13

7.8 7.8 7.8 9.6 9.6 10.7 10.7 15.8 31.5 32.8 12 27 35 12 15.8 31.5 32.8 12 27 35 12 Screw-in connection Model A B C D E F G H Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 73.5 41.5 29.5 12 3.2 12 14.2 14.2 73.5 41.5 29.5 12 3.2 12 S type: White

PSxx-OMM0006CN

ZS-35-C X X X X X E ZS-35-D X X ZS-35-F X X X X X + F ZS-35-G X X 1/ 1 ZS-24-A A M35 L,M45 L 2 ZS-24-B B M45 L, 2 ZS-24-D D M35 L,M45 L 2 ZS-35-C (01,N01) ZS-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A D D N NPN1

JXCx-OMT0062

force F to 8 Alarm 2 8 7 to 0 Alarm 3 8 F to 0 Trigger LV F to 8 Alarm 4 9 F to 0 Sub Function 9 F to 0 Pushing speed Occupation area 10 F to 0 Address 10 F to 0 Moving force 11 F to 0 Address (always 0) 11 F to 0 Area 1 Occupation 12 F to 0 DATA (H) 12 F to 0 area 13 F to 0 DATA (L) 13 F to 0 Area 2 14 F to 0 Occupation 14 F to 0 area 15 F to 0 15 F to 0 In position 108 - 22.

Valve Single Unit

How to Order Valves 5 L N SX 5 1 20 01 Thread type Series A, B port size Nil Applicable series Rc Symbol Port size M5 x 0.8 3 SX3000 5 SX5000 G F M5 One-touch fitting for 4 C4 N 7 SX7000 NPT SX3000 One-touch fitting for 6 C6 NPTF T Type of actuation 1 8 01 1 2 position single One-touch fitting for 4 C4 Rated voltage SX5000 2 2 position double One-touch fitting for 6 C6 5 24 VDC 6 12 VDC 3

Direct Operated

Max. system pressure (MPa) Flow characteristics C[dm3/(sbar)] 0.08 0.15 0.20 0.08 0.15 N.C. 1 0.7 0.3 1 0.7 1.2 1.6 0.3 0.6 1 0.3 0.5 1.2 1.6 0.6 1 0.3 0.5 Cv 0.32 0.25 0.20 0.32 0.25 b VX311-01 VX312-01 VX313-01 VX311-02 VX312-02 VX322-02 VX332-02 VX313-02 VX323-02 VX333-02 VX324-02 VX334-02 VX322-03 VX332-03 VX323-03 VX333-03 VX324-03 VX334-03 0.29 0.60 0.82 0.29 0.60 0.7 0.4 0.2 0.7 0.4

2-Color Display High Precision

ZSE40A(F)/ISE40A-01--A ZSE40A(F)/ISE40A-N01--A With bracket 30 20 20 55 40 1.6 43.2 4.5 11.5 15 4.5 6.5 20 ZSE40A(F)/ISE40A-01--D ZSE40A(F)/ISE40A-N01--D With bracket 30 20 20 55 40 1.6 35 43.2 11.5 15 4.5 4.2 7.5 7.2 22 7 Series ZSE40A(F)/ISE40A Dimensions ZSE40A(F)/ISE40A-W1--A ZSE40A(F)/ISE40A-WF1--A With bracket 30 55 40 1.6 47.2 4.5 11.5 15 4.5 6.5 20 ZSE40A(F)/ISE40A-W1--B ZSE40A(F)

OMU0023

Instruction to perform the Return to Origin operation 4 01 05 001A FF00 01 05 001A FF00 sent. 5 01 02 004B 0001 01 02 01 Acquires the INP signal information.

Basic type / Direct mount type Series CY3B/CY3R

Displacement of Section A when force acts on Section F Displacement of Section A when force acts on Section F F A F Guide central axis (1 axis type) F For the double axis type, this is the cylinders central axis.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Approx. 600 (Lead wire length) 31.5 [38.5] 70.6 [72.8] (Light/surge voltage suppressor) 2-3.2 (For mounting) 23.5 10.9 74.2 [76.4] + 28 25 16.1 21 31.5 [38.5] 18 10 (Bracket) 3.6 1/8 (P, R port) R P 28 8 1.6 (PE port) 14.5 16 L plug connector (L): SYJ72-L-01 (-F) M plug connector (M): SYJ72-M-01 (-F) DIN terminal (D): SYJ72-D-01 (-F) M8 connector (M0): SYJ72-W0-01 (-F) Approx. 300 (Lead wire

Fieldbus system EtherCAT compatible SI Unit

50x2:0 2 Under range error 2 UNSIGNED8 Number of Channels 50x2:01 2 50x2:04 Channel 0 2 Channel 3 Enum081C 0=No error 1=Error 50x3:0 Over upper limit error UNSIGNED8 Number of Channels 50x3:01 50x3:04 Channel 0 Channel 3 Enum081C 0=No error 1=Error 50x4:0 Under lower limit error UNSIGNED8 Number of Channels 50x4:01 50x4:04 Channel 0 Channel 3 Enum081C 0=No error 1=Error 1: x = Unit

/

6 to 12 Applications B B 8 x 18 8 x 18 F F S S Conduit terminal: T (V) (U) E 25 32 G1/2 R T B 8 x 18 F S (mm) Electrical entry Grommet Model Applicable flange Conduit DIN terminal Conduit terminal U 103.5 106 106 B C D A E F H N Q R S N.C.

0.4

F None Nil IN side port size OUT side port size DIN rail mounting (For manifold) D Rc 1/8 Rc 1/4 6 one-touch fitting 8 one-touch fitting 1/4" one-touch fitting 5/16" one-touch fitting 01 02 C6 C8 N7 N9 Rc 1/8 Rc 1/4 6 one-touch fitting 8 one-touch fitting 1/4" one-touch fitting 5/16" one-touch fitting 01 02 C6 C8 N7 N9 F With bracket Name plate N Note) When two or more symbols are specified

Rubber seal 5 Port Solenoid Valve Series SYJ5000

O.D.: 4, 5/32" : 6, 1/4" (2.3) L plug connector (L): SYJ5120-L-M5(-F) M plug connector (M): SYJ5120-M-M5(-F) DIN terminal (D): SYJ5120-D-M5(-F) M8 connector (W0): SYJ5120-W0-M5(-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.1 Max. 10 60.9 28.1 [35.1] 53.4 12.7 42.1 32.6 M8 x 1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 73 [75.2] (2.3) 63.2 [65.4] 83 72.1 3

A

(E X C E S S I V E F O R C E I N T H E D I R E C T I O N O F R O TAT I O N A P P L I E D T O T H E P I S T O N R O D M AY D A M A G E T H E I N T E R N A L M E C H A N I S M.) R E F E R T O T H E F O L L O W I N G TA B L E F O R D I M E N S I O N S W I T H A R M 32/40/50/63S E R I E S MK2 T I G H T E N I N G T O R Q U E F O R M O U N T I N G.

F

F E R E N T D I A.

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

AC Servo Motor Driver (Pulse input type/Positioning type ）

600 _ _ 1 F 290 7 9 7.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

7.8 7.8 7.8 9.6 9.6 10.7 10.7 15.8 31.5 32.8 12 27 35 12 15.8 31.5 32.8 12 27 35 12 Screw-in connection Model A B C D E F G H Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 73.5 41.5 29.5 12 3.2 12 14.2 14.2 73.5 41.5 29.5 12 3.2 12 S type: White

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

-01 AS2201FG-02, AS2211FG-02 AS2301FG-02, AS2311FG-02 600 300 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 AS-F 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 TMH 400 200 06, 07 02 01, 23 ASD 300 50 03, 04 100 200 AS 01, 23 100 AS-FE 0 0 0 KE 5 0 10

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Brown DC (+) (Red) Terminal + Main Circuit Analog output Black OUT (White) PSE ZSE4 ISE4 GND terminal Blue DC () (Black) ZSE5 ISE5 ZSE6 ISE6 Dimensions ZSE3 ISE3 GS 3000 30 25.5 12 7 PS ISA PSE510-01 DC12 to 24V ANALOG1 to 5V GND 1MPa MADE IN JAPAN RED(+) WHITE(1) BLACK() MAXPRESS 13 10 ZSE1 ISE1 7 ZSE2 ISE2 01, T01 ZSP ISl (20) 24 ZSM Width across flats 12 PFl 01: R(PT) 1/8 T01: NPTF 1/