Series VQ1000/2000 10- 21- 5 Port Solenoid Valve 1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.
1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.
)5 1 (P) 3(R2) VQZ r r e q w e q w SQ VFS VFR VQ7 VQ2300 VQ2400 VQ2301 VQ2401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r VQ2500 VQ2501 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ2A01 VQ2B01 4(A) 2(B) 2(B) 4(A) r 5(R1) 1(P) 3(R2) 5(R1) 1(P) 3(R2) VQ2C01 2(B) 4(A) 5(R1) 1(P) 3(R2) Component Parts Component
l xDiinensiom:With Sp*r 2 Nllt $enies I Indluifrnl Unll/ llalu (Dimensions in millimeters Valve: Applicable valve / NVJ300 (N.O. type) Nzxi-v@K38@@@ Spacer 2 Gor side Srf,f,r,r 2,/ZX1-s,2 Ak supply passur port Exterml vacuum rreestxe aoat Valve: Appllcable valve /Air operatd Nar-v@K6 Ak opEted EXrA) GXr A) M3XO,5 r ^ T ul . oi : l f r l | t M5xO.8 c (PV pdt) Air supply Exthal v Nol6) XDi.nensidrstFo
l xDiinensiom:With Sp*r 2 Nllt $enies I Indluifrnl Unll/ llalu (Dimensions in millimeters Valve: Applicable valve / NVJ300 (N.O. type) Nzxi-v@K38@@@ Spacer 2 Gor side Srf,f,r,r 2,/ZX1-s,2 Ak supply passur port Exterml vacuum rreestxe aoat Valve: Appllcable valve /Air operatd Nar-v@K6 Ak opEted EXrA) GXr A) M3XO,5 r ^ T ul . oi : l f r l | t M5xO.8 c (PV pdt) Air supply Exthal v Nol6) XDi.nensidrstFo
2, Metal joint q, w, O-ring e, r, t, y, u VVFS5000-1A-2Plug-in type Non plug-in type !1 VVFS5000-2A-1 VVFS5000-2A-2 End plate (U side) assembly !
N.O. c f a e b d (A) 2 (A) 2 (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) h h 3 (R) 1 (P) 3 (R) 1 (P) g g Component parts Replacement parts Description Body Piston plate End cover Piston Spool valve assembly Spool spring No. No. 1 2 3 4 5 6 Material Aluminum die-casted Resin Aluminum die-casted Resin Stainless steel Note White White White Description Note No.
MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) Refer to the above diagram for bottom piping. MY1HT50, 63 R L L R L R L R L R Slide table operating direction 120 World Wide Support... Europe ENGLAND SMC Pneumatics (U.K.) Ltd.
28.1 Linear encoder Environment error EDB 2A.1 Linear encoder error 1-1 EDB 2A.2 Linear encoder error 1-2 EDB 2A.3 Linear encoder error 1-3 EDB 2A.4 Linear encoder error 1-4 EDB 2A Linear encoder error 1 2A.5 Linear encoder error 1-5 EDB 2A.6 Linear encoder error 1-6 EDB 2A.7 Linear encoder error 1-7 EDB 2A.8 Linear encoder error 1-8 EDB 2B Encoder counter error 2B.1 Encoder counter error
position single 2 position double PR R PR R 3 5 1 4 2 4 2 5 1 A B A B 7 7 R1 P R2 R1 P R2 6 3 position closed center/exhaust center/pressure center 3 position closed center A B 4 2 5 1 PR2 R A 3 position exhaust center A B B PR R 3 position pressure center A B 7 R1 P R2 PR R (This construction shows closed center type.)
(R) e r Port 3 (R) Port 2 (A) Port 1 (P) Port 23(P2) (Pilot air port) y i Port 2(A) u r y Port 1(P) t q VEX3320 (Air operated) VEX3420 (Air operated) w e q r y y t w r e u t t 12(P1), 23(P2) Port Port 3(R) y y (Pilot air port) r i Port 2(A) u r Port 1(P) t q Port 1(P) Port 2(A) Port 3(R) Component Parts No.
2 !3 !4 !5 !6 !7 !8 !9 @0 q w e r t y u i o !
[Option] Conforms to ISO 15407-2 Standard Size 18 mm, 26 mm Plug-in Type 5 Port Solenoid Valve Series VS 8-2/VS 8-4 S R S R Series VS 8-4 S R Series VS 8-2 S R Conforms to ISO 15407-2 Standard S R S R ISO Standard: Interface conforming to 18 mm size (VS 8-2) and 26 mm size (VS 8-4) Accommodates IP65 enclosure.
SZ3B60 [N.C. valve x 2 pcs.] 4(A) 2(B) r t !0 !1 i w w u 6 e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3B60K/With back pressure check valve 4(A) 2(B) 5(R) SOL.a SOL.b 3(R) 1(P) o 5 (R) 1 (P) 3 (R) SZ3C60 [N.C. valve, N.O. valve 1 pc. each] SZ3C60 [N.C. valve, N.O. valve 1 pc. each] 4(A) 2(B) r u !0 !
oqir -M5, BgT I l , NPTF 2 porrs i 'u NPTF z Po't" ,D# tp pod, l l -r-f *_\ \ 1 l \ 0.39 (1ol n ) 4 6 7 R 10 1 1 1 1 2 13 14 15 16 18 19 L1 (39.5) 1.57 (50) 2.8 (60.5) 2.ffi (7r) 3.2 (81.5) (92) 4.O4 4.45 002.5) (11s) 4.86 (r23.5) 5.28 5.69 (134) (144.5) 6.10 fts5) 6.52 (165.5) 6.93 076) 7.34 (1e6.51 (197) 4.17 (207.58.58 (218) 9.00 (228.5) L2 124 {31,5) (42) 2.O7 (52512.44 (63) 2.g r 3.31
oqir -M5, BgT I l , NPTF 2 porrs i 'u NPTF z Po't" ,D# tp pod, l l -r-f *_\ \ 1 l \ 0.39 (1ol n ) 4 6 7 R 10 1 1 1 1 2 13 14 15 16 18 19 L1 (39.5) 1.57 (50) 2.8 (60.5) 2.ffi (7r) 3.2 (81.5) (92) 4.O4 4.45 002.5) (11s) 4.86 (r23.5) 5.28 5.69 (134) (144.5) 6.10 fts5) 6.52 (165.5) 6.93 076) 7.34 (1e6.51 (197) 4.17 (207.58.58 (218) 9.00 (228.5) L2 124 {31,5) (42) 2.O7 (52512.44 (63) 2.g r 3.31
( Body Ported Type 2 Position Single : NVJA3120-M3(-F) 2 Position Double : NVJA322O-M3(-F) M3x0.5 2 po.ts (Piot r 0.07(1.8)Dia 2 Mounting hotes 0.13(3.2) Dia 2 Mounting holes \. I f---a I \ -"j f!'-ll L?
Note ) 2 position double and 3 position cannot be mounted. 40.6 3(R2) 5(R1) P1 Po 1(P) Circuit diagram Plug-in type Plug lead type SUP blocking plate VVQ5000-16A-1 EXH blocking plate VVQ5000-16A-2 18.5 20.2 When 2 or more different pressures are supplied to one manifold, blocking plates are installed between stations under different pressures. 28.8 44.6 R P R R P R R P R SUP/EXH passages
Note ) 2 position double and 3 position cannot be mounted. 40.6 3(R2) 5(R1) P1 Po 1(P) Circuit diagram Plug-in type Plug lead type SUP blocking plate VVQ5000-16A-1 EXH blocking plate VVQ5000-16A-2 18.5 20.2 When 2 or more different pressures are supplied to one manifold, blocking plates are installed between stations under different pressures. 28.8 44.6 R P R R P R R P R SUP/EXH passages