CM2

100 100 100 401 to 500 125 125 125 125 1 to 50 63 67 67 71.5 51 to 100 76 80 80 84.5 101 to 150 88 92 92 96.5 151 to 200 101 105 105 109.5 201 to 300 126 130 130 134.5 301 to 400 151 155 155 159.5 401 to 500 176 180 180 184.5 51 to 100 156 160 162 194 101 to 150 168 172 174 206 151 to 200 181 185 187 219 201 to 300 206 210 212 244 301 to 400 231 235 237 269 401 to 500 256 260 262 294 20

CM2

80 80 84.5 101 to 150 88 92 92 96.5 151 to 200 101 105 105 201 to 300 126 130 130 51 to 100 156 160 162 194 101 to 150 168 172 174 206 151 to 200 181 185 187 219 201 to 300 206 210 212 244 20 25 32 40 109.5 134.5 Boss-cut style Built-in One-touch fitting With air cushion (mm) ZZ G 8 8 8 11 P 6 6 6 8 Q 23 26 28.5 32.5 Bore 20 25 32 40 Bore 20 25 32 40 N1 17.5 17.5 17.5 21.5 WA 13 13 13 16

A_HEC-OM-K001

ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK CR (Possible to omit) Note) 2DH is entered in 101 digit is attached to temperature data. Host SOH UT ENQ 32H Check sum CR (H) (L) Chemical Thermo-con SOH UT STX 32H Internal sensor temp.

Compact Vacuum Unit Ejector/ Vacuum Pump System

P.38 Change of description about filter element. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2013 SMC Corporation All Rights Reserved 59 -

MGG

BA 32 BA 04 BA 05 BA 06 BA 08 BA 10 BA 01 BA 02 BM1 01 BM1 02 BM1 32 BM1 04 BM1 05 BM1 06 The following stainless steel mounting screw kits (including set screws) are available for use depending on the operating environment. (Order the mounting band separately, as it is not included.)

MXW

M-5J AS1201F-M5-04 (Extension fittings) (Speed controller with One-touch fittings, Elbow style) KJL04-M5 AS1001F-04 (One-touch fitting) (Speed controller with One-touch fittings, In-line style) + + Table for Auto Switch Interference with Speed Controller and Fittings Auto switch model Electrical entry direction Wiring type Auto switch model 3-wire D-M9NV, D-M9PV Solid state switch Perpendicular

Air Slide Table Series MXW

MXW MXJ M-5J (Extension fittings) AS1201F-M5-04 (Speed controller with One-touch fittings, Elbow style) + MXP KJL04-M5 (One-touch fitting) AS1001F-04 (Speed controller with One-touch fittings, In-line style) + MXY Table for Auto Switch Interference with Speed Controller and Fittings Auto switch model Electrical entry direction Auto switch model Wiring type MTS D-M9NV, D-M9PV 3-wire Solid

ZL3-OM00601

Vacuum Pressure switch for vacuum with for compound pressure switch energy saving function pressure Rated pressure range [kPa] -101 to 0 -100 to 100 Set / display pressure range [MPa] -101 to 10 -105 to 105 Proof pressure [kPa] 500 Lowest configurable increment [kPa] 0.1 Applicable fluid Air, non-corrosive gas and non-flammable gas Power supply voltage: [VDC] 12 to 24 10%, ripple (p-p), 10%

IDX-OM-W017

(Ex.) 10-2 1.6MPaADH4 000-04 IDFA4E 15E1-23-L N.O() 1.6MPa 0.051.6MPa (Rc1/2IDFA3E to 11E) 25mm (Rc3/4IDFA15E1) 32mm (R1/2IDFA3E11E) (R3/4 X R1/2IDFA15E1) (R1/2) (L) IDFA Series 10-1 10 1 IDX-OM-W017 10 L 10-3 1. Rc1/2 1) R3/4: 28 30Nm R1/2 ,R3/4 2. 3. (27mm)(22mm) () () () 10-4 1. 2. 3.

EXxx-OMN0027CN

09 5 Reserved 6 (0) 7 (1) Bit No. 05 063 6 /00=Reserved01=Input10=Output 7 -76No.EX-OMN0027CN-D Bit No. 04 5 001=Bit()101=Word() 6 7 1 2 10 00,000 0 Reserved 00,001 1 3 00,010 2 Reserved : : : 00,101 5 Reserved 00,110 6 3 00,111 7 3 01,000 8 3 01,001 9 Reserved : : : 01,111 15 Reserved 10,000 16 3 10,001 17 3 10,010 18 3 10,011 19 Reserved : : : 11,101 29 Reserved 11,110 30

MGC

(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

BA -05 BA -06 BA -08 BA -10 BA -32 BA -02 BA -01 CX D-G5NBL 35 40 45 45 45 40 50 45 D-G5/K5 D-B7/B8 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 BM1 -06 Since this is a guideline including hysteresis, not meant to be guaranteed.

Air Cylinder

With air cushion With rubber bumper GA WA GA E 0 0.05 E 0 0.05 (E1) (E1) TA (F1) ZZ + Stroke S + Stroke F TA (F1) ZZ + Stroke S + Stroke F (mm) Bore size (E1) E(F1) F GA S TA WA ZZ Rc NPT G Male thread Female thread 32 17 18 2 2 18 16.5 77 (85) 17 22 119 (127) 93 (101) 40 21 25 2 2 19 19 84 (93) 18 23 136 (145) 101 (110) 50 26 30 2 2 21 21 97 (109) 20 25 157 (169) 115 (127) 63 26 32 2 2 21

LEC-OM069xx

OFFSET Device Type/Name DEVICE_ CODE 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 10 11 12 Model 00H S G D 1 1 2 2 2 3 4 4 5 6 6 6 6 6 6 00 DRIVER Ver. 02H Software version Model 20H S G M 7 7 8 8 9 10 11 12 13 00 Servomotor Ver. Encoder software version 12H Model 30H External Encoder Software version 32H Ver.

OMU0023

INP = 1 indicates that the target location has been reached. 12 Repeat steps 9-10 After settling time, the operation of step data No.20 is 13 completed. 14 01 10 9103 0002 04 0 2710 01 10 9103 0002 Step Data No. 20 target position changed to 10 mm.

One-touch Fittings Series KQ2

L D A M Nylon Urethane 3.2 KQ2R23-04 KQ2R04-06 4 6 2 2.1 9.6 33.5 34.5 3.4 2.9 18.5 17.5 15.5 10.4 4 KQ2R04-08 36.5 5.6 5.6 2.3 8 18 16 KQ2R04-10 12.8 39.5 3.6 10 18.5 KQ2R06-04 4 3 12.8 37 4 4 21 6 KQ2R06-08 37 3 8 18.5 17 KQ2R06-10 12.8 39.5 13.1 13.1 3.5 10 18.5 KQ2R06-12 42 15.2 5.2 12 20 8 KQ2R08-10 15.2 41 26.1 18.0 4.5 10 20 18.5 KQ2R08-12 42 5.1 12 12 KQ2R10-12 17 42 41.5 32.8 33

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Possible to use in vacuum or under low pressures Vacuum: Up to 101.2 kPa Low pressure: 0 to 0.2 MPa Free mounting orientation How to Order 04 4 5 1 VP3 A G 1 VP series 3 port solenoid valve CE-compliant Q CE-compliant Note) Nil Number of solenoids Single Note) Electrical entry: D/DL/DS/DZ only 1 Body size Thread type 1 4 6 8 1 2 1 2 Rc Nil G F 1 NPT N NPTF T Body ported 5 Body type Pilot

Cylinder with Lock

227 63 64 51 25 12.5 25 37.5 50 75 100 125 150 89 102 114 127 152 177 202 227 80 68 56 29 12.5 25 37.5 50 75 100 125 150 175 200 101 114 126 139 164 189 214 239 264 289 100 76 61 29 12.5 25 37.5 50 75 100 125 150 175 200 101 114 126 139 164 189 214 239 264 289 With Rubber Bumper [mm] [mm] Bore size ZZ 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600

Compact Cylinder

With split pins for double clevis pin/ double knuckle joint pin and flat washers -XC26 Description -X271 Fluororubber seals Stroke range Bore size Stroke range Bore size Stroke range 32 to 200 101 to 299 32 to 160 101 to 299 Part no.: CQ2A50-166DCZ CQ2B50-175DCZ with 9 mm width spacer inside The B dimension is 230.5 mm. Part no.: CQ2B50-166DCZ-XB10 Makes 166 mm stroke tube.

NCQ2/CQ2

Description Stroke range Bore size Stroke range Bore size Stroke range 32 to 200 101 to 299 32 to 160 101 to 299 Part no.: CQ2A50-166DCZ CQ2B50-175DCZ with 9 mm width spacer inside The B dimension is 230.5 mm. Part no.: CQ2B50-166DCZ-XB10 Makes 166 mm stroke tube. The B dimension is 221.5 mm.