SMC Corporation of America
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Port size M5 x 0.8 10-SY3000 SY3000-39-2A(-Q) 10-SY5000 SY5000-39-16A(-Q) 10-SY7000 SY7000-39-16A(-Q) Series Assembly part no.

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Seal belt Dust seal band Scraper Piston seal Cushion seal Tube gasket O-ring O-ring Special resin MY16-16A-Stroke MY25-16A-Stroke MY32-16A-Stroke MY40-16A-Stroke MY50-16A-Stroke MY63-16A-Stroke MY20-16B-Stroke Stainless steel NBR NBR NBR NBR NBR NBR MY16-16B-Stroke MY25-16B-Stroke MY32-16B-Stroke MY40-16B-Stroke MY50-16B-Stroke MY63-16B-Stroke MYM20-15AK0501 MYM16-15AK0500 MYM25-15AA5903

9 @0 50 20 25 32 40 63 Description Material 16 Qty. 1 1 2 2 2 2 2 4 2 Seal belt Dust seal band Scraper Piston seal Cushion seal Tube gasket O-ring O-ring Side seal assembly Special resin MY20-16A-Stroke MY25-16A-Stroke MY32-16A-Stroke MY40-16A-Stroke MY50-16A-Stroke MY63-16A-Stroke MY16-16A-Stroke Stainless steel NBR NBR NBR NBR NBR NBR MY20-16B-Stroke MY25-16B-Stroke MY32-16B-Stroke MY40

Seal belt Dust seal band Scraper Piston seal Cushion seal Tube gasket O-ring O-ring Special resin MY16-16A-Stroke MY25-16A-Stroke MY32-16A-Stroke MY40-16A-Stroke MY50-16A-Stroke MY63-16A-Stroke MY20-16B-Stroke Stainless steel NBR NBR NBR NBR NBR NBR MY16-16B-Stroke MY25-16B-Stroke MY32-16B-Stroke MY40-16B-Stroke MY50-16B-Stroke MY63-16B-Stroke MYM20-15AK0501 MYM16-15AK0500 MYM25-15AA5903

9 @0 50 20 25 32 40 63 Description Material 16 Qty. 1 1 2 2 2 2 2 4 2 Seal belt Dust seal band Scraper Piston seal Cushion seal Tube gasket O-ring O-ring Side seal assembly Special resin MY20-16A-Stroke MY25-16A-Stroke MY32-16A-Stroke MY40-16A-Stroke MY50-16A-Stroke MY63-16A-Stroke MY16-16A-Stroke Stainless steel NBR NBR NBR NBR NBR NBR MY20-16B-Stroke MY25-16B-Stroke MY32-16B-Stroke MY40

Description Qty. 1 1 Seal belt Dust seal band Note) MY63-16A-Stroke MY20-16A-Stroke MY25-16A-Stroke MY32-16A-Stroke MY40-16A-Stroke MY50-16A-Stroke MY16-16A-Stroke 12 MY63-16B-Stroke KA00777 MY20-16B-Stroke KA00311 MY25-16B-Stroke KA00311 MY32-16B-Stroke KA00320 MY40-16B-Stroke KA00402 MY50-16B-Stroke KA00777 MY16-16B-Stroke KA00309 (4 x 1.8 x 1.1) 13 O-ring 2 18 (5.1 x 3 x 1.05) (5.1

15.9 15.6 44.7 24.1 15.6 41.5 32.8 7.5 6 12 16 KQ2R12-16A 18.5 18.2 45.7 25.1 17 58.3 46.1 9 7 Release button dimensions X X 1: D is maximum diameter.

Note ) 2 position double and 3 position cannot be mounted. 40.6 3(R2) 5(R1) P1 Po 1(P) Circuit diagram Plug-in type Plug lead type SUP blocking plate VVQ5000-16A-1 EXH blocking plate VVQ5000-16A-2 18.5 20.2 When 2 or more different pressures are supplied to one manifold, blocking plates are installed between stations under different pressures. 28.8 44.6 R P R R P R R P R SUP/EXH passages

Seal type 3 A B 0 1 Metal seal Rubber seal EAPEB 3-position exhaust center A B 4 P EA EB Note 1) For metal seal type only. 3-position pressure center Note 2) When specifying more than one option, enter symbols in alphabetical order. 5 A B EB P EA Manifold Options Blanking plate with connector VVQ1000-1C(VQC1000 only) SUP block plate VVQ1000-16A VVQ2000-16A Blanking plate assembly VVQ1000-

A, H DimenSions when Mounting a Single/Double Knuckle Joint together with a Rod End Nul H, Applicable knuckle joint part number ~bol B~ L, H, H A I type single knuckle sIZe (mm) Ytype double knuckle " Bore size (mm) A H 125 3.5 100 1-12A Y-12A 50 156.5 110 125 65 125 ~ 140 3.5 105 1-14A Y-14A 50 161.5 110 140 65 125 160 1-16A Y-16A 56 3.5 110 170.5 120 160 76 140 11 ., Ie 'I.'"

Individual EXH spacer + EXH block base ass'y Valve + EXH block base ass'y SUP block plate VVQ1000-16A When high and low pressures are simultaneously supplied to one manifold, a block plate is inserted between stations under different pressures. Specify the number of stations by using a manifold specification form.

XLF is a normally closed, single acting high vacuum angle valve with an O-ring shaft seal.  The XL* family shares common features with all series members.  Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body.  The body offers excellent resistance to fluorine corrosion. 

XLF is a normally closed, single acting high vacuum angle valve with an O-ring shaft seal.  The XL*-2 family shares common features with all series members.  Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body.  The body offers excellent resistance to fluorine corrosion. 

(For the XLF and XLG it is from 1 x 10-5 to atmospheric pressure.)
Positive pressure is up to atmospheric pressure. Compressed fluid exceeding atmospheric pressure cannot be used.
Note) There are some XLG series special order products that can be used with positive pressure. Contact your local SMC sales representative for details.

XLF is a normally closed, single acting high vacuum angle valve with an O-ring shaft seal.  The XL* family shares common features with all series members.  Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body.  The body offers excellent resistance to fluorine corrosion. 

Part Number Description: EXTERNAL SEAL   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 684   Family Description: XLF HIGH VACCUM VALVE   Class Code: 21   Part Code: 2   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 684   Family Description: XLF HIGH VACCUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 684   Family Description: XLF HIGH VACCUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number