18 19 20 21 22 23 24 Note Note Description Material Description Material Hard anodized Aluminum alloy

Swivels

" 5.80" 2.75" 3.06" 4.19" 2 11-1/2 2 1/2-12 173.1 mm 140.0 mm 99.7 mm 94.0 mm 147.2 mm 69.8 mm 77.6 mm 106.4 mm NPTF UN-2A Wrench Flats Quick Coupling Division 8145 Lewis Road Minneapolis, MN 55427 www.parker.com/quickcouplings D-17 90 PS Series Swivels Female Pipe Male SAE O-Ring Straight Thread A DIA B Part Number A B C D Dia.

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

How to find the flow rate for water Formula based on Cv factor Q = 14.2 Cv 10.2 P l/min Formula based on effective area (Smm) Q = 0.8 S 10.2 P l/min Q: Flow rate (l/min), P: Pressure differential (P1P2), P1: Upstream pressure (MPa) P2: Downstream pressure (MPa), S: Effective area (mm), Cv: Cv factor 17

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

11 41 90 45 8 22 107 70 74.5 103 74.5 48 84 26 1/4, 3/8 VCB41 M5 23 25 36 17 13.5 41 94 50 8 30 111.5 70 78.5 103 78.5 48 88 26 1/2 M5 28.2 30 36 17 17.5 41 102 60 8 35 119 70 86.5 103 86.5 48 96 26 3/4 4 Direct Operated 2 Port for Heated Water Series VCB Model Selection VCB (for heated water) 2 port solenoid valve Class Orifice size mm Model Material Port size Body Seal 4 3 2 7 5 10 1/

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70 35 60 101 41 17.5 17 36 30 28.2 M5 8 3/4 Note) For class H 4 Direct Operated 2 Port for Oil Series VCL How to Order Manifolds How to Order Manifold Assemblies (Example) VV2C L 2 02 01 Enter the valve and option models to be

Platform Cylinder Series CXT

2 117 29.5 9 5.5 25 M6 x 1 M14 x 1.5 10 12 50 60 100 130 105 50 RB1411 22 122 17 2 127 32.5 11 5.5 PA dimension is the center sorted factor of the L dimension.

Multistage Ejector

(page 17) 8 Sound absorbing material ZL112A-SE1-A 1 pc. of each/set: Sound absorbing material 1 and 2 (page 17) 9 Supply valve, Release valve SYJ54-Refer to how to order the supply valve and release valve. (page 16)1 Vacuum pressure sensor: Digital vacuum pressure switch Digital vacuum pressure switch ZL-ZSE30A-00-Refer to how to order the digital vacuum pressure switch.

Digital Pressure Switch ( compatible)

) 0x0150(336) 0x0151(337) 0x0152(338) 0x0153(339) 0x09 R Device ID 0x0A 0x0B -66No.PS-OMV0006-D ISDU parameters Index Sub Access 1 Parameters Initial value Remarks (dec) index (2) 0 W System command Refer to "System command" on page 67. 0x0002 (12) 0 R/W Device access lock 0x0 Refer to "Device access lock parameters" on page 68. 0x000C 0x0010 (16) 0 R Vendor name SMC Corporation 0x0011 (17

High Vacuum L Type Valve

Refer to Chapter 7, Parts Replacement Procedure (P. 17) for details. Plate Fitting Solenoid valve Tool (Adjustable angle wrench, etc.) Piping Caution 1. Before mounting, clean the surface of the flange seal and the O-ring with ethanol, etc. 2. There is an indentation of 0.1 to 0.2mm designed to protect the flange seal surface.

OML0002-C

Functional Explanations 17 6. Outline Dimensions 18 7. Maintenance 7-1. Precautions for maintenance 19 7-2. How to maintain electrode needle 20 2 - 1. Safety instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Electromagnetic Digital Flow Switch

Remote type sensor unit 3 A LFE 1 Integrated display type Rated flow range Made to Order (Refer to p. 17.)

0.01

0 P P P T T T U U U E E E L L L S S S L L L 81 6 9 6 9 6 9 Setting dial 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 Pressure gauge 12 12 21 Bracket 24 5.5 Rc, NPT, G 1/8 SUP port L3 6.5 36 24 OUT 3 36 OUT 2 OUT 4 n Stations 1 Left Right OUT 1 OUT 5 Stations L1 L2 L3 1 106 2 144 38 3 182 38 76 4 220 76 114 5 258 114 152 6 296 152 190 63 (Max. 65) 34 DC () OUT 6 5 17

Residual Pressure Release Valve

1/4 Rc 3/8 15.2 20.9 27 29 35.3 40 6 7.5 15.4 21.1 64 89 17 19 Weight (g) Connection thread D L1 L2 Q KEC-02 KEC-03 665

KRM

(mm) Connection thread RC Model N L1 L2 L3 L4 L5 L6 P Q1 Q2 M KRM12-06-02-10 KRM12-06-02-6 6 6 99 10 47 81 17 1 4 7.5 19.5 31.5 21.5 31 13 13.5 17 10 125 6 108 10 55 73 97 91 KRM12-08-03-10 KRM12-08-03-6 3 8 8 19 139 11.5 9 22.5 35.5 24 34.5 15.5 14.7 18.5 86 112 Spatter Cover 3: KRMC (Applicable: FR soft nylon) Weight (g) Applicable tubing O.D. (mm) Model N L A N-applicable tubing O.D.

HAW

AFF 17 36 40 45 5 5 AM 0.03 0.03 0.06 0.002 Even heat exchange Sharp edge of flower fin causes air turbulence resulting in even heat exchange and high cooling efficiency.

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

20 15 4(A) 4(A) 5 46 12.5 P=11 L plug connector (L) Dimensions n: Stations L n 19 226 218 20 237 229 13 160 152 15 182 174 17 204 196 5 72 64 6 83 75 7 94 86 9 116 108 11 138 130 L2 L1 2 39 31 3 50 42 4 61 53 16 193 185 18 215 207 10 127 119 12 149 141 14 171 163 8 105 97 601