Table of Contents

VXF(A)2160 Tank 41l 6 x 10 pcs. VXF(A)2160 Tank 41l 6 x 6 pcs. 10 x 12 pcs. 10 x 12 pcs. Without tube (VXF2280) Without tube Without tube (VXF2280) Flow rate Q (Nl) 10 x 12 pcs. 10 x 8 pcs. 10 x 12 pcs. 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. 10 x 10 pcs. 10 x 10 pcs. 100 mm 100 mm 10 x 10 pcs. 10 x 10 pcs. 10 x 8 pcs. 10 x 8 pcs.

ZP

) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06 04 06 04 06 04 06 Model 04 06 04 06 04 06 04 06 ZP2-T4020WK ZP2-T5020WK ZP2-T6020WK ZP2-T8020WK ZP2-T3507WK ZP2-T4010WK ZP2-T5010WK ZP2-T6010WK 2 x 1.5 0.5 0.5 10 11 2.5 0.8 04

VM

VHS20/30 VHS40/40-06/50 2-10 I 10 I G H F E X H .

5 Port Solenoid Valve Series SY3000/5000/7000/9000

AN120-M5 AS3001F-06 AN110-01 SY3120-C6 SY3140-01 T0806 x 1 m AS3001F-06 T0806 x 1 m AS3001F-08 AS3001F-06 T0604 x 1 m T0604 x 1 m SY5120-01 SY5140-02 AS3001F-08 AN101-01 AN101-01 T1075 x 1 m AS4001F-10 T0604 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1 m SY7120-02 SY7140-03 AS4001F-10 AS3001F-06 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T1209 x 1 m AS3001F-06 AS4001F-10

smcmaintenancepartslist

For AC10 For AC10A For AC10B G27-10-R1 G27-10-R1 Note 3) For AC40-06 For AC40A-06 For AC40B-06 For AC40C-06 For AC40D-06 For AC50 For AC50A For AC50B For AC25 For AC25B For AC25C For AC55 For AC55B For AC30 For AC30A For AC30B For AC30C For AC30D For AC60 For AC60A For AC60B For AC40 For AC40A For AC40B For AC40C For AC40D For AC20 For AC20A For AC20B For AC20C For AC20D Section

Flow Control Equipment

Correspondence of In-line Speed Controller and Holder Metric Applicable tube Tube size Adaptable for a manifold application.(1) 4 6 8 10 12 23 04 06 08 10 12 3.2 Body size AS1001F AS2001F AS2051F AS3001F AS4001F TMH-23J TMH-04J TMH-06J TMH-06 TMH-08 TMH-10 TMH-12 AS ASN Applicable tube Inch Can be mounted to a panel.

V

S V Q Z 1 0 0 0 / 2 0 0 0 / 3 0 0 0 F I T T I N G B L A N K P L U G DIMENSIONS FITTING BLANK PLUG KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 PART A L D APPLICABLE NUMBER FITTING SIZE D 16 KQP-23-X19 31.5 3.2 3.2 16 KQP-04-X19 32 6 4 18 KQP-06-X19 35 8 6 20.5 KQP-08-X19 39 10 8 COLOR: WHITE 22 KQP-10-X19 43 12 10 M A N I F O L D O P T I O N M A N I F O L D O P T I O N S E R I

Compact and Lightweight

B All Ports: One-touch Fitting Model D1 D2 D3 d1 d2 d3 M1 M2 M3 L1 L21 L3 L4 A B C E F G1 J1 K1 N1 P1 Q1 ZH05DA-06-06-06 10.4 10.4 10.4 6 6 6 13.3 13.3 13.3 51.8 34.9 19.4 18.4 11 14 6 3.2 5.5 20 17 4.2 3.2 28 9.6 ZH07DA-06-06-06 55 ZH10DA-06-06-08 13.2 8 14.2 61.7 ZH13DA-08-10-10 13.2 15.9 15.9 8 10 10 14.2 15.6 15.6 71.8 43.9 22.4 24.4 17 20 9 4.3 7.8 27 22 4.2 35 12 ZH15DA-08-10-10 83.6

VFS

Material Aluminum die-casted Note q Description 06 10 Plug-in VFS6000-PPlatinum silver Sub-plate Body 06 10 Mounting bolt and gasket are not included.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

HAW2-04 IDF2D-1 AM150-03 AMD150-03 2.2 HAA7-06 HAW2-04 IDF3DAM150-03 AMD250-03 3.7 HAA7-06 HAW7-06 IDF4DAM250-03 AMD250-03 5.5 HAA7-06 HAW7-06 IDF6DAM250-04 AMD350-04 7.5 HAA7-06 HAW7-06 IDF8DAM350-04 AMD350-04 11 HAA15-10 HAW22-14 IDF11CAM350-06 AMD450-06 15 HAA15-10 HAW22-14 IDF15CAM450-10 AMD550-10 22 HAA22-14 HAW22-14 IDF22C1-3 AM550-10 AMD550-10 37 HAA37-14 HAW37-14 IDF37C1-3 AM650-

modular-press-e

For AC10 For AC10A For AC10B G27-10-R1 G27-10-R1 Note 3) For AC40-06 For AC40A-06 For AC40B-06 For AC40C-06 For AC40D-06 For AC50 For AC50A For AC50B For AC25 For AC25B For AC25C For AC55 For AC55B For AC30 For AC30A For AC30B For AC30C For AC30D For AC60 For AC60A For AC60B For AC40 For AC40A For AC40B For AC40C For AC40D For AC20 For AC20A For AC20B For AC20C For AC20D Section

Modular F.R.L. Pressure Control Equipment

For AC10 For AC10A For AC10B G27-10-R1 G27-10-R1 Note 3) For AC40-06 For AC40A-06 For AC40B-06 For AC40C-06 For AC40D-06 For AC50 For AC50A For AC50B For AC25 For AC25B For AC25C For AC55 For AC55B For AC30 For AC30A For AC30B For AC30C For AC30D For AC60 For AC60A For AC60B For AC40 For AC40A For AC40B For AC40C For AC40D For AC20 For AC20A For AC20B For AC20C For AC20D Section

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

reduces flow setting time

, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Vacuum Unit

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 For 2 stations manifold 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold d Models and Dimensions D Symbol Applicable size d A L D Weight [g] Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4" 18 35 8.5 1 Orange 09 5/16" 20.5 39 10 2 Orange Connector type 1 D sub-connector (25

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

SY

(S = 0.25) AN120-M5 (Cv = 0.27) AS3001F-06 (S = 0.36) AN110-01 (Cv = 1.94) 6 x 1m 6 x 1m 8 x 1m AS3001F-08 (Cv = 0.56) 8 x 1m AS3001F-08 (Cv = 0.56) AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36) AN101-01 (Cv = 1.11) AN110-01 (Cv = 1.94) 10 x 1m AS4001F-10 (Cv = 0.89) 10 x 1m AS3001F-08 (Cv = 0.56) 12 x 1m AS4001F-10 (Cv = 1.17) 6 x 1m 6 x 1m AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36)

A

1/2 60 36 98 30 24 ANA1-06 3/4 90 110 111 46 36 ANA1-10 1 160 180 132 50 41 ANA1-12 11/4 280 544 200 74 60 ANA1-14 11/2 450 612 230 74 60 ANA1-20 2 610 873 271 86 70 ANB1-01 1/8 15 10 51 22 ANB1-02 1/4 35 22 81 25 18 ANB1-03 3/8 60 35 93 30 21 ANB1-04 1/2 90 94 107 46 24 ANB1-06 3/4 160 175 133 50 41 ANB1-10 1 280 462 190 74 41 ANB1-12 11/4 450 612 230 74 60 ANB1-14 11/2 610 871 271 86 70

Secondary Batteries

With bracket a Option w Note) Applicable to 90-AF40-06, 90-AFM40-06 and 90-AFD-40-06.

ZP

Pad form Flat/Flat with ribs Deep Bellows Stroke (mm) Vacuum entry port Model 04 06 08 04 06 08 04 06 08 2004, 3507, 4010 ZPR02 to 08 Thin section flat series (10 to 16) 38 6 39 38 39 10 ZPR10 to 16 39 40 39 40 40 41 10 ZPR20 25 54 55 56 55 56 57 57 58 59 ZPR32 ZPR40 ZPR50 56 61 126 132 57 58 127 128 62 138 145 63 139 146 129 133 10 Weight by Stroke (g) Stroke (mm) Model 10 15 20 25 30 40