NVEPA|VEFseies

Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

Plug-in Unit

03 Individual EXH spacer VVQ4000-R-1SUP/EXH block plate VVQ4000-16A 02 03 VQC SQ VQ0 ^{VQ4 Residual pressure release valve perfect spacer VVQ4000-25A-1 Note 1) SUP stop valve spacer VVQ4000-37A-1 Interface regulator ARBQ4000-00-1 A B P Throttle valve spacer VVQ4000-20A-1 VQ5 VQZ VQD PUSH LOCK Note 1) Perfect spacers with residual pressure release valve cannot}

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Example: SS5YJ5-20-03 1 pc. (Manifold base) SYJ5120-5G-M5 2 pcs. (Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) SS5YJ5-43-03-C4 1 pc. (Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

VXA21/22

Port size 01 02 03 1 8 1 4 3 8 Valve/Body 4 Common/single Refer to table q for configuration. Options V Standard For vacuum, non-leak Select an option mark by the "Applicable Fluid Check List" p.4.0-13 for a special fluid outside of standard. VX VNl Table q Port/Orifice Size Orifice size (No.)

C95Series

Standard specification Solid State Lead wire Oil proof vinyl Impact realstance l 000mlSI" {102 G} Insulation realstan . SOMO or more under the test voltaoe 500VDC (Between case and cable) Withstand vohaae 1000 VAG 1 min Between case and cable) Ambleot temperatu... 14-14O'F (-10-6O'C) ProtecUon .tr~re Note 1) lEG Spec IP67. JISC0920 (Water proof).

CL

S + Stroke ZZ + Stroke With rod boot l h + l ZZ + l + Stroke Bore size (mm) Stroke range A B1 BC BN BZ C D E GA GB GC GD GK GL GQ GR I J K KA MM NA AL 20 25 32 40 26 31 38 47 4 7 7 8 4 7 7 8 5.5 9 9 11 3.5 4 4 4 54 62 62 67 19 20 21 23 12 12 11 12 85 95 95 103 12 14 18 25 14 16.5 20 26 57.5 69 69 76 91 101 102 111 38 45 45 52 13 17 17 19 24 29 36 44 18 22 22 30 M8 x 1.25 M10 x 1.25 M10 x

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 92 93 94 94 95 95 95 95 96 96 96 96 96 97 97 98 98 99 99 99 100 100 102 103 103 104 106 106 107 109 111 111 Caution . Specifications. Construction. Dimensions . Series CQSW Compact Cylinder: Standard Type Double Acting, Double Rod 12, 16, 20, 25 .

D. P. Lube ALD600/900 Series

The condition of the generation of micromist can be checked from the oil filler port. 2 2 Fluid Air 1.5 MPa Proof pressure Operating pressure range 0.15 to 1.0 MPa 0.1 to 1.0 MPa 0.03 to 0.1 MPa 0.05 MPa 102 L/min (ANR) Operating pressure differential range Recommended press. differential Note 3) Press. differential setting min. flow 2000 5000 2000 5000 Bowl capacity between levels (cm 3)

Table of Contents

Mitsubishi Electric Corporation Yaskawa Electric Corporation 02 03 04 05 05 5m Cable length 2m 3m 4m 5m Applicable cables Model Manufacturer part no.

3 Port Solenoid Valve Metal Seal Series VZ200 1

suppressor With light/surge voltage suppressor 19.5 14.5 n-M5 x 0.8 2-4.3 8.5 mounting hole 21.6 17 P E PE 9.5 9.5 43 Max. 10 78 4-Rc 1/8 2-M5 x 0.8 (Pilot EXH) (Pilot EXH) 2-M5x0.8 2-M5 x 0.8 (Pilot EXH) 300 (Lead wire length) 300 (Lead wire length) 76 68.5 2-M5 x 0.8 (Pilot EXH) Stations n: Stations Formula L1 = 16n + 11 L2 = 16n + 22 2 43 54 3 59 70 4 75 86 5 91 102 6 107 118 7 123 134

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

167 120 136 20 20 20 oz oz oz 2.79 2.40 2.68 2.22 6.46 8.15 7.58 3.67 3.14 7.02 5.36 5.89 4.23 4.80 g g g 113 98 108 92 247 308 287 146 127 267 206 227 166 186 25 25 25 oz oz oz 3.99 3.46 3.81 3.25 8.71 10.86 10.12 5.15 4.48 9.42 7.27 8.01 5.86 6.56 g g g 45 39 44 37 54 46 77 85 62 70 12 12 12 oz oz oz 1.59 1.38 1.55 1.31 1.90 1.62 2.72 3.00 2.19 2.47 g g g 59 51 58 49 71 60 102

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

0.016) PA Valve specifications Solenoid specifications Effective orifice 0.36mm2 (Cv 0.02 ) 0.20mm2 (Cv 0.011) AR Response time Note 1) ON:3.5ms,OFF:1.5ms ON:3.5ms,OFF:2.5ms Ambient and fluid temperature 14 to 122 F (-10 to +50C) Note2) Lubrication Not required Manual override Non-locking recessed type/Locking tool typeNote3) Mounting orientation Free Protection structure Dust proof Weight .03

1

Applicable bore size B (C) (D) d H NT-02 20 13 (15.0) 12.5 M8 x 1.25 5 NT-03 25, 32 17 (19.6) 16.5 M10 x 1.25 6 NT-04 40 22 (25.4) 21.0 M14 x 1.5 8 Part no.

AFF

Accessory (Option)/For AFF2B to AFF75B Applicable model Bracket assembly With cap bolt and spring washer AFF2B AFF4B AFF8B AFF11B AFF22B AFF37B AFF75B BM51 BM52 BM53 BM54 BM55 BM56 BM57 Accessory (Option)/For AFF75A to AFF220A AFF75A AFF125A AD402-03-2 G46-15-02 AFF150A AFF220A Applicable model Auto drain (2 pcs. each) Pressure gauge (2 pcs. each) Companion flange (2 pcs. each) Anchor bolt

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

ALT-5 Oil distributor Auto feed tank 1047 ALF400 to 900, ALT-5/-9 Series Operating Pressure Range Tank and line pressure How to Order ALF 40 02 0 (2) (1) Option Operating allowable range Operating allowable range Tank pressure (MPa) Nil R Auto Feed Lube Flow direction: Right to left Option Body size Port size Symbol Nil Description Applicable model 40 50 60 80 90 2 1 02 03

Micro-Mist Separator with Prefilter Series AMH

-3502-2740 Fax:03-5251-7240 Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing August 1995.

Electric Actuators

Mitsubishi Electric Corporation Yaskawa Electric Corporation 02 03 04 05 05 5m Cable length 2m 3m 4m 5m Applicable cables Model Manufacturer part no.

Table of Contents

Series SZ3000 5 Port Solenoid Valve Serial Transmission Type. 52 53 54 55 56 57 57 59 60 60 61 62 63 64 65 66 67 67 69 70 70 71 72 73 74 75 76 77 77 79 80 80 81 82 83 84 85 87 89 91 97 97 98 100 101 101 102 103 104 105 106 106 107 111 111 114 121 125 130 130 132 134 137 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Shock Absorbers and Rate Controls

0 i.03 L I /A r{/ALl2 .tti, Pm225tI t, -2, -3 8 . 1 4 8.34N/A llF) lYo-12 UNt .38 l.t 3 t.?0 5.03 21 t{/a N/A 1,25 .0J P[152flt -1, .2, -3 5.68 0.J/ 1.73(rFl r%.r? ul{ .501.481.753.63 /A l.v 1.19[/a !