VQC

1 D-side end plate assembly part no.

LVQ

Metric sizes Inch sizes Body Class Type LQ-GP J PAX 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 4 04 04 04 04 6 06 06 06 8 08 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J PB Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin

H/DL/L/LL

(mm) Connection thread R Model Effective area (mm 2) Weight (g) A L2 M L1 1 8 4 L04-01 33 10 21.8 30.9 15 3.5 32.7 10 14 10 1 4 1 8 L04-02 L06-01 40 36 14 10 34.9 30.9 34.7 33.8 Applicable tubing 1 4 3 8 1 8 6 L06-02 L06-03 L08-01 43 55 46 12 10 14 35.8 37.5 36 9 21.8 34.9 36.9 31.9 16 14 17 12 1 4 3 8 1 4 L08-02 L08-03 L10-02 52 61 68 8 14 12 17 38 39.7 40.7 19 23.3 35.9 37.9 36.9 16 14

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Metric size Inch size 100 200 205 M5 standard 1/8 standard 1/4 standard 3.2 4 6 8 23 04 06 08 01 03 05 07 09 1/8" 5/32" 3/16" 1/4" 5/16" Use 1/8" tube.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

High Purity Fluoropolymer

Description Replacement parts Tubing outside diameter Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 4 04 04 04 04 6 06 06 06 8 08 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

1 4 std. 3 8 std. 3 4 1 std. 1 std. 1 2 2 std. 2 3 5 6 8 9 B With bracket 1 Male thread D Drain piping (Except AMC220) (1) (2) 2 Female thread Note 1) Female thread: Available only AMC220, 320, 520.

Industrial Filters

Applicable model 84 84 03 FGD-CV002-04 06 03 FGD-CV003-04 06 03 FGD-CV004-04 06 03 FGD-CV001-04 06 32 32 FGDT/F FGDT/F FGDC/E FGDC/E Note 1) Same as standard product except for cover assembly Note 2) 03, 04, and 06 indicate the relevant port sizes (Rc3/8, 1/2, 3/4).

ZP

A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U C ZPT16 U C 19.5 6.2 8 6 3.3 32 6.5 40 43 18.5 10 12 1.7 12 3 27 21 21 33 7.5 3.8 50 53 6.2 12 5 8 8 6 13 15 1.8 12.5 3.5 27.5 21.5 21.5 16 18 1.2 Deep Deep 1 8 B C D D E Y F: M6 x 1 F: M8 x 1.25 D F: Rc Model A 1 8 D G F: Rc Y B C E D G E D G F: M5 x 0.8 F: M6 x 1 E Model A ZPT40D 40 43 29 6 8 6.2 17 42.5 ZPT10D ZPT16D 10 16 12 18 15 16

ZP

58.1 84 74 4.5 2.3 Deep Deep Model A B C D E F Y G H G H I: M6 x 1 I: M8 x 1 Model A B C D E F Y G H G H I: M6 x 1 I: M8 x 1 ZPR40D 40 43 29 42.5 53.3 71.1 97 25 15 87 17 ZPR25D 25 28 20 35 48.5 63.6 89.5 25 15 79.5 10 Applicable Tubing Applicable Tubing Applicable tubing O.D.

ZP

13 14 1 ZPY16CT 16 17 Dimensions of D, E are the same.

3 Port Solenoid Valve/

Valve with Detection of Main Valve Position VP500/700-X536, X538, X555 How to Order Residual pressure release valve VP X536 2 5 4 5 Z R D 1 03 M X538 VP 4 1 5 4 R 5 D Z 03 M A Dual residual pressure release valve Dual residual pressure release X555 VP 4 1 5 4 5 D Z 03 M valve with soft start-up function Throttle Thread Series Nil Variable throttle 10 1 fixed orifice 15 1.5 fixed orifice 20

Electric Actuator

Size Order no. 22 16 25 32 LE-D-2-1 LE-D-2-2 LE-D-2-3 $1 Component Parts No. Description Description Note 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 No.

Plug-in/Plug Lead: Single Unit

for metal seal 3 position type 2-6-7 Series VQ5000 Base Mounted Plug Lead Unit: C Kit (Connector Kit) How to Order Manifold C W VV5Q 5 5 08 03 Series Option 5 VQ5000 Option None Exhaust cleaner for Rc 1: D side exhaust Exhaust cleaner for Rc 1 1/2: D side exhaust Exhaust cleaner for Rc 1: U side exhaust Exhaust cleaner for Rc 1 1/2: U side exhaust Symbol Nil CD1 CD2 CU1 CU2 SB SD SU W Manifold

Vacuum Pad

(Refer to Fig. 1.) Vacuum generator side Vacuum generator side Name plate Enlarged view of name plate (Vacuum generator side) No.0.8 ZP2V-A5-03 G MP MADE IN JAPAN Pad side Pad side Fig. 1.

Vacuum Pad

(Refer to Fig. 1.) Vacuum generator side Vacuum generator side Name plate Enlarged view of name plate (Vacuum generator side) No.0.8 ZP2V-A5-03 G MP MADE IN JAPAN Pad side Pad side Fig. 1.

Vacuum Pad

(Refer to Fig. 1.) Vacuum generator side Vacuum generator side Name plate Enlarged view of name plate (Vacuum generator side) No.0.8 ZP2V-A5-03 G MP MADE IN JAPAN Pad side Pad side Fig. 1.

Vacuum Pad

(Refer to Fig. 1.) Vacuum generator side Vacuum generator side Name plate Enlarged view of name plate (Vacuum generator side) No.0.8 ZP2V-A5-03 G MP MADE IN JAPAN Pad side Pad side Fig. 1.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

L1 D L2 L3 L4 L5 L6 L8 Model Port size AS2000E-01 4.5 16 57 61.5 15.5 10 17 30 5 40 1/8 AS2000E-02 4.5 20 59 63.5 17 12 23 30 5 40 1/4 AS3000E-02, 03 5.5 26 69 76 20.6 13.25 25 45.5 5.25 56 1/4, 3/8 AS4000E 2-1/4 to 1/2 72 (Max. 80) Effective thread depth 6 15-9-42 Flow Control Equipment Precautions Be sure to read before handling.

SJ3A6

Ordering example (SS3J3-V60-l) With plug (24 VDC) SJ3A6N-5MZ-P (2 sets) With plug (24 VDC) SJ3A6N-5MZ-DP (4 sets) SUP/EXH block (D side mounting) 1 3 2 D side U side Stations SS3J3-V60-06D 1 set (Manifold part no.) SJ3A6N-5MZ-DP 4 sets (With plug part no.) SJ3A6N-5MZ-P 2 sets (With plug part no.) The asterisk denotes the symbol for assembly.