C76 4 !3 !8 !7 @7 #1 @9 !0 t y e i u !2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.
side 30 7.5 10.5 CKQ 2 x 6H7 Depth 10 D Clamp arm 4 x M8 x 1.25 Depth 12 Port side C A 2 x Rc1/8 B 45 49.5 Hole diameter of workpiece C D d K SR Q Model number Hole diameter of workpiece C D d K SR Q Model number Hole diameter of workpiece C D d K SR Q Model number 115 11.6 116 11.7 117 11.8 118 11.9 119 12.0 120 155 15.6 156 15.7 157 15.8 158 15.9 159 16.0 160 7.5 075 7.6 076 7.7 077 7.8
B 2 B 2 B 2 B 2 B 2 PE R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 X A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2-One-touch fitting (X,PE ports) Applicable tube O.D.: 6 2n2-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 Applicable connector: 26 pin MIL type with strain relief (L4) L3 (conforms to MIL-C-83503) Connector case attachment lever (both sides) 7.6 (3.2) 101.2 Horizontal connector
Circulating uid outlet, Circulating uid return port Rc3/4 NPT3/4 or G3/4 Overow port Rc1 NPT1 or G1 Automatic uid ll port Rc1/2 NPT1/2 or G1/2 Facility water inlet, Facility water outlet Rc3/4 NPT3/4 or G3/4 (for HRS-EP029 or HRS-EP030) (It is not necessary to purchase this when pipe thread type F or N is selected in How to Order since it is included in the product.) Part no.
HRL Series 3.3 Installation 3-41 HRX-OM-X037 Chapter 3 Transport and Setting Up Recommended piping circuit User's equipment Thermo-chiller 1 2 2 Circulating fluid outlet for CH2 Optical 2 2 systems Circulating fluid return port CH2 1 4 4 Circulating fluid outlet CH1 for Laser 4 4 source Circulating fluid return port CH1 3 For water-cooled type 5 4 6 Facility water inlet Facility 4 5 water
8 C J N R W Z AW10 AW30 to 40 B C D E G H 1 2 6 8 C J N R W Z Accessories Optional specifications 56 AW10 to 40 Standard specifications AW10 M5 x 0.8 AW20 1/8, 1/4 AW30 1/4, 3/8 Air 1.5MPa 1.0MPa 0.05 to 0.85MPa AW40 1/4, 3/8, 1/2 AW40-06 3/4 Model Port sizes Fluid Proof pressure Maximum operating pressure Set pressure range Pressure gauge port size Note 1) 0.05 to 0.7MPa Rc 1/16 Note 2)
(n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) Related Products 2 (Different surfaces and same surface), 1 25 125 165 155 150 145 140 (n 4) 2 (n 4) 2 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 D-F5NT 25 + 55 125 + 55 140 + 55 145 + 55 150 + 55 155
(Full Span) Display accuracy Size 4 6 5/32 1/4 Symbol C4 C6 N3 N7 Semi-standard 230 Calibration angle ARM ARM Description None Oil-free Symbol Nil X17 Limit indicator With limit indicator Weight 17 g ARP 17.5 IR-A ARM10 Straight type 6 28 IR X Fitting size 4, 5/32 2 IRV OPEN 6 2 X 1.5 1/4 6 VEX 28 Elbow type X Y Fitting size SRH 4, 5/32 10.5 21.5 R 5.5 E V O C 6 10.5 22 SRP 1/4 10.5 24.5
2) n = 2, 4, 6, 8, 80 + 35 (n 2) n = 2, 4, 6, 8, 90 + 35 (n 2) n = 2, 4, 6, 8, 55 + 50 (n 2) n = 2, 3, 4, 75 + 50 (n 2) n = 2, 4, 6, 8, 80 + 50 (n 2) n = 2, 4, 6, 8, 90 + 50 (n 2) n = 2, 4, 6, 8, Different sides D-A44C n Same side 10 75 80 90 1 2 (Different sides, Same side), 1 15 80 85 90 95 105 D-Z7/Z80 D-Y59/Y7P D-Y7W (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2
n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 n 90 + 30 80 + 30 n = 4, 8, 12, 16 75 + 30 n = 4, 8, 12, 16 65 + 30 n = 4, 8, 12, 16 10 + 30 n = 2, 4, 6, 8 n = 4, 8, 12, 16 2 (Different sides, Same side), 1 20 95 100 105 110 D-Y7BAL (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 n 110 + 45 105 + 45 n = 4, 8, 12, 16 100 + 45 n = 4, 8, 12, 16 95 + 45 n = 4, 8, 12, 16 20 + 45 n = 2, 4, 6, 8 2 (Different
N.C. 4-position dual 3-port valve (B) 4 2 1 5 3 N.O. N.O. 4-position dual 3-port valve (C) 4 2 1 5 3 N.C.
Includ6 body and (2) locklng 9tns. Eody Asdnbly-l/a. NF IF p.rt!. Inctuda body .nd (2) tocktno ths. sprir|oSt AXT0r&4 Spnig-spool rotlm xmosl0 of!!L-!!9qtq 4RP568414 5'Oool A s|erD Aas,y Galket-aolnold cov.r xTot1{l 1 spac.r AXT!1&5 1 cavr asldnbly-a"c. 3ol6nold. cnmB|3 ol cov.r, recsd no}tocking oplralor, and {4) dot, 12, Cdor a!.mt,y-A,C. tol.
4 2 4 3 Compressed air [7 : 4 : 4] Line Filter AFF Mist Separator AM Compressed air [6 : 8 : 4] Line Filter AFF 2 7 3 1 4 2 Mist Separator AM Micro Mist Separator AMD Micro Mist Separator AMD Activated Carbon Filter AMK 1 7 2 1 4 1 Certified by a third party organization Contaminants ISO 12500: Filters for compressed air test methods ISO 8573: Compressed air Particles ISO 12500-3:2009 Filters
16.2 34 16.2 17 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 P 1 A 4 A 4 A 4 A 4 A 4 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" M5 x 0.8 [4(A), 2(B) port] Applicable D-sub connector: equivalent { } JIS-X-5101 MIL-C-24308 (L4) L3 (3.2) 101.2 Switch
D-M9B D-MgB (2-wire) [T:$8T.'}tr J' Range of load to wire:4 timgs New types t;(!ri.t{:nl,|1na! D-FgB 5 to 40mA lead wire is available as llexlbe Indicator Light: G tn" Conaol point angle compared to E ; 9 0 4 5 0 4 a Angte C D P 1 2 t l ;:,.-; !
1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.
1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.