Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump, 230/50/60/1 Flow Rate: 43 LPM , 43 LPM, Max Pressure: 2.9 PSIG / 80 in H20 / 200 mbar , 2.9 PSIG / 80 in H20 / 200 mbar, Max Vacuum: 5.9 in HgV / -200 mbar , 5.9 in HgV / -200 mbar, Voltage (60 Hz): 230, Voltage (50 Hz): 230, Frequency (Hz): 50 / 60, Phase: 1-phase, Item Dimensions: Length: 8.15

Air Filter

Tubing for AD27-D: I.D. 2.5 (3/32") or larger, Length 5 m (200 inch) or shorter Tubing for AD37, 47(N)-D: I.D. 4 (3/16") or larger, Length 5 m (200 inch) or shorter Tubing for AD38, 48(N)-D: I.D. 6.5 (1/4") or larger, Length 5 m (200 inch) or shorter Air Source Warning (1) Use clean air.

Cylinder with Lock/Double Acting, Single Rod Series CLS

Seal kit includes a grease pack (125 to 160: 40 g, 180, 200: 50 g, 250: 60 g). Order with the following part number when only the grease pack is needed.

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

Soft Start-up Valve AV2000/3000/4000/5000 1

Piston B Switching Pressure (Open Closed) 0.5 Outlet pressure (MPa) 0.4 0.3 0.2 Type Y DIN terminal 0.1 0 0.6 0.1 0.2 0.3 0.4 0.5 0.7 0.8 0.9 1.0 Inlet pressure (MPa) Needle Valve Flow Characteristics Inlet pressure 0.5 MPa JIS Symbol 2000 1800 AV5000 1600 Air flow rate (/min (ANR)) 1400 2 1(P) 2(A) AV4000 1200 1 1000 800 AV3000 3(R) 600 AV2000 400 Accessory/Pressure Gauge 200 0 Pressure

ARJ1020F

Inch size ARJ310F-N01 5/32" 1/4" 03 07 14-4-11 9 Series ARJ310 Flow Characteristics Inlet pressure: 0.7 MPa ARJ310-01 ARJ310F-01-04 ARJ310F-01-06 0.7 0.7 0.7 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0.0 0.0 0.0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow

Safety Instructions

Combination screw M3 Conduit terminal View A-A (Internal connection diagram) Class H coil: AWG18 Class B coil: AWG20 (1) SMC (2) Wiring conduit Seal (VCW20-15-6) Port size G 1/2 Tightening torque 0.5 to 0.6 Nm Rated voltage Lead wire color (2) (1) Red Black DC Blue Blue 100 VAC Red Red 200 VAC Gray Gray Other AC There is no polarity. Description Part no.

70pvvna

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Valve size Valve type Port size Rated voltage A: Non-locking extended type Orifice size (mm) Symbol Symbol Symbol 3 2 1 110 VAC 50/60 Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Port size Rc Valve size 1 to 4 1 2 3 Note) N.C. N.O. C.O.

VNH

Gasket material A B NBR seals FKM seals Rated voltage Nil Air operated 3 2 1 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz Valve size Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 8 1 2 3 4 Rc Rc Rc Rc1 10A 15A 20A 25A 1 2 3 4 4

VXZ

Rated voltage 3 2 1 110 VAC 50/60 Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Model Port size (Rc 1/4) (Rc 3/8) (Rc 1/2) (Rc 3/4) (Rc 1) 02 03 04 06 10 2232 2232 2242 2352 2362 4 5 6 7 8 9 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 48 VAC 50/60 Hz Other (Please contact SMC for inquiry.) Refer to the table (1) given below for availability. Refer to page 17-3-65 for ordering a coil only.

Interface Regulator for VQ4000 5 Port Solenoid Valve

400 600 800 1000 1200 1400 1600 1600 0 0 200 400 600 800 1000 1200 1400 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ4000-00-P (PA) ARBQ4000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 1000 1200 1400 1400 0 0 200 400 600 800 1000 1200 Flow rate l/min (ANR) Flow rate l/min (ANR) 1MPa = 145 psi Nl/

ZQ

Vacuum pressure switch suction filter Voltage (Refer to Table (1).) 1 2 3 4 5 6 100 V AC 200 V AC 110 V AC 220 V AC 24 V DC 12 V DC Suction filter only 1 NPN output and analog output, suction filter 2 NPN outputs, suction filter 1 PNP output and analog output, suction filter 2 PNP outputs, suction filter F D31 D32 D51 Electrical entry D52 L plug connector, With 0.3 m lead wire With light/

Stopper Cylinder

Roller Type/Round Bar Type/ Chamfered Type Graph (1) Lever Type (With shock absorber) Friction coefficient = 0 Graph (2) Lever Type (With shock absorber) Friction coefficient = 0.1 Graph (3) 100 200 200 50 130 130 50 50 100 100 50 40 40 40 40 Example 1 30 40 50 40 50 Weight of transferred object m (kg) Weight of transferred object m (kg) Weight of transferred object m (kg) 20 30 30 Example

Clean Regulator

300 100 200 300 400 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH3100-02 SRH3110-02 SRH3100-02 0.5 0.20 0.20 0.4 Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 0 100 200 300 400 0 2 4 6 400 100 200 300 0 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min SRH4000-03 SRH4010-03 SRH4000-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet

5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve Series VCH

Improved durability under a high pressure environment with a polyurethane elastomer poppet How to Order Valve type 1 D G VCH410 06 Thread type (Conforming to ISO1179-1 on the pneumatic/hydraulic G thread) Voltage 1 2 3 4 5 6 100 VAC 200 VAC Port size 110 VAC 04 06 10 1/2 1 220 VAC 3 3/4 24 VDC 1 1 2 12 VDC Consult with SMC for other voltages.

c

Pressure Max. operating pressure (MPa) 100oC 1.1 0.9 Group Model 20oC 2.3 1.7 200oC 0.55 0.45 260oC 0.3 0.23 Max. operating pressure (MPa) 2.4 A B TILMB01 TILM07 TILM05 TILM11 TILM01 TILM13 TILM19 TILM25 TILM32 2.2 A 2.0 1.8 C B 1.5 0.7 0.35 0.2 1.6 1.4 C D 1 0.5 0.25 0.15 1.2 1.0 F 0.6 0.3 0.15 0.1 0.8 G 0.6 0.4 0.2 0.1 0.05 0.4 0.2 How to Order 0.0 20 0 20 40 60 80 100 120 140 160 180 200

VXD

Q 200 VAC 9 50A N.C. S CAC408 50 50A Flange R 230 VAC G N.O.

VX21/22/23

8 F 24 VDC 5 G DIN terminal 24 VDC With surge voltage suppressor A B D E H J L M 4 H 100 VAC Size 2 2 1/4 N.C. 7 J 110 VAC Aluminum 4 5 N.O. 3/8 K 200 VAC 7 L 230 VAC 4 8 7 Resin (With bracket) M Conduit terminal 24 VDC With surge voltage suppressor 4 N 100 VAC 10 7 P 110 VAC A B C D E F G H J K L M N 5 Q 200 VAC Size 3 3 N.C. 8 1/4 R 230 VAC 10 (N.C. only) 6 N.O.

ZM

setting (ZSE1) 2 outputs, without analog output, 3 rotation setting (ZSE1) 2 outputs, without analog output, 200 setting (ZSE1) 1 output, analog output, 3 rotation setting (ZSE1) 1 output, analog output, 200 setting (ZSE1) 1 output, without analog output, 200 setting, PNP output (ZSE1) Note) When the product is used for the manifold, the exhaust air of the operating ejector may enter the