Base Mounted Metal Seal/Rubber Seal Series VQ

EX121-SMB1(-XP) (5) EX121-STA1(-XP) (5) EX121-SSH1(-XP) (5) EX121-SPA1 EX121-SUW1(-XP) (5) VQC EX121-SAB1(-XP) (5) SQ EX120-SUH1(-XP) (5) q EX121-SSL1(-XP) (5) EX121-SSL2(-XP) (5) VQ0 EX121-SFU1(-XP) (5) EX121-SDN1 EX121-SCS1(-XP) (5) VQ4 EX121-SCS2(-XP) (5) VQ5 EX120-SMJ1(-XP) (5) AXT100-2-P (2) U S w e r t U S U S AXT100-2-F (2) U S VQZ AXT100-2-TB1 (4) AXT100-2-TB2 (4) VQD Note 1) A

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Rated voltage A, B port size DC specifications AC specifications (50/60Hz) M5 01 C4 C6 N3 N7 M5 x 0.8 1/8 (10SYJ7000 only) One-touch fitting for 4 One-touch fitting for 6 5 6 1 2 3 4 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] One-touch fitting for 5/32" One-touch fitting for 1/4 Body ported 5 Y M5 5 1 23 SYJ 10 43 5 2 5 Y SYJ 10 Base mounted Thread type Series Electrical

0.4

)5 1 (P) 3(R2) VQZ r r e q w e q w SQ VFS VFR VQ7 VQ2300 VQ2400 VQ2301 VQ2401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r VQ2500 VQ2501 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ2A01 VQ2B01 4(A) 2(B) 2(B) 4(A) r 5(R1) 1(P) 3(R2) 5(R1) 1(P) 3(R2) VQ2C01 2(B) 4(A) 5(R1) 1(P) 3(R2) Component Parts Component

One-touch Fittings

Series/ Spare Parts P.48 Inch P.29 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" V V V How to Order P.50 Variations P.51 Dimensions P.52 Made to Order/Clean Series/ Spare Parts P.55 Inch P.49 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" V V Face Seal Connection thread Applicable tubing G R Rc NPT R How to Order P.58 Variations P.59 Dimensions P.60 Spare Parts P.63 Metric P.57 2 3.2 4 6 8 10 12 16 V V How

Table of Contents

Vacuum pressure Suction flow rate 13-5-5 6 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS

HRX-OM-T002

Display and setting of various functions . 5-1 5.1 List of function . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main Display . 5-7 5.3.1 Main Display . 5-7 5.3.2 Items on the main display . 5-7 5.4 Alarm Menu . 5-8 5.4.1 Alarm menu . 5-8 5.4.2 Items shown on the alarm menu display . 5-8 5.5 Check monitor menu . 5-9 5.5.1 Check monitor menu . 5-9 5.5.2

LX

LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12

HRX-OM-X037

Display and Setting of Various Functions . 5-1 5.1 Basic Operation . 5-1 5.1.1 Touch panel . 5-1 5.1.2 Basic operating instructions. 5-2 5.2 Flow Chart of the Operation Screen . 5-4 5.2.1 Flow Chart of the Operation Screen . 5-4 5.3 List of Functions . 5-7 5.4 Description of the Screen . 5-8 5.4.1 Home screen . 5-8 Menu key . 5-9 Display and setting of date and time . 5-9 Operating condition

HRX-OM-R026

Display and setting of various functions . 5-1 5.1 List of function . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main screen . 5-7 5.3.1 Main screen . 5-7 5.3.2 Display on the main screen . 5-7 5.4 Alarm display menu . 5-8 5.4.1 Alarm display menu . 5-8 5.4.2 Content of display of alarm display menu . 5-8 5.5 Inspection monitor menu . 5-9 5.5.1 Inspection

JXCx-OMT0023

DISPLAY AND OPERATION SECTIONS 5 1 to 5 -30 5.1 Overview 5 2 5.2 Display sequence 5 3 5.3 Status display 5 4 5.3.1 Display transition 5 5 5.3.2 Display examples 5 6 17 5.3.3 Status display list . 5 8 5.4 Diagnostic mode 5 -10 5.5 Alarm mode 5 -12 5.6 Point table mode 5 -14 5.6.1 Point table transition 5 -14 5.6.2 Point table mode setting screen sequence 5 -15 5.6.3 Operation example

VFR

Option Refer to page 3-5-8.

Free Mount Cylinder

5 5 1 pc. 10 5 10 2 pcs.

HRX-OM-X010

4.5 System Startup and Shutdown . 4-5 4.5.1 System startup . 4-5 4.5.2 System shutdown . 4-5 Chapter 5 System Operation . 5-1 5.1 Operation Display Panel . 5-1 5.2 Flow Chart of Operation Screen. 5-2 5.3 Operation Screen . 5-4 5.3.1 Model Indication screen . 5-4 5.3.2 Status screen 1 . 5-5 5.3.3 Status screen 2 . 5-6 5.3.4 Status screen 3 . 5-7 5.3.5 Status screen 4 . 5-8 5.3.6 Alarm Display

Made to Order

5 6 6 6 6 6 9 18 17 22 22 26 26 34 41 6 7 9 8.5 11 11 14 16 5 6 6 6 6 6 8 9 5 5 5 5 5 5 6 6 20 25 32 40 50 63 80 100 120 119.5 139.5 139.5 160.5 160.5 190.5 200.5 0 0 15.5 9 16.5 11.5 8 10.5 24.5 24 34 27.5 37.5 32.5 35 35.5 57 56 70 63.5 78.5 73.5 84 74.5 80 93 110 118 146 160 199 236 87.5 87.5 103.5 103.5 119.5 119.5 141.5 161.5 MGPL, MGPA (Ball bushing bearing) A, E, HT Dimensions (mm)

HRX-OM-W002

4.3 Adjustment of bypass valve . 4-6 4.4 Check items after starting . 4-6 Chapter 5 Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.3 List of parameters . 5-6 5.3.1 Main Menu . 5-6 5.3.2 Alarm display menu . 5-6 5.3.3 Notice for maintenance Menu . 5-6 5.3.4 Monitor Menu . 5-7 5.3.5 Standard setting menu . 5-8 5.3.6

HRX-OM-X084

4.2.4 Cautions for re-start . 4-5 4.3 Adjustment of bypass valve . 4-6 4.4 Check items after starting . 4-6 Chapter 5 Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.3 List of parameters . 5-6 5.3.1 Main Menu . 5-6 5.3.2 Alarm display menu . 5-6 5.3.3 Notice for maintenance Menu . 5-6 5.3.4 Monitor Menu . 5-7 5.3.5

HRX-OM-Y098

mode [MODE] . 5-12 RUN/STOP display . 5-13 Run/stop operation . 5-13 5.4.2 Menu . 5-14 5.4.3 Status screen . 5-15 5.4.4 Information screen . 5-17 Alarm reset . 5-18 HRL Series HRX-OM-Y098 Contents Alarm name .5-18 Alarm log record.5-19 Display of alarm/maintenance reminder .5-20 5.4.5 Check operation time screen and maintenance reminder .5-21 Setting the usage time of DI filter.5-23 Setting

HRX-OM-W032

Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main Display . 5-7 5.3.1 Main display . 5-7 5.3.2 Items on the main display . 5-7 5.4 Alarm Menu . 5-8 5.4.1 Alarm menu . 5-8 5.4.2 Items shown on the alarm menu display . 5-8 5.5 Check Monitor Menu . 5-9 5.5.1 Check monitor menu . 5-9

Fieldbus System

) 4 (B) 2 (A) 4 (B) 2 Metal 4 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Light/surge voltage suppressor 2 2-position double 3-position pressure center Nil With E Without light, with surge voltage suppressor (A) 4 (B) 2 Rubber (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Coil voltage 3-position double check 5 24 VDC (A) 4 (B) 2 Note) 6 Function 1 (P) 5 (R1) 3 (R2) Nil Standard (0.95

Valve Single Unit

SX 000-50-2ANote : SX3000 (Metric size) C4: With One-touch fitting for 4 C6: With One-touch fitting for 6 X5000 (Metric size) C4: With One-touch fitting for 4 C6: With One-touch fitting for 6 C8: With One-touch fitting for 8 (Gasket u supplied as an accessory.) 3 5 3 5 3 5 3 5 3 5 3 5 For 45(N)F (D-sub connector) (Inch size) N3: With One-touch fitting for 5/32" N7: With One-touch fitting