Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators 11-/22-MXP6-5 W AA H 7 4 depth 2.5 2.5 11.2 2.3 3.5 1 3 4 x M3 x 0.5 depth 3 +0.030 0 D B 0.05 9.5 1 3.5 20 14 13 18 C 6 +0.030 0 depth 2.5 2.5 Width across flats 6 E 5 6 5 Prepared hole diameter 3.3 2 x M4 x 0.7 Piping port 2 x M3 x 0.5 (Plug: M-3P) F QL 6 13.5 17 Stroke: S M 2 0.05 M4 x 0.7 Mounting base side B D 7 5 2 x M3 x 0.5 Piping

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators J 12 Maximum 14.5 (With stroke adjuster at retraction end) I 7.5 8 15 15 14 14 12 6.5 6.5 Vacuum suction port Rc, G, NPT1/8 12 25 6.5 K NA x M6 x 1 thread depth 6.5 25 KA Stroke adjuster at extension end Stroke adjuster at retraction end 6 18 46.5 (With stroke adjuster at extension end) N x M5 x 0.8 thread depth 10 (Insert) 6 x M5 x 0.8 thread

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

P (Rc, NPT, G) H2 Width across flats B2 2 x NN G Relief port M5 x 0.8 G H1 Width across flats B1 Standard port I Relief port 2 x Eh8 D MM AL A F K NA N N H S + Stroke F ZZ + Stroke (mm) ZZ S P N I E D A 12.5 11 10 10 13 F Bore size Stroke range AL K MM NA NN G H2 41 32 32 26 B2 H H1 22 17 17 13 B1 0 6 6 5 8 8 8 50 45 45 41 200 to 1000 150 to 1000 150 to 700 150 to 700 21 19.5 19.5 15.5 14

Coolant Valve

3 2 1 110 VAC 50/60 Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Symbol A: Non-locking push type A (projecting) N.C. 0.5 MPa N.O. 1 MPa N.C. 1 MPa 4 1 6A 8A 10A 10A 15A 20A 25A 32A 1 8 1 4 3 8 3 8 1 2 3 4 220 VAC 50/60 Hz 7 Valve size 1 5 6 24 VDC 12 VDC B: Slotted locking type B (tool required) 7 240 VAC 50/60 Hz 15 (11) 2 Semi-standard For other rated voltages, please consult with SMC. 20 (14

Water Strainer

range (-X215): 0.05 to 0.69 MPa Rc1/8, Rc1/4 NPT1/8, NPT1/4 Port size: Rc1/8 Port size: Rc1/4, 3/8, 1/2 Series WF300 14-E628 Series WF300 Dimensions 25 25 A A 14 41 54 29 66.5 Construction A-A Component Parts q e w r No.

Foot Pedal Type

VM2 SMC 74 45 40 54 Max. deflection position Unlock position Lock position 14 40.8 7 Stroke 3 Symbol (A) 4 (B) 2 32 26.5 20.5 11 53 (72) B 12 14 A 3 (EB) 1 (P) 5 (EA) 2 x M5 x 0.8 (Port 3, 5) 39.2 33.2 27.2 2 x Rc1/8 (Port 2, 4) Rc1/8 (Port 1) Travel required for operation 3 Full Operating Force (F .O.F .) 55 N (at 0.5 MPa) 3 x 6.5 mounting hole Travel required to release the lock 7 Force

ZSE30A(F)/ISE30A

10 14 14 10.9 10.9 10.9 C4L C6L N7L One-touch fitting 4 mm 5/32 inch elbow One-touch fitting 6 mm elbow One-touch fitting 1/4 inch elbow 20.7 22.9 23.5 15.6 16.1 16.1 9.3 11.6 12 10.9 10.9 10.9 37 ZSE30A(F)/ISE30A Series Dimensions With bracket Z/ISE30A(F) Option 2 A1 30 42.5 Bracket A (Option unit part no.: ZS-38-A1) 25 20 20 45 30 2 30 34.6 19 5.2 14.7 9.6 5.2 Bracket configuration allows

Compact and

Piping diameter ZU05mA 0.5 90 48 7 13 14 3.9 18.6 ZU07mA 0.7 11 16 28 4.3 19.1 The piping diameter for each port should be the standard size of One-touch fitting.

AD402/600

0: 201016 14-20-49

GD40-2-01

Refer to pages 14-21-3 to 4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to 14-14-6 to 8 for precautions on every series. Caution on Design Mounting Caution Caution 1. Mounting 1) The HIGH and LOW marks on the back of the differential pressure gauge indicate the high pressure and low pressure sides, respectively.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

22.5 52h9 0 0.074 +0.030 0 +0.052 0 43 30H9 3-4H9 depth 4 5 4 ( A , B , C ) 3-R2 3-R2 2-6.6 through 21.5 10.5 16 5 53.5h9 0 0.074 7 6 43 23 10.5 46 4 13 Angle adjustment bolt 2-6.6 through 72 13 Adjustment: Max. 10.3 6 2 M5 x 0.8 2 8 A port 1 B port +0.030 0 3-4H9 long groove depth 3 8 g6 0.005 0.014 ( A , B , C ) 16h9 0 0.043 4-M6 x 1 depth 11 50 0 0.074 53.5h9 48 11-5-14 14 Series MSUA

ML2B

KK 15 16 17.5 ND 5.6 6.8 8.6 MB M6 x 1 M8 x 1.25 M10 x 1.5 LL 28 30.5 37.5 PB Rc 1/16 Rc 1/16 Rc 1/8 OO 9 10 23 PP 56 62.5 77 QQ 34.5 42 51 RR 37.5 45 54 LA 11 12 14 Model ML2B25 ML2B32 ML2B40 10-13-14 12 Stroke Reading Rodless Cylinder with Brake Series ML2B With stroke sensor: With brake: ML2B Bore size S Stroke ML2B Bore size B Stroke N K M 9 N K M 1 RE A B O 1 H REC O H PP CX NN NN MM

CUJ

The range in the chart below that is delineated by bold solid lines indicates the relation between load weights and maximum driving speeds. 6 8 10 4 Bore size (mm) 0.05 to 0.5 Piston speed (m/s) 3.8 x 103 6.25 x 103 9.35 x 103 12.5 x 103 Allowable kinetic energy (J) 10 6 8 10 Load weight (kg) 1 4 0.1 0.01 0.1 1.0 0.01 Maximum speed V (m/s) 7-2-14 14 Series CUJ Specific Product Precautions

Rated Flow Range: 02 (20 to 2000 l/min), Output Specifications: L [Out: IO-Link, Switch Output (N/P); Func: None; Monitor Unit Model: None], Lead Wire: N (w/o Lead Wire and M12 Connector), Unit Specification: M (SI Unit Only), Calibration Certificate: A (Yes), Flow Direction: R (Right to Left)

Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: N2 (NPT1/4), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: N (w/o Lead Wire w/Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate)

Rated Flow Range: 25 (0.3 to 25 L/min), Flow Adjustment Valve: None (Straight), Port Size: N7 (1/4), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: N (w/o Lead Wire w/Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: None, Made to Order: X731 (Compatible with Argon and Carbon Dioxide Mixed Gas)

Rated Flow Range: 25 (0.3 to 25 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N7 (1/4), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: N (w/o Lead Wire w/Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 06 (3/4), Output Specification/Temperature Sensor: L (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: None), Lead Wire: N (None), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket: None, Calibration Certificate

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: L (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: None), Lead Wire: N (None), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket: None, Calibration Certificate

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: L (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: None), Lead Wire: N (None), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket: None, Calibration Certificate