Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 https://www.smcworld.com 2022 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. D-G

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

21.7 21.7 Screw-in connection S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

40 28.5 25.5 34 25.5 36.5 27.5 38.5 27.5 29.5 26 30 26 71.5 27.5 81.5 27.5 42 33 50 33.5 31 38.5 31 41 34 43.5 34.5 33.5 31 34.5 31 77 87 46.5 39 63 38.5 36 43 36 46 39 48.5 39.5 39 36 40 36 83.5 93.5 51.5 44 80 46.5 45 52 45 52.5 46.5 55 46.5 47.5 45 48.5 45 92.5 103 58 51.5 100 54 53.5 59.5 53.5 59.5 55 62 55 55.5 53.5 56.5 53.5 103 113.5 65.5 60.5 125 65.5 64.5 71 64.5 70.5 66.5

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Description Body class Type LQ-GP J Type 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin Stainless steel

ISO Standard Hydraulic Cylinder

Auto switch models Bore size (mm) 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59 D-F5W/J59W D-F5BA/F59F/F5NT D-A5/A6/A59W D-Z7/Z80 BS5-125 BMB5-032 BA7-040 BA7-040 BA7-063 CHQ CHK BT-12 BT-03 BT-04 BT-04 BT-06 CHN BS4-125 BMB4-032 BA4-040 BA4-040 BA4-063 Note 1) D-A5/A6/A59W cannot be mounted to 40, 50.

VP300/500/700

Common exhaust: VV3P5-41Stations 1-03 (G) (E) (T) (D, Y) (X port) (M5 x 0.8) N.C.

C95

Ht B Auto Switch mounting positions and dimensions [mm] Auto switch operating ranges [mm] D-Z7/Z8, D-Y5/Y7 (W) All models D-Y6, D-Y7 (W) V D-Y7BA Bore Size [mm] Bore Size [mm] D-Z7 D-Z8 D-Y5/Y7 (W) D-Y6/Y7 (W) V D-Y7BA A B Hs Ht Hs Ht Hs Ht 14 1.5 25.5 23 26.5 30 7.5 5.5 3.5 23 23 32 32 25 1.5 29.5 26 30 34 8.5 5.5 3.5 26 26 40 40 26.5 2 33.5 31 34.5 31 38 31 7.5 7 3.5 50 50 31.5 2 39 36

Plate Cylinder

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2009 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing NT printing NT 6000SZ Printed in Japan.

Air Cylinder

NCA325-13-Q6311 NCA325-13-Q6311 NCA150-13-Q6308 5008-131 NCA200-13-Q6309 5008-93 NCA150-31-Q6308 NCA150-31-Q6308 NCA325-31-Q6311 NCA325-31-Q6311 NCA150-31-Q6308 Available only as an Assembled Item. Please see below for How to Order Seal Kit. Available only as an Assembled Item. Please see below for How to Order Seal Kit. Available only as an Assembled Item.

NCA1

The resultant is the available pull stroke table. 0.625 0.307 15 18 25 31 61 77 1 0.785 39 47 63 79 157 196 1.375 1.485 74 89 119 148 297 371 6 Medium Duty Air Cylinder Series NCA1 Construction / Parts List Parts List 400 NCA400-02AQ3612-S NCA400-03-Q6312-S 200 250 325 150 NCA150-02AQ3608-S NCA150-03-Q3608-S No.

CG1

Material: Rolled steel -03 32-01 -03 Applicable pin O.D. 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.050 0.093 0.050 0.093 0.050 0.093 0.065 0.117 Bore size (mm) Part No.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Rod End Nut Material: Rolled steel 03 32 01 03 TZ Applicable bore (mm) Applicable pin O.D. Part no. TU TV TW TX TY 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.050 0.093 0.050 0.093 0.050 0.093 0.065 0.117 Part no.

C95

67 25 32.5 24.5 35 31 38 40 26 34 26 30 26 29.5 27.5 81.5 27.5 71.5 27.5 36.5 27.5 38.5 33 42 50 31 38 31 34.5 31 33.5 87 77 34 41 34.5 43.5 39 46.5 63 36 43 36 40 36 39 93.5 83.5 39 46 39.5 48.5 44 51.5 80 45 52 45 48.5 45 47.5 103 92.5 46.5 52.5 46.5 55 51.5 58 100 53.5 60 53.5 56.5 53.5 55.5 113.5 103 55 59.5 55 62 60.5 65.5 Other than the applicable auto switches listed in How

ARM10/11

Common IN Individual IN Common IN Individual IN Bonnet Polyacetal w o ARM2500 -A-02 ARM2500 -B-02 ARM3000 -A-03 ARM3000 -B-03 1 Regulator Regulator Replacement Parts 1 1 1 End plate R End plate L O-ring !0 !1 !2 Description Material Part no. No.

ARM10/11

Common IN Individual IN Common IN Individual IN Bonnet Polyacetal w o ARM2500 -A-02 ARM2500 -B-02 ARM3000 -A-03 ARM3000 -B-03 1 Regulator Regulator Replacement Parts 1 1 1 End plate R End plate L O-ring !0 !1 !2 Description Material Part no. No.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

L plug connector (L): VQZ315 (R)lLl 0 1 02 03 DIN connector (Y): VQZ315 (R)lYl VQZ Indicator light 107.5<108.5> 300 VQD (Lead wire length) 71<72> VZS Pg.7 VFS MAX.10 111.5 56.5<60> Applicable cord O.D. 3.5 to 7 VS Indicator light Cover diameter 1.5 Cross section 0.23mm2 VS7 < >: AC 86 78.5 0 1 02 03 M plug connector (M): VQZ315 (R)lMl 60.5 Cover diameter 1.5 Cross section 0.23mm2 (Lead

OMU0023

Step Request data Response data Operation details 1 01 03 0600 0004 01 03 08 Acquires the alarm history. 2 Alarm history confirmation Confirms the acquired alarm history. (9) Alarm history clearance example E.g) The Alarm History saved in the Card Motor controller (controller ID1) is cleared.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

Refer to pages 25 through 31 for safety instructions, hydraulic cylinder precautions and auto switch precautions. 1 pc.

20

SMC CORPORATION Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 FAX: 03-5298-5362 1st printing QU printing QU 00 Printed in Spain

Clamp Cylinder with Lock

Safety Instructions Be sure to read Precautions for Handling Pneumatic Devices (M-03-E3A) before using.