Tie-rod Type Hydraulic Cylinder

24 12 35 34 1/2 27 35 32 77 137 8 160 43 100 M16 x 2 M33 x 2 42 9 174 22 28 24 20 140 45 18 27 12 38 38 3/4 36 40 36 94 155 8 (mm) Without rod boot With rod boot Bore size (mm) H l ZZ e f h ZZ 40 66 185 55 25 92 211 50 73 201 60 28 99 227 1/4 stroke 63 80 212 65 30 106 238 80 90 236 80 32 116 262 100 100 258 100 35 123 281 1/5 stroke 125 100 261 100 35 123 284 160 108 290 120 38 131 313 400

Cylinder

Spring Retracting FOFce {g~ ) Bore size Stroke I0 Stroke 1 Stroke Stroke(mm) 5 I 10 I ' 5 Mopel (mm) (mm) end 6 5"10,15 I 15a I 400 _ _ C _ J_ pe_ 6_ + _ _ ,a.6 ' 131 " t 15.6 CJP. IO 28J3 3 38 10 5 , 1O,~ 25a 610 15 5.10,'5 450 I 1100 *' WeIght of hose nipple(.dgf) IS not included. lllSame spring force 1 0 f each stroke.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Vacuum Suction Type (Reference values) Specifications Suction flow rate L/min (ANR) Bore size (mm) 12/16/20/25 Size 5 12/16/20/25 Item Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Minimum operating pressure 12, 16: 0.07 MPa, 20, 25: 0.05 MPa Without auto switch : 10C to 70C Ambient and fluid temperature With auto switch : 10C to 60C (No freezing) Cushion None Piston speed 30 to 400

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

150 to 700 45 1/8 150 to 1000 200 to 1000 50 1/4 60 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Size Suction flow rate L/min (ANR) 20 25/32/40 Bore size (mm) Item 20/25/32/40 1 2 1.5 MPa 1.0 MPa 0.2 MPa 10C to 60C (With no freezing) Proof pressure Maximum operating pressure Minimum operating pressure Ambient and fluid temperature Piston speed Cushion 50 to 400

SMC

Piston speed Caution The cylinder speed upper limit that retains the particle generation grade is 400 mm/s. Back matter 5 Clean series: Common Precautions 3 Be sure to read before handling. Refer to the main text for detailed precautions for every series.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Weight (g) Vane type Single vane Double vane CRB2BW15-S CRB2BW20-S CRB2BW30-S CRB2BW40-S CRB2BW10-D CRB2BW15-D CRB2BW20-D CRB2BW30-D 90 Model CRB2BW40-D CRB2BW10-S 90 180 180 100 270 180 90 270 270 180 270 180 90 90 90 270 90 100 90 100 90 100 90 100 Rotating angle Body of rotary actuator 26.3 26.0 376 400 446 25.7 49 387 365 48 105 103 198 50 106 203 193 42 43 57 60 121 144 223 243 Flange

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Smooth Cylinder 400 _ 800 '200 1600 Strni

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Suction flow rate of vacuum suction type (Reference values) Specifications 6 10 Bore size mm Fluid Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Piston speed Cushion Stroke adjustable range Port size Air (Non-lube) Size Suction flow rate l/min (ANR) 6 10 1.05MPa 7 15 0.7MPa 0.15MPa 0.1MPa 10C to 60C (With no condensation) 30 to 400 mm/s Rubber

Micro Mechanical Valve Series VM1000

Application Weight (g) Actuator Model Polyacetal roller 300 310 320 320 330 420 410 420 400 Basic VFM250-02-00 Mechanical operation Manual operation VM-08D VM-06DS VM-06D VM-05D VM-02CS VM-02C VM-01CS VM-01C Roller lever VFM250-02-01 VFM250-02-01S Hard steel roller One way roller lever VFM250-02-02 VFM250-02-02S Polyacetal roller Hard steel roller Straight plunger VFM250-02-05 Polyacetal

VS 8-2/VS 8-4

number 4 2 1 3 L2 L1 (n-1) x 27 27 36.5 21 56 56 2 21 98 Indicator light Manual override 173 (Double dual 3-port) 139.5 (Single) 188.5 (3-position) 157.5 14 14 14 14 PWR 131 115 COM series EX500 12 12 12 12 SMC 8 SI unit 4 x M5 mounting holes Formula: L1 = 27n + 85, L2 = 27n + 130 n: Stations (Maximum 16 stations) Dimension (mm) 7 L n 9 328 373 112 157 1 166 211 301 346 8 274 319 10 355 400

7

For a 15 orifice (VXD242/Port size 1/2), P 0.16 MPa, for a 20 orifice (VXD252), P 0.055 MPa, for a 25 orifice (VXD262), P 0.032 MPa 1,000 Port size 2 50 Cv = 49 VX2 Port size 1 1/2 40 Cv = 31 500 400 Port size 1 1/4 35 Cv = 23 Port size 1 25 Cv = 12.5 VXK 300 Port size 3/4 20 Cv = 9.5 VXD VXD 200 VXZ Flow rate Q [L/min] Port size 1/2 15 Cv = 5.5 100 VXS Port size 3/8 15 Cv = 4.5 VXB 50

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0.019 0.077 0.173 0.307 0.483 0.81 IT,lmtig 400 0.017 0.068 0.154 0.273 0.427 0.72 35~ 0.Q15 0.060 0.135 0.239 0.374 I 0.63 " . > JOCt 0.013 0.051 0.115 0.205 0.320 0.54 , , I?a:20 . 25 I 932 >40 1>50 2T 3T 4T Response time (sec) Aclsorpti&." area (em:!)

Clean Regulator/Fluororesin Type

MPa Deionized water (Pure water), N2 5 to 60C 10 cm3/min or less (fluid: water) 0.24 Maximum operating pressure (pilot pressure) Fluid Ambient and fluid temperature Valve leakage Tubing Integrated fittings With nut 0.08 1.2 Weight (kg) 0.10 0.28 1.3 Particulate Generation Characteristics Flow-through Characteristics Particle concentration (particles/mL) Particle diameter: 0.1 m or larger 400

Series HAW Water Cooled Aftercooler 1

Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38 40 41.5 39 40 42.5 200 300 400

High Power Cylinder:

Cushion adjustment (Relief adjustment) man-hours are the same as the adjustment (cushion needle adjustment) for general purpose cylinders. 350 High power cylinder 300 General purpose cylinder (SMC Series CG1) Buffer capacity [kgf cm] Quality of cushioning (RHCF40-500, Load weight 5kg, Supply pressure 0.5MPa, Horizontal operation) 250 500 3000mm/s 1000mm/s 2000mm/s 200 500mm/s 400 150 Deflection

Table of Contents

Weight (g) Vane type Single vane Double vane CRB2BW15-S CRB2BW20-S CRB2BW30-S CRB2BW40-S CRB2BW10-D CRB2BW15-D CRB2BW20-D CRB2BW30-D 90 Model CRB2BW40-D CRB2BW10-S 90 180 180 100 270 180 90 270 270 180 270 180 90 90 90 270 90 100 90 100 90 100 90 100 Rotating angle Body of rotary actuator 26.3 26.0 376 400 446 25.7 49 387 365 48 105 103 198 50 106 203 193 42 43 57 60 121 144 223 243 Flange

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Weight (g) Vane type Single vane Double vane CRB2BW15-S CRB2BW20-S CRB2BW30-S CRB2BW40-S CRB2BW10-D CRB2BW15-D CRB2BW20-D CRB2BW30-D 90 Model CRB2BW40-D CRB2BW10-S 90 180 180 100 270 180 90 270 270 180 270 180 90 90 90 270 90 100 90 100 90 100 90 100 Rotating angle Body of rotary actuator 26.3 26.0 376 400 446 25.7 49 387 365 48 105 103 198 50 106 203 193 42 43 57 60 121 144 223 243 Flange

ARM10/11

B C D E F G H I J K L M N O P Symbol Model A ARM2500 ARM3000 6 17 44 56 42 126.5 58 45 17 21 38 42 29 48 68 33.5 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 Dimensions by the Number of Stations Manifold stations 10 Model Symbol 9 8 7 6 5 4 3 2 L1 454 412 370 328 286 244 202 160 118 ARM2500 L2 442 400 358 316 274 232 190 148 106 L3 420 378 336 294 252 210 168 126 84 L1 592

Table of Contents

75) C(D)UW6-D 44 (49) 49 (59) 53 (63) 58 (68) 62 (72) 67 (77) 76 (86) 85 (95) 94 (104) C(D)UW10-D 74 (99) 81 (111) 88 (118) 95 (125) 102 (132) 109 (139) 123 (153) 137 (167) 151 (181) C(D)UW16-D 132 (165) 145 (182) 158 (195) 171 (208) 184 (221) 197 (234) 223 (260) 250 (287) 275 (312) 301 (338) 327 (364) 353 (390) 379 (416) C(D)UW20-D 240 (294) 260 (319) 280 (339) 300 (359) 321 (380) 341 (400

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

258-9200-www.stevenengineering.com 11 12 Vacuum type Relieving type (With specially treated sliding parts) CX DSpecifications 10 15 20 32 25 6 Bore size (mm) Proof pressure Maximum operating pressure Minimum operating pressure Ambient and fluid temperature Piston speed Stroke adjustable range Bearing type -X 1.05 MPa 0.7 MPa 200.05 MPa 0.15 MPa 0.1 MPa 10 to 60C (No freezing) Data 30 to 400