Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

AIR COMBINATION

Model AC10*-A AC20*-B AC25*-B AC30*-B AC40*-B AC40*-06-B AC50*-B AC55*-B AC60*-B Port size M50.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 Gauge port size Note 1) 1/16 1/8 Fluid Air Ambient and fluid -5 to 60 (Should be no freezing) temperature Note 2) Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Set pressure range 0.05 to 0.7 MPa 0.05 to 0.85 MPa Filtration / Air filter 5

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

Hydraulic

Rod end male thread (mm) F L A B C D E G H J K M P Q R Bore size (mm) M8 x 1.25 9.5 depth 5.4 20 51 43 8 12 10 10 6 30 5.5 43 1/8 16.5 6 M10 x 1.5 9.5 depth 5.4 25 53 45 8 14 12 12 6 36 5.5 49 1/8 17 8 M12 x 1.75 11 depth 6.5 32 61 51 10 18 14 15 7 47 6.6 63 1/4 19.5 10 M16 x 2 14 depth 8.6 40 65 55 10 22.4 19 20 7 52 9 71 1/4 20.5 10 M20 x 2.5 17.5 depth 10.8 50 71 60 11 28 24 24 8 58 11

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order JSXZ 3 1 C N 02 R 5 G D B w y e r t u o !

VS7-6

Cylinder port position O-ring NBR 4 AXT502-19 Wiring specification L side R side L R O-ring NBR 2 AXT502-20 Side Bottom A B Plate SPCC 1 AXT502-22-2 Cylinder port size Gasket Ordering source area code NBR 1 AXT502-31 1/4 3/8 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting Code Japan, Asia Australia areas 02 03 C6 Note 1) Oval countersunk head screw SWRH3 2 M4 X 8 E Europe N North

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Series Appearance Size Metric size Inch size 1" 1 1/4" 6 8 10 12 19 1/8" 25 1/4" 3/8" 1/2" 3/4" 4 3 1 P.336 2 Union reducing LQ3U-R 3 4 : B side : A side 5 6 7 1 P.338 : A side Union elbow reducing LQ3E-R 2 3 4 5 : B side 6 1 P.340 Union tee reducing LQ3T-R 2 : B side 3 4 5 : C side : A side 6 Note) : A side tubing O.D. : B side tubing O.D. : C side tubing O.D. Tubing O.D.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

LEC-OM07605CN

PC01] _ _ _ x 0h _ _ x _ 0h _ x _ _ 0h x _ _ _ 0:1rev 1:0.1rev 2:0.01rev 3:0.001rev 0h PC07 ZSP ZSP() ZSP()20r/min 50 0 [r/min] 10 PC08 OSL x120%x120% 0X120% 0 0 [r/min] 20 5 34 5. [] PC09 MOD1 1 M01(1) _ _ x x 1 5.7 00h _ x _ _ 0h x _ _ _ 0h 5.7 00 (8V/) 01 (8V/) 02 (+8V/) 03 (+8 V/) 04 (8V/) 05 (8V/) 06 (10V/100pulses) (1) 07 (10V/1000pulses) (1) 08 (10V/10pulses) (1) 09 (10V/

IDG

IDG60S to IDG100S IDG3 to IDG50 IDG3H to IDG50H IDG30L, IDG50L Port size Symbol Bore Size V IDG60 to IDG100 IDG60H to IDG100H IDG60L to IDG100L 3 5 10 20 30 50 60 75 100 01 1/8 02 1/4 IDG60S to IDG100S Note) Note) 03 3/8 04 1/2 Note 1) Element service indicator is also available. Refer to Made to Order Specifications on page 14-19-48.

E-P HYREG ® Series VY1 1

0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

Rotary Clamp Cylinders

2 @0 i o e @3 @1 !1 o t y u w q r !9 @2 @5 @4 !

HRX-OM-R028

Calculation example Message for BCC [STX] 01RPV1 [ETX] Calculation ASCII HEX [STX] 02 0 30 1 31 R 52 P 50 V 56 1 31 [ETX] 03 e 65 Code for EXOR from STX to ETX is BCC. Sending message [STX] 01RPV1 [ETX] e 5.7 Command Table 5.7-1 shows the commands which are supported by the product. No response is returned for a request message of a command which is not in Table 5.7-1.

HRX-OM-S010

Calculation example Message for BCC [STX] 01RPV1 [ETX] Calculation ASCII HEX [STX] 02 0 30 1 31 R 52 P 50 V 56 1 31 [ETX] 03 e 65 Code for EXOR from STX to ETX is BCC. Sending message [STX] 01RPV1 [ETX] e 5.7 Command Table 5.7-1 shows the commands which are supported by the product. No response is returned for a request message of a command which is not in Table 5.7-1.

HRX-OM-Q033

Calculation example Message for BCC [STX] 01RPV1 [ETX] Calculation ASCII HEX [STX] 02 0 30 1 31 R 52 P 50 V 56 1 31 [ETX] 03 e 65 Code for EXOR from STX to ETX is BCC. Sending message [STX] 01RPV1 [ETX] e 5.7 Command Table 5.7-1 shows the commands which are supported by the product. No response is returned for a request message of a command which is not in Table 5.7-1.

HRX-OM-M091

Calculation example Message for BCC [STX] 01RPV1 [ETX] Calculation ASCII HEX [STX] 02 0 30 1 31 R 52 P 50 V 56 1 31 [ETX] 03 e 65 Code for EXOR from STX to ETX is BCC. Sending message [STX] 01RPV1 [ETX] e 5.7 Command Table 5.7-1 shows the commands which are supported by the product. No response is returned for a request message of a command which is not in Table 5.7-1.

HRX-OM-T004

Calculation example Message for BCC [STX] 01RPV1 [ETX] Calculation ASCII HEX [STX] 02 0 30 1 31 R 52 P 50 V 56 1 31 [ETX] 03 e 65 Code for EXOR from STX to ETX is BCC. Sending message [STX] 01RPV1 [ETX] e 5.7 Command Table 5.7-1 shows the commands which are supported by the product. No response is returned for a request message of a command which is not in Table 5.7-1.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

(mm) 4 6 8 10 12 (1) AS221FE-01 AS231FE-01 20, 25, 32 R 1/8 AS221FE-02 AS231FE-02 20, 25, 32, 40 R 1/4 AS321FE-03 AS331FE-03 40, 50, 63 R 3/8 AS421FE-04 AS431FE-04 63, 80, 100 R 1/2 Note 1) Elbow type only Note 2) Distinction between meter-out/meter-in types by appearance Those are distinguished by the lock nut.

AR20-B to AR60-B

Set pressure range [MPa] 0.1 to 1.7 Ambient and fluid temperature [C] 5 to 60 (with no freezing) Applicable Model Applicable Model Model AR25-B AR30-B AR40-B AR40-06-B AR50-B AR60-B Model AR20-B AR25-B AR30-B AR40-B AR40-06-B AR50-B AR60-B Port size 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 r BG AR B B X430 30 03 BG q 30 AR