XLF is a normally closed, single acting high vacuum angle valve with an O-ring shaft seal. The XL*-2 family shares common features with all series members. Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion.
MY1 Description Material Special resin Seal belt MY16-16A-Stroke MY20-16A-Stroke MY25-16A-Stroke MY32-16A-Stroke MY40-16A-Stroke MY50-16A-Stroke MY63-16A-Stroke 1 !6 Stainless steel NBR NBR NBR NBR NBR NBR MY16-16B-Stroke MY20-16B-Stroke MY25-16B-Stroke MY32-16B-Stroke MY40-16B-Stroke MY50-16B-Stroke MY63-16B-Stroke 1 Dust seal band !
MY3A16-16A-st MY3A20-16A-st MY3A25-16A-st MY3A32-16A-st MY3A40-16A-st MY3A50-16A-st MY3A63-16A-st MY3B16-16A-st MY3B20-16A-st MY3B25-16A-st MY3B32-16A-st MY3B40-16A-st MY3B50-16A-st MY3B63-16A-st st + 206 st + 225 st + 246 st + 289 st + 336 st + 370 st + 416 st + 218 st + 245 st + 274 st + 321 st + 372 st + 406 st + 452 MY3A MY3B (Note 1) Refer to Dust Seal Band Replacement Procedure for
For details, refer to page 126. 34 MXQA Series Dimensions: MXQ 16A [Standard] MXQ 16A-mZ Standard type *1 If long bolts are used, they may touch the guide block and cause a malfunction, etc. Use a screw which has an intermediate length between the maximum screw-in depth and minimum screw-in depth.
Special resin Stainless steel 15 1 MY40-16A-Stroke MY50-16A-Stroke MY25-16A-Stroke MY63-16A-Stroke Seal belt MY20-16A-Stroke MY32-16A-Stroke MY16-16A-Stroke Note) 1 MY40-16B-Stroke MY50-16B-Stroke MY25-16B-Stroke MY63-16B-Stroke Dust seal band MY20-16B-Stroke MY32-16B-Stroke MY16-16B-Stroke 16 27 31 32 33 34 48 Scraper Piston seal Cushion seal Tube gasket O-ring O-ring NBR NBR NBR NBR NBR
This is a legacy product, and replaced byXLF-16A-2
Port size M5 x 0.8 SY3000 SY3000-39-2A(-Q) SY5000 SY5000-39-16A(-Q) SY7000 SY7000-39-16A(-Q) Series Assembly part no.
SUP passage blocked (VVQ0-16A-5-P) EXH passage blocked (VVQ0-16A-5-R) SUP/EXH passage blocked (VVQ0-16A-5-PR) Name plate [-N] VVQ0-N5-Station (1 to Max. stations) When ordering assemblies incorporated with a manifold, add suffix N to the manifold no. It is a transparent resin plate for placing a label that indicates solenoid valve function, etc.
Note ) 2 position double and 3 position cannot be mounted. 40.6 3(R2) 5(R1) P1 Po 1(P) Circuit diagram Plug-in type Plug lead type SUP blocking plate VVQ5000-16A-1 EXH blocking plate VVQ5000-16A-2 18.5 20.2 When 2 or more different pressures are supplied to one manifold, blocking plates are installed between stations under different pressures. 28.8 44.6 R P R R P R R P R SUP/EXH passages
Standard (Valve mounting screw without drop prevention) Drop prevention type valve mounting screw SY3000 Internal pilot SY30V-16A SY30V-16A-1 External pilot SY30V-16AR SY30V-16AR-1 SY5000 Internal pilot SY50V-16A SY50V-16A-1 External pilot SY50V-16AR SY50V-16AR-1 SY7000 Internal pilot SY70V-16A SY70V-16A-1 External pilot SY70V-16AR SY70V-16AR-1 The part number is not indicated on the product
MY1B32 MY40-16A-Stroke MY1B40 MY1B25 MY32-16A-Stroke MY1B16 MY1B20 MY25-16A-Stroke MY16-16A-Stroke MY20-16A-Stroke 14 Seal belt 1 MY40-16B-Stroke MY32-16B-Stroke MY25-16B-Stroke MY16-16B-Stroke MY20-16B-Stroke 15 Dust seal band 1 MYB40-15BA5902B MYB32-15BA5901B MYB25-15BA5900B MYB20-15CA7164B 27 Side scraper 2 KA00320 KA00320 KA00311 KA00309 KA00309 34 O-ring 2 (7.15 x 3.75 x 1.7) (7.15
(Refer to pages 482 to 485.) 26.4 48.7 5(R1) 3(R2) 3/8 SUP port 54.5 P1 Po 1(P) 25 13.5 Circuit diagram Po Plug-in type Plug lead type SUP/EXH block plate VVQ4000-16A (1 pc.
MY1B32 MY40-16A-Stroke MY1B40 MY1B25 MY32-16A-Stroke MY1B16 MY1B20 MY25-16A-Stroke MY16-16A-Stroke MY20-16A-Stroke 14 Seal belt 1 MY40-16B-Stroke MY32-16B-Stroke MY25-16B-Stroke MY16-16B-Stroke MY20-16B-Stroke 15 Dust seal band 1 MYB40-15BA5902B MYB32-15BA5901B MYB25-15BA5900B MYB20-15CA7164B 27 Side scraper 2 KA00320 KA00320 KA00311 KA00309 KA00309 34 O-ring 2 (7.15 x 3.75 x 1.7) (7.15
[mm] Model D1 D2 L Weight [g] 8 KQ2C-08A 12.8 9.2 2.6 0.1 10 KQ2C-10A 15.2 11.2 2.7 0.1 12 KQ2C-12A 17.6 13.2 2.7 0.1 16 KQ2C-16A 22.4 17.2 3.2 0.2 Applicable tubing O.D.
Port size M5 x 0.8 10-SY3000 SY3000-39-2A(-Q) 10-SY5000 SY5000-39-16A(-Q) 10-SY7000 SY7000-39-16A(-Q) Series Assembly part no.
9 @0 50 20 25 32 40 63 Description Material 16 Qty. 1 1 2 2 2 2 2 4 2 Seal belt Dust seal band Scraper Piston seal Cushion seal Tube gasket O-ring O-ring Side seal assembly Special resin MY20-16A-Stroke MY25-16A-Stroke MY32-16A-Stroke MY40-16A-Stroke MY50-16A-Stroke MY63-16A-Stroke MY16-16A-Stroke Stainless steel NBR NBR NBR NBR NBR NBR MY20-16B-Stroke MY25-16B-Stroke MY32-16B-Stroke MY40
Description Qty. 1 1 Seal belt Dust seal band Note) MY63-16A-Stroke MY20-16A-Stroke MY25-16A-Stroke MY32-16A-Stroke MY40-16A-Stroke MY50-16A-Stroke MY16-16A-Stroke 12 MY63-16B-Stroke KA00777 MY20-16B-Stroke KA00311 MY25-16B-Stroke KA00311 MY32-16B-Stroke KA00320 MY40-16B-Stroke KA00402 MY50-16B-Stroke KA00777 MY16-16B-Stroke KA00309 (4 x 1.8 x 1.1) 13 O-ring 2 18 (5.1 x 3 x 1.05) (5.1
MY25-16A-Stroke MY32-16A-Stroke MY40-16A-Stroke MY50-16A-Stroke MY63-16A-Stroke 12 MY16-16A-Stroke MY20-16B-Stroke MY25-16B-Stroke MY32-16B-Stroke MY40-16B-Stroke MY50-16B-Stroke C4 MY63-16B-Stroke C4 13 MY16-16B-Stroke O-ring Side seal assembly Scraper Piston seal Cushion seal Tube gasket O-ring 5.1 x 3 x 1.05 5.1 x 3 x 1.05 7.15 x 3.75 x 1.7 8.3 x 4.5 x 1.9 18 4 x 1.8 x 1.1 MYMK-20-Stroke
Seal belt Dust seal band Scraper Piston seal Cushion seal Tube gasket O-ring O-ring Special resin MY16-16A-Stroke MY25-16A-Stroke MY32-16A-Stroke MY40-16A-Stroke MY50-16A-Stroke MY63-16A-Stroke MY20-16B-Stroke Stainless steel NBR NBR NBR NBR NBR NBR MY16-16B-Stroke MY25-16B-Stroke MY32-16B-Stroke MY40-16B-Stroke MY50-16B-Stroke MY63-16B-Stroke MYM20-15AK0501 MYM16-15AK0500 MYM25-15AA5903
Seal belt Dust seal band Scraper Piston seal Cushion seal Tube gasket O-ring O-ring Special resin MY16-16A-Stroke MY25-16A-Stroke MY32-16A-Stroke MY40-16A-Stroke MY50-16A-Stroke MY63-16A-Stroke MY20-16B-Stroke Stainless steel NBR NBR NBR NBR NBR NBR MY16-16B-Stroke MY25-16B-Stroke MY32-16B-Stroke MY40-16B-Stroke MY50-16B-Stroke MY63-16B-Stroke MYM20-15AK0501 MYM16-15AK0500 MYM25-15AA5903