VQ4000

Electrical entry of manifold (except L and C kit) is individual wiring. For details, refer to internal wiring figure of each kit. Cable length is 0.6 m for L kit.

EXxx-OMO0027

(When L/A IN LED is OFF.) (2)Check that the connectors of L/A IN and L/A OUT communication cables are connected and there are no broken wires. L/A IN and L/A OUT LEDs are OFF.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

14 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 20 12 12 10,11 10, 11, 12 08, 09 1000 10 15 8 500 06, 07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-53 12 Series ASD-FG Construction ASD230FG ASD330FG/430FG ASD530FG/630FG ASD530FG-02 @1 !

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AK ASS ASR Flow Rate and Effective Area ASF Model AS121FM AS131FM AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 3.2, 4, 6 6, 8 3.2, 4 8, 10 4 6 Metric size Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size Air flow (l/min(ANR)) 7 12 38 Controlled flow JIS Symbol 0.1 Effective area (mm2) 0.2 0.6 Flow rate (l/min(ANR)) 230 180 460 260 390

IIIIIII

HOW TO ORDER NVFil 250 -N02 02 S v"lrrs..i"" Tt L Rolter Material (01, 02, O6) : Acetal (Standard) NVFM 250(1) Cy1.0 NVZM 450(1) Cy0.55 S : Steel Pilot Supply 0 : Internal Pilot From "P" Port 1 = External Pilot Supply (Special Order Only) 00 : lhlve Body Only 0l = StandardCam Lever 02 = Cam Lever-One Way 05 = Plunger 06 = Roller Plunger, Inline 08 = Toggle Lever 30 = Push Button-Mushroom'

Mechanical Valves Series NVM, NVFM, NVZNI

HOW TO ORDER NVFil 250 -N02 02 S v"lrrs..i"" Tt L Rolter Material (01, 02, O6) : Acetal (Standard) NVFM 250(1) Cy1.0 NVZM 450(1) Cy0.55 S : Steel Pilot Supply 0 : Internal Pilot From "P" Port 1 = External Pilot Supply (Special Order Only) 00 : lhlve Body Only 0l = StandardCam Lever 02 = Cam Lever-One Way 05 = Plunger 06 = Roller Plunger, Inline 08 = Toggle Lever 30 = Push Button-Mushroom'

Free Mount Cylinder Series CU

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 6, 8 3.2, 4 8, 10 3.2, 4, 6 Metric size 6 4 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" Inch size 5/32" 3/16" 7 12 Air flow (l/min (ANR)) 38 Controlled flow 0.1 0.2 Effective area (mm2) 0.6 230 180 460 100 Flow rate (l/min (ANR)) 260 390

Table of Contents

l 300 M16 x l 300 M16 x l 300 M16 x l 500 M24 x l 500 M24 x l 500 AT6C AT11C AT22C AT37C AT55C AT75C AT125C AT150C AT220C 1 2 Rc 1/2 Rc 3/4 Rc 1 Rc 1 Rc 1 1/4 Rc 1 1/4 Rc 2 Rc 2 Rc 2 Rc 110 110 110 180 180 180 260 260 Rc 3 4 Rc 1 1 2 1 2 Rc 1 2B (JIS 10kFF) 2B (JIS 10kFF) 3B (JIS 10kFF) 4B (JIS 10kFF) 4B (JIS 10kFF) 14-16-2 1 Heatless Air Dryer Series ID Model Heatless ID series is best

Modular Type Regulator Series AR

5000 10 Flow rate L/min (ANR) Flow rate L/min (ANR) Orange mark AR30 Rc 3/8 AR60 Rc 1 0.6 0.6 0.5 0.5 2.

Base Mounted Metal Seal/Rubber Seal Series VQ

VQZ VQD Except L kit Except L kit Except L kit P. 2-4-177 P. 2-4-166 For S, G kit, please contact SMC.

OMU0023

Data No.1 8 02 0106 sent. 9 01 02 004B 0001 01 02 01 Acquires the INP signal information.

Precision Regulator Series IR1000/2000/3000

Supply pressure: 0.7 MPa Set pressure: 0.2 MPa Flow rate: 0 l/min (ANR) Back pressure: 0.5 MPa Supply pressure: 0.5 MPa IR2000-02 IR2000-02 IR2000-02 0.204 0.5 0.2 Set pressure (MPa) Set pressure (MPa) Set pressure P2 (MPa) 0.4 0.202 Set point 0.15 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 100 200 300 400 0 100 200 300 400 500 600 700 Flow rate (l

Check Valve Series AK

ASF Standard size 1 4 1 2 1 2 4 6 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Thread type Nil N F Rc NPT G AK4000-03/-04 AK6000-06/-10 Port size 0.5 MPa 0.5 MPa Port size Applicable series AK2000 AK2000/4000 AK4000 AK4000 AK6000 AK6000 Inlet pressure: 0.1 MPa Inlet pressure: 0.1 MPa 0.3 MPa 0.3 MPa 0.7 MPa 0.7 MPa 01 02 03 04 06 10 1 8 1 4 3 8 1 2 3 4 1 Flow rate (l/min (ANR)) Flow rate

125

Nil Without sub-plate* Manual override 02 1/4 03 3/8 04 1/2 42 Grommet/ (L/M) plug connector DIN terminal Nil Non-locking push type * With a gasket and 2 mounting bolts Grommet/ (L/M) plug connector Electrical entry B Locking slotted type Grommet L plug connector M plug connector DIN terminal G: Lead wire length 300 mm L: With lead wire (Length: 300 mm) M: With lead wire (Length: 300 mm)

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

B RATE PWR L RUN SETTINGS MOD/NET ADDRESS NO. PWR PWR COM ERR ON ON L ERR.

IR1000/2000/3000

800 900 1.0 0 100 200 300 400 500 Flow rate l/min (ANR) Relief flow rate l/min (ANR) Supply pressure P1 MPa IR2020-02 IR2020-02 IR2020-02 Conditions: Supply pressure 1.0MPa Conditions: Back pressure 1.0MPa 1.0 0.8 0.204 0.9 0.7 Set pressure P2 MPa Set pressure MPa 0.8 Set pressure MPa 0.6 0.202 0.7 Setting point 0.5 0.6 0.200 0.5 0.4 0.4 0.3 0.3 0.198 0.2 0.2 0.1 0.1 0.196 0 200 400 600

Direct Solenoid

Poriing No. of Ports 'xx" M84010-02 Ta"NPTFSide l l M84011-02 7a" NPTF Side: Y.r" Bottom A & B 1 3 MB 4210-02 %"NPTFSid(2); % Botlom(5) 7 t 5 Manifolds *(OptionsT & P Only) Part No. Poding No.of Ports "xx" Subplates .

45

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

E-P HYREG

VVEX2-2-5-02 VY1200-00-G 4 pcs.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

PF2M7 10 C6 L M q w r t y u i e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min w Flow adjustment valve/Piping entry direction With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02, N1, N2, F1, F2 Straight Symbol Port size Rated flow