JIS Standard Hydraulic Cylinder

B64 M9NW Relay PLC Yes 3-wire (NPN) F59W Diagnostic indication (2-color indicator) 5 V, 12 V IC circuit M9PW 3-wire (PNP) F5PW M9BW 24 V 2-wire 12 V Grommet J59W M9NA1 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V M9PA1 Water resistant (2-color indicator) M9BA1 2-wire 12 V F5BA1 F59F 4-wire (NPN) IC circuit IC circuit IC circuit 5 V, 12 V Diagnostic output (2-color indicator) A96 A93

Tie-rod Type Hydraulic Cylinder

Terminal conduit M9NW 3-wire (NPN) Relay PLC Yes G59W 5 V, 12 V Diagnostic indication (2-color indicator) IC circuit M9PW 3-wire (PNP) G5PW 24 V M9BW 2-wire 12 V K59W Grommet M9NA1 M9PA1 M9BA1 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit Water resistant (2-color indicator) 12 V 2-wire G5BA G59F F59F 4-wire (NPN) 5 V, 12 V IC circuit IC circuit Diagnostic output (2-color indicator) A96 A93

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

(NPN) 5 V, 12 V M9NA** v v V v v 3-wire (PNP) M9PA** v v V v v Water resistant (2-color indication) 2-wire 12 V M9BA** v v V v v G5BA** V v v With diagnostic output (2-color indication) 4-wire (NPN) 5 V, 12 V F59F G59F V V v v IC circuit Magnetic field resistant (2-color indication) 2-wire (Non-polar) P3DWA V V v Yes 3-wire (NPN equivalent) 5 V A96 V V IC circuit 100 V A93

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Lead wire length (m) Load voltage 5 (Z) Applicable load Auto switch model Electrical entry direction Wiring (Output) Special function Electrical entry Indicator light Type 0.5 (Nil) 1 (M) 3 (L) AC DC 12 V In-line A93 M9N M9B Reed auto switch 24 V 2-wire 100 V 12 V Relay, PLC Grommet Yes 3-wire (NPN) Solid state auto switch 24 V Relay, PLC Grommet Yes 12 V 2-wire Lead wire length symbols

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

(mm) D-A90V D-A96V D-A93V 22 Bore size D-M9V D-F9WV D-M9 D-F9W D-A90 D-A96 D-A93 (mm) 32 20 32 Mounting pattern q, w 35 Mounting pattern e 20 12 Mounting of Auto Switch As shown below, there are 3 ways to mount the auto switch according to 3 types of electrical entries. Insert the auto switch into the switch groove.

15

Please consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order.

Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

CRQ2

Lead wire length symbols: Auto switches marked with are made-to-order specification. 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Auto switches other than those listed above are also available. Refer to page 11-8-9 for details.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

A96V A96 5 V Grommet Yes 12 V A93V A93 100 V 24 V Relay, PLC 2-wire 3-wire (NPN) M9NV M9N IC circuit 5 V, 12 V M9PV M9P 3-wire (PNP) M9BV M9B 2-wire 12 V F9NWV F9NW Grommet 3-wire (NPN) Relay, PLC 5 V, 12 V 24 V Yes Diagnostic indication (2-color display) IC circuit 3-wire (PNP) F9PWV F9PW F9BWV F9BW Improved water resistance (2-color display) 2-wire 12 V F9BA Though it is possible

Compact Cylinder with Air Cushion

IC circuit 5V A76H A96V A96 A72H A73H A72 A73 A73C 200V Grommet A93V A93 Reed switch Solid state switch Yes 100V 12V Relay, PLC 2-wire 24V Connector Diagnostic indication (2-color display) A79W Grommet F9NV F9PV F9BV F9NWV F9PWV F9BWV F9N F9P F9B F9NW F9PW F9BW F9BA F79 F7P J79 F79W F7PW J79W F7BA F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV 3-wire (NPN) IC circuit 5V, 12V 3-wire

CE

Indicator light Lead wire length (m) Applicable load 0.5 (Nil) 3 (L) 5 (Z) Auto switch model Special function Type Load voltage AC DC Wiring (Output) Electrical entry Pre-wire connector In-line Perpendicular Reed switch 3-wire (NPN equivalent) IC circuit A96 A96V 5 V Grommet Yes 2-wire 24 V A93 12 V 100 V Relay, PLC A93V 3-wire (NPN) 3-wire (PNP) M9N M9NV IC circuit 5 V, 12 V M9PV

CQM

IC circuit 5 V A76H A96V A96 Yes No A72 A73 A80 A72H A73H A80H 200 V Solid state switch Reed switch Grommet 100 V 12 V IC circuit A90V A93V A90 A93 5 V, 12 V 12 V 12 V Relay, PLC 2-wire No Yes 24 V A73C A80C A79W F7NV F7PV F7BV J79C F7NWV Connector IC circuit 5 V, 12 V Grommet Diagnostic indication (2-color indication) Yes 3-wire (NPN) 3-wire (PNP) F79 F7P J79 M9NV M9PV M9BV M9N M9P M9B 5

CXT

Lead wire length (m) Load voltage Rail mounting Direct mounting Indicator light Special function Type Electrical entry Wiring (Output) Pre-wire connector Applicable load 12 to 40 32, 40 0.5 (Nil) 3 (L) 5 (Z) None (N) AC DC In-line In-line Perpendicular Perpendicular 3-wire (NPN equivalent) IC circuit 5 V A76H A96V A96 A93V A93 A72H A73H A72 A73 A73C 200 V Grommet Reed switch Solid

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Yes Applicable Auto Switch: 20, 25, 32 Lead wire length (m) Load voltage Auto switch model Indicator light Applicable load Type Electrical entry Wiring (Output) Electrical entry direction Special function 0.5 (Nil) 3 (L) 5 (Z) AC DC Perpendicular In-line A90 A90V No 100 V or less 5 V, 12 V IC circuit Relay PLC 2-wire Reed switch Reed switch Solid state switch Solid state switch 24 V A93

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

(mm) D-A90V D-A96V D-A93V 22 Bore size D-M9V D-F9WV D-M9 D-F9W D-A90 D-A96 D-A93 (mm) 32 20 32 Mounting pattern q, w 35 Mounting pattern e 20 12 Mounting of Auto Switch As shown below, there are 3 ways to mount the auto switch according to 3 types of electrical entries. Insert the auto switch into the switch groove.

MTS

IC circuit 5 V, 12 V 3-wire (PNP) Relay, PLC 2-wire 12 V Grommet 5 V, 12 V 24 V 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 12 V 2-wire Lead wire length symbols: 0.5 mNil (Example) A93 3 mL (Example) A93L 5 mZ (Example) F9NWZ Since there are other applicable auto switches than listed, refer to page 8-10-22 for details.

10-cls-e

function Wiring (output) Type Electrical entry 0.5 (Nil) 3 (L) 5 (Z) DC AC 3-wire (NPN) 3-wire (PNP) 2-wire M9N M9P M9B A90 A93 5 V, 12 V Solid state switch Relay, PLC 24 V Grommet Yes 12 V 5 V, 12 V 12 V 100 V or less 100 V IC circuit no Yes Relay, PLC 24 V 2-wire Reed switch Grommet 161

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M