ZR

Individual spacer (ZR1-R1-2) PV V X X PD X X 110.5 105.5 X PV V 70.5 SMC 16.5 X PD 12 V V 35.5 (Pitch) 33 (Pitch) 33 35.5 PV PD EXH PS Rc 1/8 V port Vacuum port 13-3-33 33 Large Size Vacuum Module: Vacuum Pump System Series ZR How to Order Combination of vacuum switch valve and release valve Refer to Table (1).

0.55

Manual override 42 30 20.5 2 x 7.2 (For mounting) 23.5 NC 122.3 83.8 41.1 3R 60 33 1P NO 3/8 1(P), 3(R) port PE port (Pitch) P = 33 31 (3.8) 7.5 L2 L1 Refer to page 24 separately when piping to PE port is required.

VFS

01 02 2 position double: VFS2200-F-01 02 3 position closed center: VFS2300-F-01 02 3 position exhaust center: VFS2400-F-01 02 3 position pressure center: VFS2500-F-01 02 2-5 mounting hole Manual override 150.5 (3 position: 158) (Non-locking) 2-5 mounting hole Manual override (Non-locking) With light/surge voltage suppressor 163.5 (3 position: 171) With light/surge voltage suppressor 1 8 (

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External Pilot Solenoid Type (Conduit terminal) A B C D E F G H I J K L M N O Model SGH130-10 SGH230-3015 SGH230-7015 SGH330-3020 SGH330-7020 SGH430-3025 SGH430-7025 Main port Pilot port 3 x 3/8 1/8 60 28 46 133 34 60 24 29 142 37.5 75 62 6.5 33 3 x 1/2 1/8 60 28 48 135 34 65 24 29 144 37.5 75 62 8.5 35 3 x 1/2 1/8 77 33 49 150 20 44.5 80 36 25 159 50 100 70 5 33 3 x 3/4 1/8 77 33 53 154

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

11 33 11.

Vacuum Module Series ZX

(VJ114) Suction filter Equipment ZX100-K15LZ-F (ZX1-F) Plug connector type With light/surge voltage supressor N.C. (VJ114) N.C. (VJ314) Connector type ZX100-K15LZ-EC 24 VDC Vacuum switch (ZSE2) ZX100-K35MZ-EC The above models are for express delivery.

VQZ1000/2000/3000

25 or less 33 or less 53 or less VQZ3320 0.54 0.21 2.1 0.54 0.19 2.3 Metal seal Closed center VQZ3000 30 or less 39 or less 59 or less VQZ3321 0.62 0.33 2.4 0.66 0.30 2.7 Rubber seal 134 25 or less 33 or less 53 or less VQZ3420 0.54 0.19 2.4 0.54 0.19 2.3 Metal seal Exhaust center 3 position 30 or less 39 or less 59 or less VQZ3421 0.81 0.38 3.2 0.66 0.30 2.7 Rubber seal 25 or less 33 or

MXQ

With end lock (20): MXQ20-R Operating port 2-Rc 1/8 8 34 33 65 11.5 78.5 Other dimensions are the same as basic style.

Rotary Actuator

[mm] Note 1) Port size A B C D (g6) DD (h9) F H J K With auto switch Without auto switch U W BA BB BC CA CB Note 2) Key dimensions S SB SC SD SE S b L1 Size D50 Rc1/8 62 48 46 15 25 2.5 36 M8 1.25 depth 8 5 156 (189) 1.5 5 14.5 33 144 (177) 98 17 17 8.5 6 9.5 7.5 5 0 0.030 25 63 Rc1/8 76 60 57 17 30 2.5 41 M10 1.5 depth 12 5 175 (213.5) 1.5 5 21.5 33 163 (201.5) 117 19.5 20 10 7 11 8

CLK1

Hs (mm) Symbol BX BY D F GA GB IA K L M N S W Wc Ws Z ZZ Hs Ht Bore size 40 56 54 16 44 77 10 47 14 65 M12 x 1.5 86 122.5 5 39 27.5 124 238 45 28 50 64 64 20 55 78.5 10 58 17 58 M16 x 1.5 87.5 117 7 41 33 118.5 232.5 49 28 63 74 74 20 69 82 12 72 17 58 M16 x 1.5 91 120.5 5.5 48 39 122 236 54.5 28 Unclamp side lock (F) 3-Rc 1/4 Unclamp side port 3-Rc 1/4 Clamp side port 52 N L + Stroke Rear

Clamp Cylinder with Lock Series CLK1

Hs (mm) Symbol BX BY D F GA GB IA K L M N S W Wc Ws Z ZZ Hs Ht Bore size 40 56 54 16 44 77 10 47 14 65 M12 x 1.5 86 122.5 5 39 27.5 124 238 45 28 50 64 64 20 55 78.5 10 58 17 58 M16 x 1.5 87.5 117 7 41 33 118.5 232.5 49 28 63 74 74 20 69 82 12 72 17 58 M16 x 1.5 91 120.5 5.5 48 39 122 236 54.5 28 Unclamp side lock (F) 3-Rc 1/4 Unclamp side port 3-Rc 1/4 Clamp side port 52 N L + Stroke Rear

Guide Cylinder/Compact Type Series MGC

) (Slide bearing type) Deflection Y (mm) Deflection Y (mm) Deflection Y (mm) Deflection Y (mm) St: Stroke (mm) St: Stroke (mm) St: Stroke (mm) Allowable end load F (N) Allowable end load F (N) Allowable end load F (N) MGCM 40-R Stroke (Slide bearing type) St: Stroke (mm) Allowable end load F (N) MGCM 50-R Stroke (Slide bearing type) Deflection Y (mm) St: Stroke (mm) Allowable end load F (

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6 to 12 Applications B B 8 x 18 8 x 18 F F S S Conduit terminal: T (V) (U) E 25 32 G1/2 R T B 8 x 18 F S (mm) Electrical entry Grommet Model Applicable flange Conduit DIN terminal Conduit terminal U 103.5 106 106 B C D A E F H N Q R S N.C.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

03 Rc 1 4 Rc 3 8 T F SJ Option Mountable only for VFS3120.

Best Pneumatics Vol. 14

A B C D E F H I G Model VHS20 VHS30 VHS40 VHS40-06 VHS50 59 78 107 110 134 20 29 39 42 53 40 53 70 75 90 34 46 63 67 78 22 21 26 45 55 58 65 76 28 30 36 44 54 45 55 63 69 81 33 42 44 50 61 How to Order 30 03 RZ F VHS Residual pressure relief 3 port valve Caution 1. Pleae consult with SMC when a pressure switch and T type spacer are installed on the outlet of pressure release valve. 2.

MGG

Stroke (mm) 200st 1 300st 1 200st 100st 200st 100st 100st 75st 75st 0 0 0 0 0 0 10 20 30 40 50 60 10 20 30 40 50 20 40 60 80 100 Allowable end load F (N) Allowable end load F (N) Allowable end load F (N) MGGL 40Stroke 4 (Ball bushing type) 800st Deflection Y (mm) 3 700st 600st 2 500st 400st 1 300st st: Stroke (mm) 200st 100st 0 0 20 40 60 80 100 120 Allowable end load F (N) MGGL 50Stroke

CG5-S

M5 x 0.8 F NN MM GA GB BA CB D LH LB LY With head cover port in axial position (R) LT BB NB A NA X Y LX LZ S + Stroke Z + Stroke H 2-LC Mounting hole (mm) Bore size (mm) A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 12 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 16 15 18 18 20 20 5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8

SQ1000/2000

plate assembly u F kit L kit T kit S kit P (J) kit q !

Digital Flow Switch (Manifold type)

2 to 16 (symbol 20) 33 14 33 14 40 5 to 40 (symbol 40) 33 14 33 14 45 -64No.PF-OMW0004-B Remote sensor type (return type): PF3WR (mm) A B Flow range a (L/min) Open Close Open Close 0.5 to 4 (symbol 04) 33 14 33 14 40 2 to 16 (symbol 20) 33 14 33 14 40 5 to 40 (symbol 40) 33 14 33 14 45 -65No.PF-OMW0004-B Side view Integrated display type (Basic type): PF3WB Flow range: 0.5 to 4 L/min (symbol

Table of Contents

an accessory for the thread symbol F.