Refrigerated Thermo-chiller

Min. 0.5s 1s 2s 0.05s 0.1s 0.2s 0.01s 0.02s 100 200 400 600 1000 2000 4000 130 300 500 700 1500 3000 Current (% for chiller main breaker volume) 101 Series HRZ Specific Product Precautions 3 Be sure to read this before handling. Refer to back pages 1 and 2 for Safety Instructions and back pages 3 to 6 for Temperature Control Equipment Precautions.

Step Motor Controller (Servo / 24 VDC)

trouble Addition/Timing chart No.LEC-OM00605 Apr/2012 Revision Addition to notes about UL recognition No.LEC-OM00606 Jan/2014 Revision Addition/Troubleshooting No.LEC-OM00607 Jan/2015 Revision Addition/EMG signal Instructions No.LEC-OM00608 May/2015 Revision Addition/ Step no. table Addition/Troubleshooting No.JXC-OMT0011-A Oct/2018 Complete revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

AWM20 to AWM40

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 FAX: 03-5298-5362 URL http://www.smcworld.com 2006 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing JX printing KR 120DN Printed in Japan.

AWM20 to AWM40

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 FAX: 03-5298-5362 URL http://www.smcworld.com 2006 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing JX printing KR 120DN Printed in Japan.

Series: 25A-ZSE20, Rated Pressure Range: A (0 to -101 kPa), Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: D (Panel Mount Adapter + Front Protection

Series: 25A-ZSE20, Rated Pressure Range: A (0 to -101 kPa), Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter)

Rated Pressure Range: 20 (0 to -101 kPa), Output Specification: N (NPN Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m)

Digital Flow Switch (Integrated display type)

[August 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020-2022 SMC Corporation All Rights Reserved No.PF-OMW0007-E

High Vacuum Slit Valve

November 2021 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved

CYRx-OM0001H

A 17 Revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved

Modular Type Regulators Series AR

specifications Square type pressure gauge Digital pressure switch Round type pressure gauge Round type pressure gauge (with color zone) P1 P2 A B Note 1) C D K F J H J H J H J H J AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR40(K)-06 AR50(K) AR60(K) 12.5 11 M5 x 0.8 58 M18 x 1 13 0 26 26 25 1/16 Note 2) 28 27.8 26.5 28.5 2 1/8, 1/4 40 94 M28 x 1 28.5 29.5 40 37.5 65 37.5 65 1/8 28 27.8 27.5 28 0 101

Modular Type Air Filters Series AF

50 54 26 8.5 10.5 70 2.3 35 204 1/4, 3/8, 1/2 75 169 20 35 38 75 35 50 54 25 8.5 10.5 70 2.3 34 208 3/4 AR 90 245 24 45 20 45 70 66 35 11 13 90 3.2 47 284 3/4, 1 95 258 24 47.5 20 47.5 70 66 35 11 13 90 3.2 47 297 1 AL Semi-standard specifications AW With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model B B B B AG AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 66 101

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2013 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing RO printing RO 8150SZ Printed in Japan. D-DN

Title not found

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 Auto Switch (N)CDQ2 Series 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101

3 Port Solenoid Valve

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2008 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing MV printing MV 16400DN Printed in Japan.

Body/Exhaust Type: A (Single Unit - Silencer Exhaust), Nominal Nozzle Size: 07 (ø0.7), Supply Valve and Release Valve: R (Self-holding Release Valve Linked / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: C (Digital Pressure Switch for Vacuum / 0 to -101 kPa / PNP 2 Outputs), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch

Body, Exhaust Type: A (Single Unit - Silencer Exhaust), Nominal Nozzle Size: 07 (ø0.7), Air Operated: Q1 (Air Operated, Supply Valve; N.C; Release Valve: N.C.), Vacuum Sensor: C (Digital Pressure Switch for Vacuum / 0 to -101 kPa / PNP 2 Outputs), Connector: Y (For Pressure Switch for Vacuum: 2m Lead Wire w/Connector; Pressure Sensor Assembly: 3m w/Lead Wire), Vacuum, V Port: 06 [ø6 One-touch

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: C (Digital Pressure Switch for Vacuum / 0 to -101 kPa / PNP 2 Outputs), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)]

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: C (Digital Pressure Switch for Vacuum / 0 to -101 kPa / PNP 2 Outputs), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)], Individual

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: A (Digital Pressure Switch for Vacuum / 0 to -101 kPa / NPN 2 Outputs), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 07 [ø1/4 One-touch Fitting (Inch)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)], Individual