3 Port Solenoid Valve Rubber Seal Series SY100 1

Type 31 How to Order Applicable solenoid valve Note) SY113--M3 SY113A--M3 SY123--M3 SY123A--M3 Applicable blanking plate assembly SY100-77-1A SS3Y1 31 05 Stations 02 2 stations P R 20 20 stations R port M5 x 0.8 P port M5 x 0.8 Note) SY113(A) and SY123(A) cannot be mounted on the same manifold.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

3.6 (0.2) 5.4 (0.3) 5.4 (0.3) 12.6 (0.7) 14.4 (0.8) 14.4 (0.8) 16.2 (0.9) 62 Series VQ1000/2000 How to Order Manifolds VV5Q 1 08 C6 GU0 2 Options Series Stations Symbol Nil VQ2000 specifications None Back pressure check valve on all stations Note 2) VQ1000 specifications None Back pressure check valve on all stations Note 2) Symbol Nil Symbol Stations 1 2 VQ1000 VQ2000 Symbol Stations 02

ZQ-OM01401

ZQ 05 1U A-K15LO B-VA M W-3 3-N (1) (2) (3) (4) (5) (6) (7)(8) (9) (1) (6) 05 0.5 07 0.7 W (2m) 10 1.0 (7) (V ) (8) (P ) (2) 1U 0 (M5x0.8) 3M 1 3.2 () 0 (M5x0.8) 2 4 () 2 4 () (3) 3 6 () 3 6 () 4 3.2 () 5 4 () B 5 4 () 1) (9) (4) ( [kPa] VA -100 to 100 NPN1 + VB PNP1 + N 1) ZFC (5) 2) M SI (kPa) 2) (99 10 ) ZZQ108A-B S C-A (1) (2) (3) (4) 1 (1) 2) 01 1 S () 02

Vacuum

Pad Type , ]>:]TYpr I '101 t6, 25 40 50 a a o o a a o a a a o a ) a o a o a o a a O a a a 86llaws o a a o a a a a o a Uentical True Uacuum InFy tllit[ Bufle Specif ications Butfer type 360" Rotating type (J), Non-rotation type (K) Pad size o2-s8: Std. 6mm Pad size s10-s50: Std. 10mm 20,25,32,40,50 NBB (50"), Silicone rubber (40"), Urethane rubber .

Series SY100 3 Port Solenoid Valve Rubber Seal

List part numbers of the installed valve and option in required station location separately under manifold part number. 2.1-10 Series SY100 Common SUP/Common EXH 30 Type How to Order Applicable solenoid valve (1) SS3Y1 30 05 F SY113-l-M3 SY113A-l-M3 Stations 02 Applicable blank plate assembly 2 stations ... ...

Vacuum

:ti Statlons 02-2 stations System type. AEjectors B External Vacuum 'For plug (X) posirioning onty.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

mm or more 17 Wear ring POM Stroke 101 mm or more 18 Screw shaft pulley Aluminum alloy No.

Base Mounted Wiring: Plug-in w/Terminal Block, One-piece Junction Cover, Stations: 8 Stations, Passage: 2 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Bottom], Port Size: 1/8, Thread: -, Control Unit: -, Voltage Air Release Valve: -

Base Mounted Wiring: Plug-in w/Terminal Block, One-piece Junction Cover, Stations: 2 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 1/8, Thread: -, Control Unit: -, Voltage Air Release Valve: -

Base Mounted Wiring: Plug-in w/Terminal Block, One-piece Junction Cover, Stations: 8 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 1/8, Thread: -, Control Unit: -, Voltage Air Release Valve: -

Base Mounted Wiring: Plug-in w/Terminal Block, One-piece Junction Cover, Stations: 4 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 1/8, Thread: -, Control Unit: -, Voltage Air Release Valve: -

Base Mounted Wiring: Plug-in w/Terminal Block, One-piece Junction Cover, Stations: 5 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: ø8 One-touch Fitting, Thread: -, Control Unit: -, Voltage Air Release Valve: -

Base Mounted Wiring: Plug-in w/Terminal Block, One-piece Junction Cover, Stations: 6 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 1/4, Thread: NPTF, Control Unit: -, Voltage Air Release Valve: -

Base Mounted Wiring: Plug-in w/Terminal Block, One-piece Junction Cover, Stations: 8 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 1/4, Thread: NPT, Control Unit: -, Voltage Air Release Valve: -

Base Mounted Wiring: Plug-in w/Terminal Block, One-piece Junction Cover, Stations: 9 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 1/4, Thread: NPTF, Control Unit: -, Voltage Air Release Valve: -

Base Mounted Wiring: Plug-in w/Terminal Block, One-piece Junction Cover, Stations: 3 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 1/8, Thread: -, Control Unit: -, Voltage Air Release Valve: -

Base Mounted Wiring: Plug-in w/Terminal Block, One-piece Junction Cover, Stations: 5 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 1/8, Thread: -, Control Unit: -, Voltage Air Release Valve: -

Base Mounted Wiring: Plug-in w/Terminal Block, One-piece Junction Cover, Stations: 6 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 1/4, Thread: NPT, Control Unit: -, Voltage Air Release Valve: -

Base Mounted Wiring: Plug-in w/Terminal Block, One-piece Junction Cover, Stations: 3 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 1/4, Thread: NPT, Control Unit: -, Voltage Air Release Valve: -

Base Mounted Wiring: Plug-in w/Terminal Block, One-piece Junction Cover, Stations: 5 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 1/4, Thread: NPT, Control Unit: -, Voltage Air Release Valve: -