Rotary Clamp Cylinders Flexible cable is used for the D-M9(V), DM9W(V), D-M9A(V), D-M9A(V) as standard.
P, R port M5 x 0.8 VQZ VZ X port (External pilot) M5 x 0.8 A port M5 x 0.8 VS VFN 4-4-19 20 Series SYJ500 How to Order Light/Surge voltage suppressor Rated voltage DC Electrical entry for G, H, L, W Electrical entry for D 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Nil Without light/surge voltage suppressor Nil Without light/surge voltage suppressor S Z R U With light/surge voltage suppressor
01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 AW + [S] + AFM AC20D to 40D AC10: M5 x 0.8 AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AC50: 3/8 AC55: 1/2 AC60: 1/2 AC10 to 60 AF + [T] + AR + AL T T-interface AC10B to 60B AF + [T] + AR AC20C to 40C AF + AFM + [T] + AR AC20 to 50 AF + AR + AL + [V] AC20A to 40A AW + AL + [V] Residual pressure relief 3 port valve V AC20B to 50B AF + AR + [V] Accessory
Standard equipped with shock absorber -X 75 100 125 150 200 250 300 20 25 32 40 50 63 80 100 20 25 32 40 50 20Series MGC P . 8-21-6 Data Series MGG V V V V V V V V V V V V V V Guide Cylinder Guide Table Cylinder with Turntable Series MGC Long stroke Bore size (mm) Standard stroke (mm) Compact type of series MGG Lightweight, space-saving 250 300 350 400 450 500 600 700 800 900 1000 1100 1200
Cylinder ports (1) N1 N3 N7 N9 N11 M5 01 02 Symbol NM External pilot port 3/8 1/8 5/32 1/4 5/16 Mix Applicable tube O.D.(Inch) M5 1/8 1/4 M5x0.8 VQZ1000 V V V V V Cylinder port VQZ2000 V V V V V VQZ3000 V V V V V Note 1) Mixing One-touch fittings and thread types is impossible.
(0 to 1 MPa) 0 R(PT) 1/8, M5 X 0.8 01 R(PT) 1/4, M5 X 0.8 02 NPTF 1/8, M5 X 0.8 T01 NPTF 1/4, M5 X 0.8 T02 Sensor Specifications/General Purpose Fluid Applications PSE520-01 PSE520-02 PSE520-T01 PSE520-T02 Model 0 to 1 MPa Operating pressure range 2MPa Max. pressure Fluid non corrosive to SUS304, SUS630 Fluid Analog (1 to 5V, Load impedance: 10k or more) Output specification 12 to 24 V DC
Applicable tubing O.D.: 4 Vacuum (V) port Applicable tubing O.D.: 3.2 Vacuum (V) port 15.3 15.6 KJL04-M5 KJL23-M5 KJS04-M5 KJS23-M5 8.4 9.3 Applicable tubing O.D.: 4 Vacuum (V) port Applicable tubing O.D.: 3.2 10.6 10 15.5 16.5 Vacuum (V) port ZA1 1 M1 ZA1 1 M2 ZA1 1 M4 ZA1 1 M5 Dimensions of the vacuum (V) port fittings after installation Applicable tubing O.D.: 4 Common air pressure supply
SS5YJ310-SYJ333 M5 x 0.8 M3 x 0.5 0.9 Type 10-SS5YJ3-32-M5 0.25 0.25 0.25 0.24 0.32 0.32 0.33 0.32 0.20 0.21 0.20 0.22 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 0.19 0.18 0.26 0.21 0.25 0.28 0.29 0.27 0.25 0.27 0.25 0.34 0.060 0.059 0.060 0.057 0.081 0.079 0.082 0.079 0.048 0.050 0.048 0.057 0.32 0.30 0.29 0.27 0.33 0.35 0.34 0.34 0.10 0.21 0.19 0.10 0.25 0.27
suppressor is used, there is some 100 V 200 V 110 V 220 V residual voltage to the protection element and rated voltage.
M5 fittings for M5 thread are attached without being incorporated.
12 V IC circuit 3-wire (PNP) Solid state switch Relay, PLC 2-wire 24 V Grommet Yes 12 V 3-wire (NPN) 5 V, 12 V IC circuit 3-wire (PNP) Diagnosis (2-color indicator) 2-wire 12V Note 2) Add -61 at the end of the part number for the flexible lead wire.
12 V IC circuit 3-wire (PNP) Solid state switch Relay, PLC 2-wire 24 V Grommet Yes 12 V 3-wire (NPN) 5 V, 12 V IC circuit 3-wire (PNP) Diagnosis (2-color indicator) 2-wire 12V Note 2) Add -61 at the end of the part number for the flexible lead wire.
V A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 3-wire (NPN) 2-wire Relay, PLC 5 V, 12 V IC circuit 3-wire (PNP) 12 V 2-wire Relay, PLC Grommet 24 V 3-wire (NPN) 3-wire (PNP) Diagnostic indication (2-color indication) 5 V, 12 V IC circuit 12 V 2-wire Water resistant (2-color indication) Lead wire length symbols: 0.5 mNil (Example) A93 3 mL (Example) A93L
Series MY1MW/CW Dimensions/Centralized Piping Type 16, 20 1 in = 25.4 mm MY1 M C W G Bore size Stroke 8.5 G Cushion needle For 16 Unavailable port 2-M5 x 0.8 2-M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 QQ QQ RR SS RR SS NC Cushion needle TT UU G G TT UU 2-M5 x 0.8 PP PP (Hexagon socket head plug) GB WW XX WW XX 2-ZZ (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV
ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM
For further details, refer to mounting positions under Replacement Heaters on page 465. 452 B XLD/XLDV Series Aluminum High Vacuum Angle Valve Dimensions XLDV-25/With solenoid valve 88.5 74 48 (KF flange) (For DC) (For AC) L A V V E 57.6 M 55.4 U 40 48 U C A V H H I G (38.5) 8.5 2.2 7.5 max. 49.4 21 Initial exhaust solenoid valve 41.5 3.5 123 26 M5 Port 3(R) (EXH) (Exhaust port) M5 Port 1
A73C A72H A73H E76A E73A F79 F7P J79 F79W 200 V Relay, PLC 2-wire 100 V 12 V Yes 24 V Connector 3-wire (NPN equivalent) IC circuit 10 5 V Grommet 2-wire 24 V Relay, PLC 100 V 12 V F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 10 16 20 25 32 3-wire (NPN) 3-wire (PNP) 24 V IC circuit 16 20 25 32 5 V, 12 V Diagnostic
F7BWV F7BAV 200 V 100 V 12 V Relay, PLC 2-wire 24 V Connector 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit Grommet 2-wire 12 V Connector Relay, PLC 3-wire (NPN) 3-wire (PNP) Yes 24 V Diagnostic indication (2-color indication) 5 V, 12 V IC circuit Grommet 2-wire Water resistant (2-color indication) 12 V 4-wire (NPN) With diagnostic output (2-color indication) 5 V, 12 V IC circuit
F7BWV F7BAV 200 V 100 V 12 V Relay, PLC 2-wire 24 V Connector 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit Grommet 2-wire 12 V Connector Relay, PLC 3-wire (NPN) 3-wire (PNP) Yes 24 V Diagnostic indication (2-color indication) 5 V, 12 V IC circuit Grommet 2-wire Water resistant (2-color indication) 12 V 4-wire (NPN) With diagnostic output (2-color indication) 5 V, 12 V IC circuit