Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: F02 [G1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C01 (Rc1/8), Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A)

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Bracket

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: F02 [G1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Bracket A, Operation

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: F02 [G1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Bracket A

Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Bracket

Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Rc1/8, Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Bracket A, Operation Manual: -

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

(initial value) Solenoid Specifications Electrical entry L type (for plug-in), M type plug connector (M) Rated coil voltage V Note) 24, 12, 6, 5, 3DC Allowable voltage fluctuation 10% of rated voltage Power consumption W 0.6 (with light: 0.65) Surge voltage suppressor Diode Indicator light LED Note) Only 24VDC and 12VDC are available for plug-in use.

Thermo-chiller

Required installation space 8 e r o m r o m m 0 0 Required installation space for ventilation and maintenance 400 mm or more 800 mm or more 800 mm or more 400 mm = 15.7 inch 800 mm = 31.5 inch 800 mm or more Piping Caution 78.7 inch (2000 mm or more) 1.

AC Servo Motor Driver

Servo motor Servo amplifier (drive unit) Servo amplifier (drive unit) Driver Driver Servo motor U U U U V V M V M V W W W W Do not connect AC power directly to the servo motor. Otherwise, a fault may occur. A 6 CAUTION The surge absorbing diode installed to the DC relay for control output should be fitted in the specified direction.

LEC-OM069xx

Description Parameter Monitor Signal Unit Remarks n.00 [Pn007 Factory Setting] Motor rotating speed 1 V/1000 min-1 n.01 Speed reference 1 V/1000 min-1 n.02 [Pn006 Factory Setting] Torque reference 1 V/100% rated torque n.03 Position error 0.05 V/1 reference unit 0 V at speed/torque control n.04 Position amplifier error 0.05 V/1 encoder pulse unit Position error after electronic gear conversion

Soft Start-up Valve

V + 02 1/4 V 03 3/8 V 04 1/2 V 06 3/4 V 10 1 V + e Port size 1(P), 2(A) a Mounting Nil Without mounting option V V V V B With bracket V V V V + Option b Pressure gauge Nil Without pressure gauge V V V V G Round type pressure gauge (with limit indicator) V V V V + r c Silencer Nil Without silencer V V V V S Silencer (Built-in) V V V V + 1 100 VAC V V V V 2 200 VAC V V V V 3 110 VAC

Soft Start-up Valve

+ 02 1/4 V 03 3/8 V 04 1/2 V 06 3/4 V 10 1 V + e Port size 1(P), 2(A) a Mounting Nil Without mounting option V V V V B With bracket V V V V + Option b Pressure gauge Nil Without pressure gauge V V V V G Round type pressure gauge (with limit indicator) V V V V + r c Silencer Nil Without silencer V V V V S Silencer (Built-in) V V V V + 1 100 VAC V V V V 2 200 VAC V V V V 3 110 VAC [115

SQ1000/2000

A Withstand pressure V, 1 minute, AC Station 11 1000 SOL. B 24 () (+) Black White 12 () (+) Yellow Red SOL. A Insulation resistance M/km, 20C Station 12 5 or less SOL. B 25 () (+) White None Note) The minimum bending radius for D-sub connector cables is 20mm. COM. 13 (+) () Orange Red Note) Negative COM spec. Positive COM spec.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Approx. 600 (Lead wire length) 85.2 [87.4] 128.8 [131] (Light/surge voltage suppressor) 1/4, 1/8 (P, A, B port) 80 [87] 57.5 [64.5] + 64.6 54 42.1 36.5 25.5 20 12 43.6 22 22 11.5 34 18 1/4 (R1, R2 port) 31.5 63 M plug connector (M): SYJ7140-M01 02 DIN terminal (D): SYJ7140-D01 02 M8 connector (W0): SYJ7140-W001 02 L plug connector (L): SYJ7140-L01 02 Applicable cable O.D. 3.5 to 7 Approx

VQ20/30

VC 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC SY100-82-3-05 SY100-82-3-06 SY100-82-2-01 SY100-82-2-02 SY100-82-2-03 24 V 12 V 100 V 200 V 110 V A VDW A VQ B DIN Terminal Circuit with Indicator Light VX2 A AC circuit DC circuit Mounting procedure 1) Hook the mounting hook on the side of the manifold base to the DIN rail. 2) Lift the side of the manifold off the DIN rail and slide it in the

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

VT/O317-G(-02) VT/O317-GS(-02) VT/O317-H(-02) VT/O317-HS(-02) VT/O317-C(-02) VT/O317-CS(-02) VT/O317-T(-02) VT/O317-TS(-02) VT/O317-TZ(-02) VT/O317-D(-02) VT/O317-DS(-02) VT/O317-DZ(-02) Coil assembly with terminal part no. Coil no.

Lightweight and Compact

as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option) 73 Circulating Fluid Temperature Controller

Digital Flow Switch (Integrated display type)

to 20 mA) output type PFM7--DMax. 28 V, 80 mA Internal voltage drop: 1 V or less C: Analogue output: 1 to 5 V Output impedance: 1 k D: Analogue output: 4 to 20 mA Max. load impedance: 600 Min. load impedance: 50 NPN (1 output) + External input type PFM7--GMax. 28 V, 80 mA Internal voltage drop: 1 V or less External input: No voltage input (reed switch or solid state), 30 ms or more -18No.PF-OMJ0006