CY1

Model CY1H10 CY1H15 CY1H20 CY1H25 CY1HT25 CY1HT32 Screw size M6 x 1.0 M4 x 0.7 M5 x 0.8 M8 x 1.25 Bolt dimensions Dimension t l-9 l-7 l-8 l-8 l-12 Nm 4.4 1.37 2.65 13.2 Fastening torque {kgfm} 0.45 0.14 0.27 1.35 Square nut l t 4.

Electric Actuator/Slider Type

Table Displacement (Reference Value) W L 0.08 LEFS32 (L = 30 mm) 0.06 Displacement [mm] LEFS25 (L = 25 mm) 0.04 LEFS16 (L = 20 mm) LEFS40 (L = 37 mm) 0.02 0 0 22.5 [100] 44.9 [200] 67.4 [300] 89.9 [400] 112.4 [500] Load W lbf [N] Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

Rotary Actuator

E L L K K D B C G G D B C N N T T 24 (30) 1 M M 25.5 2 x R (34.5: Connector type) Auto switch 2 x R Y Y W Auto switch CDRB2BW20/30-=S/D CDRB2BW40-=S/D W W 60o(69o) 2 8 8 z15 32.5o 1. The length is 24 when any of the following auto switches are used: D-90/90A/S99(V)/T99(V)/S9P(V) 65o The length is 30 when any of the following auto switches are used: 4 R22.5 D-97/93A 2.

Sine Rodless Cylinder Series REA/REB

10 10 REAH20 16 16 13 13 REAH25 25 M3 REAHT25 W REAHT32 40 W M1 M2 Static Moment Moment generated by the workpiece mass even when the cylinder is stopped Pitch moment M1 = WL Yaw moment M3 = W (L A) Roll moment M2 = WL (mm) Model REAH10 REAH15 REAH20 REAH25 REAHT25 REAHT32 A 15 17.5 19.5 23.5 0 0 L L A L M2 M1 M3 Since there are 2 guides, the guides central axis and the cylinders

7.5

F1 Release pressure side filter y t r q e u w !

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W F R L T B None Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

smcmaintenancepartslist

For 80 and 100, remove the seal retainer and lock piston seal. q i u r y w y L o t e !

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

Air Cylinder Series CM2

-H -R -W N L Stroke Axial foot style: CBM2L Bore size LH B 4 x LD 2 x LC LT X Y Y X LS + Stroke Z ZZ + Stroke LZ LX -H -R -W N L Stroke N L Stroke Head side flange style: Rod side flange style: CBM2F Bore size -H -R -W CBM2G Bore size 4 x FD Mounting hole C2 2 x FD Mounting hole FY B FX FZ Z + Stroke FT FT Z 20 to 32 40 -H -R -W N L Stroke Single clevis style: CBM2C Bore size CD U L RR CX

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ L plug connector (L): VQZ22(R)-L-C4/C6/M5 DIN terminal (Y): VQZ22(R)-Y-C4/C6/M5 VZ VS Indicator light 84 300 VFN (Lead wire length) 30.5 <35.5> 87 Max. 10 Applicable cable O.D. 3.5 to 7 Pg.7 Cover diameter 1.5 Cross section 0.23 mm2 Indicator light < >: AC 61.5 M plug connector (M): VQZ22(R)-M-C4/C6/M5 54 36 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 300 89 78 Indicator

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Model CY1H15 CY1H20 CY1H25 CY1HT25 CY1HT32 CY1H10 Thread size M6 x 1.0 l-9 M4 x 0.7 l-7 M5 x 0.8 l-8 M8 x 1.25 l-12 Bolt dimensions l-8 Dimension t Nm 4.4 1.37 2.65 13.2 Tightening torque Square nut l t 4.

Rotary Actuator/Vane Style Series CRB2

10 15 T99 L CDRB2 W F 180 S With auto switch Size: 10, 15 CDRB2 W B 180 S T79 L With auto switch Size: 20, 30, 40 Size Made to Order Refer to the table below for details.

0.55

Tightening Torque of Mounting Screw Symbol 1 2 VP344 1/8 1/4 VP544 1/4 3/8 VP744 3/8 1/2 9 Gasket HNBR VP700-217-1 VP300-217-1 VP500-217-1 VP300-202-l VP700-202-l VP500-202-l 10 Sub-plate Aluminum die-casted M3: 0.8 Nm M4: 1.4 Nm M5: 2.9 Nm Hexagon socket head bolt (1 pc.)

Possible to transfer a workpiece at low-speed.

Shortened shaft Reversed shaft W W XA11 W W W W W XA12 W W XA13 W W W W XA14 W 10, 15 20, 30, 40 XA15 XA16 XA17 W 10, 15 10, 15, 20, 30, 40 XA18 W W W 10, 15, 20, 30, 40 10, 15 W W W W W XA20 XA21 W Stepped round shaft with double-sided chamfer 10, 15 XA22 Stepped round shaft with double-sided chamfer Right-angle chamfer Double key 20, 30, 40 Combination Chart of Made

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

Air Cylinder

N L ZZ + Stroke LS + Stroke N L CBM2G Bore size Stroke A Head flange: * -H -R -W Rod flange: CBM2F Bore size Stroke A * -H -R -W N L Z + Stroke Single clevis: CBM2C Bore size Stroke A -H -R -W N L Double clevis: CBM2D Bore size Stroke A -H -R -W N L ZZ + Stroke Z + Stroke + 1.2 0 + 1.2 0 ZZ + Stroke Z + Stroke + 1.2 0 + 1.2 0 CBM2U Bore size Stroke A Rod trunnion: * -H -R -W N L CBM2T

ZR

length 0.6 (3.0) m 27 (L) Lead wire length 0.6 (3.0) m D1 D2 50 60 D1 100 VAC ( Hz) 50 60 D2 110 VAC ( Hz) 26 (L) Lead wire length 0.6 (3.0) m D3 67 (L) Lead wire length 0.6 (3.0) m Pilot valve Electrical entry Vacuum switch electrical entry (E) Air operated Nil For 24, 12, 6, 3 VDC Nil DC: 1 W (With indicator light: 1.05 W) AC Nil L Lead wire length 0.6 m Grommet type Lead wire length 3.0

CJ2

Bore l Part No.

CJ2

Applicable bore (mm) Round type MM A D L R N W Flat type Applicable bore (mm) TDH10 TC TH TT TU TK TV TN TW TX TY TZ Part no.

4 Port Solenoid Valve Series VQD1000

) U W M5 x 0.8 U W 633 4 port direct operated poppet solenoid valve 10-VQD1000 Dimensions L plug connector: 10-VQD1121-L-M5 M plug connector: 10-VQD1121-M-M5 Lead wire length 300 mm 2-M5 x 0.8 4(A), 2(B) port Direct manual override Indicator light 0.5 0.5 4 (11) 11 2 5.5 0.6 0.6 15 5.3 5.3 13 34 33 25.5 29 6 3 L plug connector (L) 21.5 4 2-3.5 mounting hole 28.5 49 50.5 2-M5 x 0.8 1 (P),