Manifold Specifications

Rc 1 8 VVZS2000-P-01-1 VVZS2000-P-01-2 Body type Plug-in type VVZS2000-26A Non plug-in type Part no. Body type Plug-in type VVZS2000-22A-1 Non plug-in type VVZS2000-22A-2 Part no. Blanking plate It is used by attaching on the manifold block for being prepared for removing a valve for maintenance reasons or planning to mount a spare valve, etc.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

Clean Room Rodless Cylinder Series CYP ø15, ø32

adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

0 CYP15 CYP32 L 67 90 Z 118 155 Y 2.5 3.5 WB 17 27 WA 32 46 W 69 115 TB 18 22 TA 13 17 T 23 29 R 45 79.5 QW 48 87 N 4.5 7.5 Q 105 138 M 6 8 PB 60 100 MM M4 x 0.7 M6 x 1 PA 25 50 LW 69 115 P M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension drawings indicate the case of piping port location Nil.

Title not found

Compact 35mm Light weight 120g 50mm 66mm 270g 700g Pressure gauge can be mounted from the front or rear Rear pressure gauge mounting Standard Back Pressure gauge VAC SET SMC P (Vacuum pump side) (Pad side) K U C S O H L VAC SET L H O S C Pressure gauge Panel mounting capability is standard U K P SMC (Vacuum pump side) (Pad side) Front Applications Lifting of work pieces Leak tester Pressure

7.5

0 o t r e w y (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double 2 position double 2 position double with back pressure check valve t r e w y q !1 u !

Membrane Air Dryer

Thread type Symbol Type Nil Rc Port size N F NPT 100 30 50 60 75 G Port size Symbol Nil H L L S L S L S Nil H L 02 03 04 $ $ $ $ $ $ $ $ $ $ $ $ 1/4 3/8 1/2 $ $ $ $ $ $ $ $ $ $ $ $ Component equipment 100 30 50 60 75 Component equipment Nil H L L S L S L S Nil H L Mist separator AFM40 AFD40 Micro mist separator GD40-2-01 Differential pressure gauge AR40 Regulator Replacement Parts (Element

AS

TMH Needle Valve/Flow Characteristics AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10 20 50 0.15 0.3 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area(mm2) Effective

Free Mount Cylinder Series CU

across flats L RQ 2 x P through Width across flats L 4 x T counterbore W + Stroke S + Stroke CQM Rod End Nut/Accessory Material: Carbon steel Z + 2 x Stroke MU Part no.

Vacuum Module Series ZX

PV/V port size Nil Y M6 x 1 (Option) M5 x 0.8 Nil L Without lock nut Pilot valve With lock nut DC: 1 W (With indicator light: 1.05 W) AC DC: 0.45 W (With indicator light: 0.5 W) Vacuum switch electrical entry Nil Nil Lead wire length 0.6 m Grommet type L C Lead wire length 3 m Lead wire length 0.6 m Lead wire length 3 m Without connector (Without lead wire) Y Caution CL Only 24 VDC and 12

VT307

VV307-01-3--F P = 26 (Applicable cable O.D.)

Modular Style Regulator with Built-in Pressure Gauge Series ARG

MPa MPa MPa P P P P K K K K C C C C U U U U O O O O S S S S H H H H L L L L to to to to Mounting angles other than 45, 135, 225 and 315 are available through the Made to Order (page 29).

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Dimensions Manifold type (without PD port) ZZQ1 -B2B-X125 ZQ1 3M(-Q) 2 x Rc 1/4 EXH. port PE P 8 P PE 62 13 Space Saving Vacuum Ejector Series ZQ Manifold Exploded View e y r b y y r y a) part b) view t w a) part t q a) part t Part no. Component Parts Description No. Hexagon socket head cap screw End block L End block R 1 2 3 Refer to How to Order below.

HRX-OM-W038

[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less

Digital Flow Switches

Real-time switch output Unit switching Hysteresis mode ON For Air YES OFF P-1 P-2 Display Real-time flow rate l/min Accumulated flow l Real-time flow rate "P" Window comparator mode H : Hysteresis CFM x 10-2 x CFM x 10-1 ft3 x 10-1 H H CFM = ft3/min ON High Flow Rate Type (For Air) NO OFF P-1 P-2 Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 Real-time flow rate OUT1

NVZseies

(Ms) | ieries I{VZ 3-port dirct operated I solenoidvahre I NVZ100 | -EEffi rfl|/h afirF I P F P F II I 3-pod pilot operated I solenoid valrre I NVZ300 I @ Internal dlot type I T di**t* | ,oli*,n,* oiJ I K4 q I l-f " " ' n * | {im#h I P F P F II I I tlffi;lI l&*;" 3-port pilotoperated I solenoad Yalve I NVZSOO I @ Inlerml dlol type I "t" ^"" I ilF a{Zl;lh I exrllar pirot ty"pi I l " i I w

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Refer to section 11.5 for the wire used for the extension cable. 2m or less MR-PWS1CBL2M-A1-L MR-PWS1CBL2M-A2-L MR-PWS1CBL2M-A1-H MR-PWS1CBL2M-A2-H MR-PWS2CBL03M-A1-L MR-PWS2CBL03M-A2-L LE-CSM50m or less Driver Servo motor Servo amplifier Extension cable CNP3 AWG 19(red) AWG 19(white) AWG 19(black) U V U V M W W AWG 19(green/yellow) (Note) Relay connector for extension cable a) (Note) Relay

VQC

10A-1 VVQ2000-10A-1 Dual flow fitting assembly VVQ1000-52A-C8 VVQ2000-52A-C10 Perfect block VVQ1000-FPGVVQ2000-FPGCYL to port Conforms to IP40 Individual SUP spacer VVQ1000-P-1-C6 VVQ2000-P-1-C8 Port plug VVQ0-58A (For VQC1000) VVQ1000-58A (For VQC2000) EXH block plate assembly Elbow fitting assembly VVQ1000-F-L VVQ2000-F-L Electrical wiring specifications [-K] C3 C4 C6 M5 VVQC1000-19AD S

KJ

(mm) 2 Effective area (mm2) Weight (g) D L Q Model D KJT02-00 6 10 4.9 8.8 0.9 1.7 Q Q 3.2 5.2 Q M Q L D D M M L L Male branch tee: KJY T H A Applicable tubing O.D.

Series VS

L 1 E 0 TM TM F F 3 M 2 2 1 1 5 5 3 3 1.24V 1.24V 2.NC 2.NC 3.NC 3.NC 4 4 4.0V 4.0V 3 3 1 1 4 2 2 12 12 12 12 MINI CONNECTOR MINI CONNECTOR MINI CONNECTOR MINI CONNECTOR VLV PWR IN VLV PWR IN BUS IN BUS IN 5PIN(MALE) 5PIN(MALE) 4PIN(MALE) 4PIN(MALE) 1.DRAIN 1.DRAIN 4.CAN H 4.CAN H 5.CAN L 5.CAN L 2.V+ 2.V+ 3.V3.VG 12 12 N N SMC SMC O O MINI 4 PIN CONNECTOR (SOLENOID POWER) P SIDE U SIDE D