High Purity Fluoropolymer

Description Replacement parts Tubing outside diameter Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 4 04 04 04 04 6 06 06 06 8 08 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type

CNA

D-A44 D-A44C G 1/2 (Applicable cable O.D. 6.8 to 11.5) Auto switch HW A 49.5 B G 1/2 (Applicable cable O.D. 6.8 to 11.5) Hs 31.5 56 A 36 B 36 Auto switch Auto Switch Mounting Height Proper Auto Switch Mounting Position D-G59F D-F59F D-G5W D-K59W D-G5BAL D-G5 D-K59 D-G5NTL D-F5 D-J5 D-B5/B64 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G5BAL D-G59F Auto switch model D-B59W D-A59W D-F5NTL Auto

CNA

D-A44 D-A44C G 1/2 (Applicable cable O.D. 6.8 to 11.5) Auto switch HW A 49.5 B G 1/2 (Applicable cable O.D. 6.8 to 11.5) Hs 31.5 56 A 36 B 36 Auto switch Auto Switch Mounting Height Proper Auto Switch Mounting Position D-G59F D-F59F D-G5W D-K59W D-G5BAL D-G5 D-K59 D-G5NTL D-F5 D-J5 D-B5/B64 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G5BAL D-G59F Auto switch model D-B59W D-A59W D-F5NTL Auto

ISO Standard Hydraulic Cylinder

Auto switch models Bore size (mm) 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59 D-F5W/J59W D-F5BA/F59F/F5NT D-A5/A6/A59W D-Z7/Z80 BS5-125 BMB5-032 BA7-040 BA7-040 BA7-063 CHQ CHK BT-12 BT-03 BT-04 BT-04 BT-06 CHN BS4-125 BMB4-032 BA4-040 BA4-040 BA4-063 Note 1) D-A5/A6/A59W cannot be mounted to 40, 50.

Tie-rod Type Hydraulic Cylinder

No. 1 1 Size M4 x 0.7 x 8L BTBT-03, BT-04, BT-05 BT-06, BT-08, BT-12 D-A5, A6 D-F5, J5 D-Z7, Z8 D-Y5, Y6, Y7 BA4-040, BA4-063, BA4-080 BMB4-032, BMB4-050 2 Set screw M4 x 0.7 x 6L 2 BMB5-032 BA7-040, BA7-063, BA7-080 D-A9 D-M9 BBA1 D-A5, A6 D-F5, J5 BT-16, BT-18A, BT-20 BS4-125, BS4-160 BS4-180, BS4-200 BS5-125, BS5-160 BS5-180, BS5-200 D-Z7, Z8 D-Y5, Y6, Y7 When D-F5BA and G5BA auto switches

Vacuum System Peripherals:

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D-K39A D-A44A D-H7W D-H7BAL D-H7F D-G5NTL D-C73C D-C80C D-H7 D-H7C D-B5 D-B6 D-B59W MGG MGC A 1(0) 1(0) 2(0) 7 B 0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B A B 1.5(0) 1.5(0) B 0(0) 0(0) 1(0) 6 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 A B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5 72 75.5

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.

CLA

~~ , A 00) 0(0) 0 (2.5) 2(6) 4(7. 5) ~ , 40 D-AG 43.5 49 55.5 3 D-AS 1(0 1(0) 5(1.5 I O{S.5) 8(4 3t 35 42 so 57 .5 ~ Ht A 00) 00) 0(2.5 26 417 .5) D-A3 B !

Speed Controller with Uni One-touch Fitting AS Series

AS-D Bore size AS-T U01 Uni Uni Uni Uni 1 8 1 4 3 8 1 2 U02 U03 U04 ASP ASN Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

-fl Seies

O-ring O, @, O Non plug-in type ME263LR-o2-1 Plug-in type Conneclor lead wires With terminal block. o @ End plate (kit) asJY ME272LR-02-1 End Plate (U) lD, End plate (D) (D ,Clamp O ' O o-rins G), O, O, O. Non plug-in type 1!

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

O-ring O, @, O Non plug-in type ME263LR-o2-1 Plug-in type Conneclor lead wires With terminal block. o @ End plate (kit) asJY ME272LR-02-1 End Plate (U) lD, End plate (D) (D ,Clamp O ' O o-rins G), O, O, O. Non plug-in type 1!

Series IDG

8, 1/4 1/2 3/8, 1/2 0.25 (0.31) 0.43 (0.51) 0.66 (0.76) 0.74 (0.87) 0.77 (0.90) 1.50 (1.65) 1.50 (1.65) 1.55 (1.70) Note 1) With no freezing.

IDG

IDG60S to IDG100S IDG3 to IDG50 IDG3H to IDG50H IDG30L, IDG50L Port size Symbol Bore Size V IDG60 to IDG100 IDG60H to IDG100H IDG60L to IDG100L 3 5 10 20 30 50 60 75 100 01 1/8 02 1/4 IDG60S to IDG100S Note) Note) 03 3/8 04 1/2 Note 1) Element service indicator is also available. Refer to Made to Order Specifications on page 14-19-48.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A A B C D E F A B C D A B C D A B C D A B C D Tubing O.D. PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

5 Port Solenoid Valve SY Series

SGP10A x 1 m AS420-03 AN200-02 Series CS1 SGP10A x 1 m AS420-03 AN300-03 SY9120-03 Tubing bore x Length Speed controller Silencer SY7140-03 Tubing bore x Length Speed controller Silencer SY9140-04 Tubing bore x Length Speed controller Silencer SGP15A x 1 m AS420-04 AN400-04 Features 1 Valve Variations Note 1) Electrical entry Actuation Voltage Light/surge voltage suppressor 2 position 3

DOC1003626

Fig.1-3 shows the location of the communication port. 14 1 Contact input / output signal connector D sub 25 female pin (socket) type 25 13 1 6 Serial communication connector D sub 9 female pin (socket) type 9 5 Fig.1-3 Communication port HRS400-A-46 1.3 Communication port 1-5 DOC1003626 Chapter 1 Read before using 1.4 Touch panel flow Press the [Comm.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

(UL standard V-0) Applicable model: ASV310F, ASV410F, ASV510F Inch size Note) Elbow: M3, M5 only Port size AS 04 06 08 10 12 03 07 09 11 13 M3 M5 U10/32 01 02 03 04 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 With One-touch fitting Thread type ASP Brass parts are all electroless nickel plated.

Modular Type Air Filter Series AF

Body size C With bowl guard AF20 Port size M5 1/8 1/4 3/8 1/2 3/4 1 AF10 to 60 Symbol 10 20 30 40 50 60 Note 5) Drain guide 1/4 AF30 to 60 N Note 1) Float type Note 4) auto drain (N.O.) M5 01 02 03 04 06 10 D AF30 to 60 Flow direction: Right to left AF10 to 60 F Note 2) Note 3) Bracket is not assembled and is supplied loose at the time of shipment.

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15