HRX-OM-W002

For the function, refer to P.5-29,P.5-30 [Temperature range monitoring function setting example]. HRR Series 5.5 Advanced setting mode 5-31 HRX-OM-W002 Chapter 5 Display and Setting of Various Functions Temperature range monitor start time 24. Press the [] key.

MRQ

-18 to 1.5-19 Port size Rc (PT)1/8, M5 X 0.8 (The port is plugged for delivery.)

VNH

Supply pilot air higher than 0.25 MPa to P1 port Piping Inlet side (supply side): P port, Outlet side (exhaust side): A port Supply pilot air higher than 0.25 MPa to P1 port. PA VNH 12(P1) 12(P1) Nozzle 2(A) 1(P) PAX Nozzle 1(P) 2(A) 3(B) Stop valve Tank Coolant pump PB Tank Coolant pump For reducing load to pump, coolant liquid is returned from B port to tank each time.

IDX-OM-W023

MC MC OLR MC PTC MC MC EDV TDR TDR For Option M TDR V CM MC For Option V OLR MC TDR MC 01 OLR MC 01 OLR MC 01 PTC CM MC OLR PTC CM PTC MC TDR PTC CM CM FM1 PRS C11 PRS MC FM1 FM1 PRS FM1 PRS P TDR MC P FM2 TDR P C12 P FM2 FM2 TDR FM2 TDR PRS C11 FM1 MOV MOV MOV M For Option M P C12 FM2 MOV M For Option M M For Option M M For Option M M For Option M CM PTC PTC C01 FM1 PRS C11 FM2

Manifold Specifications

Body type Plug-in type ARBZS2000-00-P-1 Non plug-in type ARBZS2000-00-P-2 Part no. Note) Apply pressure from the P port of the base to operate the interface regulator. To use concurrently with a double check spacer, assemble in the following order: the valve, the interface regulator, and the double check spacer. Body type Plug-in type VVZS2000-26A Non plug-in type Part no.

Digital Flow Switch (Integrated display type) ( compatible)

Indicator light Output 1 and 2: Orange Power supply Used as switch output device 12 to 24 VDC, including ripple (p-p) 10% voltage Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% Current consumption 50 mA max.

Digital Flow Switch (Integrated display type) ( compatible)

Indicator light Output 1 and 2: Orange Power supply Used as switch output device 12 to 24 VDC, including ripple (p-p) 10% voltage Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% Current consumption 50 mA max.

Compact Rotary Actuator

p e r I n s t a l l p o s i t i o n o f e x t e r n a l s t o p p e r C auti on on usi ng exte rnal stoppe r R o t a r y a c t u a t o r w i t h A u t o s w i t c h A u t o s w i t c h s p e c i f i c a t i o n A u t o s w i t c h i n s t a l l a t i o n A u t o s w i t c h s e t p o s i t i o n I n t e r n a l s t r u c t u r e a n d o p e r a t i o n p r i n c i p l e C u

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

/See 1.2 Specifications on p.5 Review the content of the step data. 4) The pushing operation is performed at the Positioning operation position 5) The cable is not connected Confirm that the cable is connected or has been disconnected. correctly. /See 2.1 Wiring /cables on p.8 26 - No.

Precision Clean Regulator Series SRP

mounting hole 40 8.5 20 28 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 41 1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3

AIR FILTER

HOW TO ORDER AF 30 03 BD 1N A 1 3 4 5 2 1 Symbol Description Body size 10 20 30 40 50 60 Meter thread (M5) Rc N NPT F G Thread type Nil 2 M5 M5 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 Port size 3 Nil Without mounting option B With bracket a Mounting Option 4 Nil Without auto drain C With float type auto drain (N.C.)

HEC-OM-U015

(M5:3.0Nm, M6:5.2Nm) Jan o To Uo Vo . Zo Ao Bo . Internal sensor value for alarm = Internal sensor value Fine control value 5.4 Piping Feb P TP UP VP . ZP AP BP . Setting value memory function Ensure that the power source and the power supply of the product is Even if the power is turned off the set values are saved and will be restored at power on. Mar Q TQ UQ VQ .

Fan Type Ionizer

Accessories Power supply cable IZF10R Fan type Bracket Nil None B With Bracket Max. air flow: 0.80m3/s Power supply cable, AC adapter Output specification Nil With power supply cable (3 m) Nil NPN output Z With power supply cable (10 m) P PNP output Q With AC adapter (with AC cord) R With AC adapter (without AC cord) N None C IZF10R Power supply cable, AC adapter P With power supply cable

FILTER REGULATOR

Note 1) Note 2) B dimension is a size in the state to unlock the handle. 29 Revision history A P.7 3. SPECIFICATIONS Model No. is corrected. '17.7 B Bonnet material for AW60Correction. Option for -ZPressure gauge part number change. Recommended tightening torque: M5 added. Round type pressure gauge Applicable tool size correction. '18.3 C Added note of "piping".

HEC-OM-R008

Use N NPT 5 AC100-240V M5,M6 screws (bolts) or equivalent to the fix the product. Note) Only HECR010 with AC200-240V Be sure to correctly tighten all screws to the required torque.

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: M5 (M5 Female Thread), Option 1: w/o Lead Wire, Option 2: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: M5 (M5 Female Thread), Option 1: w/o Lead Wire, Option 2: None, Option 3: Y (w/o Operation Manual, w/o Calibration Certificate)

10%, Ripple (P-P)10% or less (With power supply polarity protection)1 output: 17 mA or less at 24 VDC, 2 output: 25 mA or less at 24 VDC5 ms or less?1% F.S. or lessIP40Operating: 0 to 60C, Stored: ?

10%, Ripple (P-P)10% or less (With power supply polarity protection)1 output: 17 mA or less at 24 VDC, 2 output: 25 mA or less at 24 VDC5 ms or less?1% F.S. or lessIP40Operating: 0 to 60C, Stored: ?

10%, Ripple (P-P) 10% or less (With power supply polarity protection)17 mA or less at 24 VDC5 ms or less?1% F.S. or lessIP40Operating: 0 to 60C, Stored: ?