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(BUS OUT and PCI) 12 Red/green flashing alternately Detect a communication error between SI unit and I/O unit. Assembly SI unit has failed. Red ON Connector pin assignment The power supply voltage for control and input is properly. Green ON Configuration PWR The power supply voltage for control and input is out of range.

(M3 x 8) Apply 0.6 to 0.7 Nm tightening torque to the screws. 4 Valve plate (EX600-ZMV ) Safety Instructions (5)Connect the SI unit to the valve manifold. Insert the valve plate into the valve plate mounting groove on the side of the SI unit.

Dynamic viscosity [m2/s] Viscosity [Pas] Density [kg/m3] Formulas below can be used for common units 1cP = 1mPas = 10-3Pas 1cSt = 1mm2/s = 10-6m2/s 13 Working Principle 1. When air is supplied, it passes through the switching valve and enters drive chamber B. 2.

(Refer to Section 7 Parts Replacement Procedure (pages 10 to 12) for details.) 2. Product Specific Precautions 2 Common Specific Precautions 2 Be sure to read before handling Maintenance Parts Caution Only SMC specified parts should be used. Please refer to operation manual. The handle assembly should also be replaced when changing the seal material.

Y Y Z X Flange mounting surface Center of gravity Z X Y Z -0.4 -0.8 48.4 X 12 - 4. Product Specifications * For detailed specifications not included in this document, please refer to our website (www.smcworld.com) or operation manual. 4-1.

No.D-S-OMB0023-C PRODUCT NAME Solid State Auto Switch MODEL / Series / Product Number D-S9### D-T99### D-S7### D-T79### Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 11 Definition and terminology 11 Mounting and Installation 12 Installation 12 Circuit diagram 14 Troubleshooting 15 Specifications 19 Dimensions 20 -1No.D-S-OMB0023-C Safety

Connection of fittings When screwing fittings into valves, tighten as follows. (1) Follow the procedures below when installing an SMC fitting, etc. 1) M3 types After tightening the fitting by hand, use a wrench to tighten the fitting an additional approximately 1/4 turn. As a reference value, tightening torque is 0.4 to 0.5Nm.

If the fitting within the applicable range is selected, there will not be any interference. 12 No.VF1000-OMN0002-A TROUBLE SHOOTING Should any trouble be found during operation, trace the source of the trouble in the following order and take corrective action.

Options J: With drain guide M Mounting Dimensions Model Port Size (Nominal size B) A G F E D C B S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 R 4.5 5 5 5 5 9 9 10 12 Q 26 28 28 34 34 50 50 60 76 P 70 84 84 100 100 110 110 130 180 O 54 66 66 80 80 88 88 102 136 N 35 40 40 50 50 55 55 65 85 L 9 12 12 14 14 14 14 16 20 K 5 8 8 8 8 10 10 10 15 J 15 20 17 22 19 25 21 30 40 I 56 66 66 80 80 90 90 100

stroke (Both sides) 16 37 28 22 Stroke (mm) 6 18 12 8 Mass (g) (2) 100 (95) 760 (740) 390 (380) 180 (175) Connection port M5 X 0.8 M3 X 0.5 Repeatability Air Fluid 0.2 to 0.6 MPa Operating pressure 0.15 to 0.6 MPa JIS Symbol Ambient and fluid temperature 180 c.p.m Max. operating frequency Lubrication Non-lube Note 1) Refer to page 494 Effective Gripping Force for details of Gripping force

12 10 16 10 Vacuum suction type M3 x 0.5 11221122185 (180) 24 25 14 22 8 15 Double acting Non-lube 11221122400 (390) 780 (760) MHR2-20 MDHR2-20 MHR2-30 MDHR2-30 33 34 16 28 12 20 M5 x 0.8 1122112230 58 59 19 37 18 Note 1) Refer to the Best Pneumatics No. 4 for details of gripping force at each gripping point.

How to replace the element P.12 7. Dimensions P.16 1 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

When installing the product, use the mounting holes of the bracket bottom face and secure the product with M3 screws. The screws should be prepared by the user.) Tighten the screws to the appropriate torque for mounting the product. multiplication by 0.1 (= 1 0.9).

If the fitting within the applicable range is selected, there will not be any interference. 12 No.VP300-OMM0002-A TROUBLE SHOOTING Should any trouble be found during operation, trace the source of the trouble in the following order and take corrective action.

Particle generation has been reduced to 1/20 compared to series 12-CY1B (previous P/A product), even without vacuum suction. Cleaned, assembled, inspected and double packaged in a clean room 10 Particle concentration (particles/m) Class M3.5 [Class 100] 10 10 Long strokes Class M2.5 [Class 10] 10 Long strokes are made possible by a special cylinder tube that does not bend.

Symbol Voltage 5 24 VDC 6 12 VDC Symbol Electrical entry, Lead wire length K Plug connector, 300 mm r Light t Tubing size Symbol Light Nil None Z Yes Symbol O.D. x I.D.

L G ZA F H K J ZX I B C E D A ZR ZM 2 x M3 countersunk head screw mounting hole ZMA ZQ ZH ZU ZFC10, 20 ZL Applicable tubing O.D.

r StJpply + TlIfm..ar r -RIld P()" 'f ~ Te-m"O12-24'/OC + '3 I 'liMe iAoa'Cg oUlpUl) + 1 2-2~VCC 12-24VOC ~ F='-'-F===""--, I I LE OIAUI I BIeC!

Cable core wire external color MAC address A unique MAC address of 12 hexadecimal number digits to each SI Unit.