SMC Pneumatic Clean Series

Hs A 29 B (mm) D-C73 A D-H7A1/H7B B Hs A B Bore size Hs 7 6 22.5 6 5 22.5 7 6 25 6 5 25 8 7 28.5 7 6 28.5 14 12 32.5 13 11 32.5 20 25 32 40 Note) The above values should be used as a guide for detection at stroke end.

Electric Grippers

7 Component Parts No.

Basic Type/Direct Mount Type

113 121 MM M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 W 20 25 40 40 50 60 60 70 Z 76 94 107 117 130 148 176 188 N 4.5 6 7 6.5 8.5 11 15 16 WP 13 16 19 21.5 27 32 41 47 WS 8 7 7 7 7 7 10 10 PW 26 32 38 43 54 64 82 94 Q 68 84 95 105 116 134 159 171 QW 14 18 17 20 26 34 48 60 Model CY3RG10 CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 CY3RG50 CY3RG63 CY1H CY1F CYP P (Piping

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

5 7 5 3 7.5 5 3 (Counterbore dia.

Aluminum High Vacuum Angle Valve

Refer to maintenance parts 7-1 7-2 8 9 Refer to part no.

MXS

7 !8 !

Air Cylinder

7 ! With auto switch 10, 16 r e o u i w y t !6 !5 !3 !4 !0 !2 !1 !7 ! With auto switch Single acting, Spring extend 6 r o u i e w y t !6 !5 !8 !1 !0 !2 !4 !3 !7 ! ! With auto switch 10, 16 r o u i e w y t !6 !5 !0 !2 !3 !4 !7 !8 !1 ! With auto switch Component Parts No.

K35-OMW0030

Auto start function . 34 7. Operation Mode and Functions . 35 7-1. JOG Operation . 35 7-2. Calibration . 37 7-3. Target Position Operation (4-20 mA) . 39 7-4. No Signal Operation . 40 7-5. Emergency Stop . 40 7-6. Residual Pressure Release . 41 7-7. Functions of LED Alarm Display . 42 7-8. Priority of Operation Mode . 43 7-9. Fail-safe function . 43 7-10.

JXCx-OMY0004

Turn ON when transmitting numerical data to the controller. (7, 8, 9) 4 0 Start flag 1-7. (Unused) Set always OFF(0) 5 0-1. Movement mode 1: ABS (Absolute) 2: INC (Relative) (7, 10) 2-7.

Rotary Table/Rack & Pinion Style Series MSQ

7 !8 u @0 q @1 !2 !1 CRQ2 !8 !7 MSQ MSZ CRQ2X MSQX MRQ MSQAA (High precision type) !9 e r Component Parts Note Anodized Anodized Chromated No.

Cylinder with Lock

8q@3$1@5@8$2#8#5@7#1@4@9#7 #0$0 !5!6 er uy t !9 #4@6!7!2 #6 #3#2#9 $3 80, 100 Component Parts Component Parts No. Description Material Qty.

MU

For details, refer to page 7-9-36. 7-8-21

Programless controller (with stroke study) Step motor (servo 24 VDC)

The (b) (h) 7-segment LED (f) displays "0" with a dot and the alarm LED (b) flashes. (g) 4) When the position switch (h) is set at the required (f) parameter number ("2" in this case), the 7-segment LED (f) displays the value of the position switch (h) with a dot. (h) No.

MU

For details, refer to page 7-9-36. 7-8-21

JXCx-OMY0008

Turn ON when transmitting numerical data to the controller. (7, 8, 9) 7012h 0 Start flag 1-7 (Unused) SET always OFF(0) Index 7020h: Operation Method Index Bit Signal name Description 7020h 0-1 Operation Method 1: ABS (Absolute) 2: INC (Relative) (7, 10) 2-7 (Unused) SET always OFF(0) Index 7021h: Speed Index Bit Signal name Description Input range Min. unit 7021h 0-15 Speed 1 to Basic parameters

Electric Slide Tables

6 @8 @7 q !5 !7 w t !2 !4 !3 @9 @5 @6 Shipped together #0 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 10 11 12 No.

Rotary Table/

7, !

Compact Cylinder Series CQS

5.5 3.5 (1) 7 5.5 ( ): Denotes the values of D-A93.

LVQ

T) View Z (mm) Dimensions A B C D M N T U V Model LVQ20-S-2 LVQ30-S-2 LVQ40-S-2 LVQ50-S-2 LVQ60-S-2 25.5 46 31.5 58 7 15 35.3 10.6 7 23.5 47 29.5 59 7 15 36.9 16.5 10 23.5 47 29.5 59 7 20 37.9 22 35 70 41 82 7 20 64 25 17 35 70 41 82 7 20 66 32 17-5-69 8 Series LVQ Dimensions With flow rate adjustment & by-pass High back pressure spec. with flow rate adjustment & by-pass N.C. valve M N

Table of Contents

Vane Style Size: 1, 3, 7, 20 .