New

29.5 32 66 74 110 68.5 68.5 71 36 45 63 39 39 39 107 118 154.5 19 23.5 35 16.5 16.5 16.5 30 30 35 Conduit termianl Conduit Faston terminal Model Q R U T Q R 99.5 99.5 102 R U 23 23 25.5 Q U 91 102 137.5 VXF21A< VXF22A< VXF23A< 20 20 22 20 20 22 91 102 137.5 97 108 143.5 68.5 68.5 71 47.5 47.5 50 20 20 22 12 Series VXF2 Dimensions: Direct piping type VXF24A<<< Grommet Grommet (with surge

Air Slide Table

90 100 150 205 230 I 16 16 16 16 16 31 20 18 18 NN 2 2 2 2 2 3 4 4 4 H 55 55 55 65 80 44 66 66 G 23 23 23 23 32 44 31 56 N 4 4 4 4 4 6 8 8 8 HA 55 55 55 65 80 65 88 132 132 Model F 55 46 55 65 75 60 48 60 65 GA 23 23 23 23 32 72 88 97 122 KA 170 223 248 NA 4 4 4 4 4 4 8 8 8 MXQR2510 MXQR2520 MXQR2530 MXQR2540 MXQR2550 MXQR2575 MXQR25-100 MXQR25-125 MXQR25-150 Note) Note) Note) Refer to

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

size [mm] Stroke range [mm] A B d11 BG D E EE G H KK L2 L8 L9 L12 PL R RT SL SW VA VD WA WB WH ZZ Without rod boot With rod boot 32 Up to 2000 Up to 1000 22 30 16 12 47 G 1/8 28.9 48 M10 x 1.25 15 94 4 6 13 32.5 M6 x 1 8 10 4 4 4 7 26 146 40 Up to 2000 Up to 1000 24 35 16 16 54 G 1/4 32.6 54 M12 x 1.25 17 105 4 6.5 14 38 M6 x 1 8 13 4 4 5 8.9 30 163 50 Up to 2000 Up to 1000 32 40 16 20 66

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

> Indicator light 77 114 62<67> < >: AC 1.12-43 VQZ1000/2000/3000 Base Mounted Dimensions: VQZ3000 2 position double 0 1 02 03 Grommet(G): VQZ325 (R)lGl 300 116.5 (Lead wire length) 58 28 24.5Mounting holes 10.5(Rc(PT)3/8) 10.5(Rc(PT)3/8) 9(Rc(PT)1/4) 9(Rc(PT)1/4) R5 5 A 4 B 2 18 45 SMC SMC B A 5 1 P 3 R1 R2 Manual override Cover diameter 1.6 Cross section 0.34mm2 66 56 5 (58) 56.5 54.5

TABLE OF CONTENTS

R.15 (3.8) TYP . .66 (16.8) .66 (16.8) .15 (3.7) DIA. THRU (2) PLACES .15 (3.7) DIA. THRU (2) PLACES Mtg. HOLES #6-32 UNC THD. X .22 (5.6) MFT 2 PLACESAS SHOWN Mtg. HOLES #6-32 UNC THD.

EX120/121/122

EX9 EA 03 Mounting specification 03 04 Direct mounting DIN rail mounting EX9-EA03 EX9-EA04 66 66 Mounting hole for 2 x M4 12.5 60 12.5 10 10 60 13.2 13.2 18 6 75 75 18 6 1678 Series EX250 Integrated Type/ For Input/Output How to Increase Input/Output Blocks, Procedure Drawing u y t q e w r EX Parts List Note No. Description Part no.

Electric Slide Tables

CN5 parallel I/O connector CN4 serial I/O connector 150 132 141 CN3 encoder connector CN2 motor power connector CN1 power supply connector 4.6 for body mounting b) DIN rail mounting (LEC6D-) (11.5) Refer to page 54 for L dimension and part number of DIN rail. (81.7) 35 66 1 31 64.2 35 167.3 (When locking DIN rail) 173.2 (When removing DIN rail) 150 132 (91.7) 55 Controller (Step Data Input

Sine Cylinder Series REC

76 0.7 0.1 0 500 300 1000 1500 81 75 66 51 0.3 REB Cylinder stroke (mm) G 60 55 49 37 0.5 REC The above curve in the graph refers to P = 0.5 MPa of supply pressure.

Base Mounted Metal Seal/Rubber Seal Series VQ

(L4) 5.2 (L3) 23.5 L2 Applicable connector: Flat ribbon cable connector (20P) L1 (Conforming to MIL-C-83503) 27 P = 10.5 8.8 28 (12) 13 Indicator light Manual override 1.5 4.8 (5.5) PCW type 2 93.5 (35) 66 40.5 Mounting hole for 4-M4 ~ = 35 n 2 1 3 4 5 6 7 8 Stations D side U side 52 61.5 63.5 2-C8 R (EXH) port DIN rail clamp screw R R X X 40.7 9.3 P P 25 18.7 7.7 (12) (7.5) P (SUP) port

0.55

VP500-224-1 (M4 x 46) VP300-224-1 (M3 x 36) VP700-224-1 (M5 x 66) For valve mounting 10 Series VP300/500/700 How to Order Pilot Valve Assembly Caution When only the pilot valve assembly is replaced, it is not possible to change from V211 (Grommet or L/M-type) to V212 (DIN or Conduit type), or vice versa.

Modular Type Regulator Series AR

66 C 11 26.5 28 31 36 36 43 46 L 30 44 44 46 54 56 65.8 65.8 D 25 57 55 59 68 68 87 87 M 4.5 5.4 5.4 6.5 8.5 8.5 11 11 E 26 65 64 66 74 74 84 84 N 6.5 15.4 15.4 8 10.5 10.5 13 13 F 29.5 28.5 30.5 35 35 44.5 44.5 P 40 55 55 53 70 70 90 90 G 0 2 Note) V 6 6 7 7 7 Q 2 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S 18 25 26 31 35.5 37 T 18.5 28.5 32.5 38.5 42.5 42.5 U 14 16 19 21 21 AR10 AR20 AR25

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

207 0.2 0.18 0.13 0.025 0.064 40 40 40 36 M20 x 1.5 30 27 22.4 9 19 71 212 M16 x 1.5 25 22 18 7 14 66 207 0.025 0.064 50 50 46 40 M24 x 1.5 35 32 28 11 24 78 231 M20 x 1.5 30 27 22.4 9 19 73 226 0.15 63 63 55 46 M30 x 1.5 45 42 35.5 13 30 95 257 M24 x 1.5 35 32 28 11 24 85 247 0.030 0.076 0.2 80 80 65 55 M39 x 1.5 60 57 45 15 41 113 295 M30 x 1.5 45 42 35.5 13 30 98 280 0.030 0.076 0.036

Modular Type Filter Regulator Series AW

Modular Type Filter Regulator Series AW Filter regulator Series AW Filtration Accessory Model Port size AW10 M5 x 0.8 AW20 1/8, 1/4 AW30 1/4, 3/8 AW40 1/4, 3/8, 1/2 AW40-06 3/4 Pages 56 through 60 Filter regulator with back flow mechanism Series AWK 5m AW20K 1/8, 1/4 AW30K 1/4, 3/8 AW40K 1/4, 3/8, 1/2 Bracket Square embedded type pressure gauge (except for AR10) AW40K-06 3/4 Pages 63 through 66

Guide Cylinder Series MGG

104 128 224 35 89 19 40 145 23 400mm or more 350 to 1300 410 131 66 128 143 262 40 110 19 40 145 23 500mm or more 20

5 Port Solenoid Valve SY Series

. : 8, 5/16" : 10, 3/8" G: Approx. 300 H: Approx. 600 100.1 [102.3] 77.9 (Lead wire length) 13.6 B A 101.8 [104] (For manifold mounting) 24.2 Manual override 19 42 (52) (66) (For mounting) 24.2 (Light/surge voltage suppressor) (5.5) 1.2 (5.5) 47.6 12.5 (49.5) 16.1 (42.5) 47.6 31.5 [38.5] + 24.5 SY7120-02(-F2) G H 28 A, B port 1/4 39.4 20 (23.9) (P port) 1/4 0.9 31.5 [38.5] 2 18 40 EA P EB

Rotary Cylinder Series MRQ

The standard angle adjustment range of 5 (one side) is changed to in this type. + 5 95 (mm) E Mounting screw Q Stroke 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 Size Y 58.5 ( 5 Stroke)/2 61 ( 10 Stroke)/2 61 ( 15 Stroke)

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

position exhaust center 2(B) (A)4 2(B) (A)4 2 position single 2 position double 3 position (EA)5 1 (P) 3(EB) (EA)5 1 (P) 3(EB) 4 position dual 3 port valve 3 position pressure center Note) Based on dynamic performance test, JIS B 8375-1981 (Coil temperature: 20C, at rated voltage) 2(B) (A)4 2(B) (A)4 Weight (EA)5 3(EB) 1 (P) (EA)5 1 (P) 3(EB) Actuation type Weight (g) Series Single solenoid 66

Sine Cylinder Series REC

76 0.7 0.1 0 500 300 1000 1500 81 75 66 51 0.3 REB Cylinder stroke (mm) G 60 55 49 37 0.5 REC The above curve in the graph refers to P = 0.5 MPa of supply pressure.

Sine Cylinder Series REC

76 0.7 0.1 0 500 300 1000 1500 81 75 66 51 0.3 REB Cylinder stroke (mm) G 60 55 49 37 0.5 REC The above curve in the graph refers to P = 0.5 MPa of supply pressure.

High Vacuum Angle Valve

G G Heater A A [mm] Series Valve size A B C D E Fn G H J K 25 50 121 48 27 12 40 26 44 21 40 65 171 66 39 11 55 41 67 29 50 70 185 79 31 11 75 52 76 29 9 XLC XLG 19 Heat-resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NJ/D-M9PJ RoHS Refer to the SMC website for details on products that are compliant with international standards.